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公开(公告)号：NO20014464A
公开(公告)日：2001-11-16
申请号：NO20014464
申请日：2001-09-14
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01P
CPC classification number: G01P1/023 , B81B3/001 , B81B3/0072 , B81B7/0016 , B81B2201/0235 , G01D11/245 , G01D18/008 , G01N2001/021 , G01P15/0802 , G01P15/13 , G01P21/00 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/181 , G01V1/186 , H01L2224/48472 , H01L2924/0002 , H01L2924/00
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公开(公告)号：AU6091100A
公开(公告)日：2001-01-30
申请号：AU6091100
申请日：2000-07-13
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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公开(公告)号：CA2366320C
公开(公告)日：2010-05-11
申请号：CA2366320
申请日：2000-03-16
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P15/02 , G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：NO20025744D0
公开(公告)日：2002-11-29
申请号：NO20025744
申请日：2002-11-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , G01P
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公开(公告)号：AU6508401A
公开(公告)日：2001-12-11
申请号：AU6508401
申请日：2001-05-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , G01P15/00
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Patent Agency Ranking
公开(公告)号：CA2366320A1
公开(公告)日：2000-09-21
申请号：CA2366320
申请日：2000-03-16
Applicant: INPUT OUTPUT INC
Inventor： IP MATTHEW , SCHMIDT MARTIN A , YU DULI , MARSH JAMES L , SELVAKUMAR ARJUN , SIMON PHILIP , FUNG BING-FAI , GOLDBERG HOWARD D
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305 ) also includes a top cap press frame recess (405) and a bottom cap press fram e recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of th e accelerometer (305). A dicing process is performed on the accelerometer (305 ) to isolate the electrical leads of the accelerometer (305). The acceleromete r (305) further includes overshock protection bumpers (720) and patterned meta l electrodes to reduce stiction during the operation of the accelerometer (305 ).
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公开(公告)号：NO20020140L
公开(公告)日：2002-03-12
申请号：NO20020140
申请日：2002-01-11
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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公开(公告)号：NO20020140D0
公开(公告)日：2002-01-11
申请号：NO20020140
申请日：2002-01-11
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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公开(公告)号：CA2410909A1
公开(公告)日：2001-12-06
申请号：CA2410909
申请日：2001-05-29
Applicant: INPUT OUTPUT INC
Inventor： YU LIANZHONG , SCHMIDT MARTIN A , GOLDBERG HOWARD D , RIED ROBERT P , SELVAKUMAR ARJUN
IPC: G01P15/08 , G01P15/125 , G01V1/18 , G01P15/00
Abstract: An accelerometer (305) which comprises a measurement mass assembly having to p capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entra nt opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) there by lowering manufacturing costs and increasing production yields.
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公开(公告)号：NO20014464D0
公开(公告)日：2001-09-14
申请号：NO20014464
申请日：2001-09-14
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01P
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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