公开(公告)号：DE60034451D1

公开(公告)日：2007-05-31

申请号：DE60034451

申请日：2000-03-17

Applicant: INPUT OUTPUT INC

Inventor： RUSHEFSKY LARRY ,  SIGMAR AXEL ,  GOLDBERG HOWARD D ,  STALNAKER W MARC ,  RINNE RAY ,  BALDERES DEMETRIOS ,  LEMKE AL ,  IP MATTHEW ,  BEHN LAWRENCE P ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  MAXWELL PETER ,  MORGAN DAVID ,  BUIE THOMAS ,  FABER KEES ,  ALTMAN SJOERD ,  LAROO RICHARD

IPC: G01D11/24 ,  G01P21/00 ,  G01D18/00 ,  G01D21/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2366999A1

公开(公告)日：2000-09-21

申请号：CA2366999

申请日：2000-03-17

Applicant: INPUT OUTPUT INC

Inventor： YU DULI ,  BEHN LAWRENCE P ,  SELVAKUMAR ARJUN ,  IP MATTHEW ,  SIGMAR AXEL ,  LAROO RICHARD ,  MORGAN DAVID ,  RUSHEFSKY LARRY ,  FABER KEES ,  LEMKE AL ,  BUIE THOMAS ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  MAXWELL PETER ,  MARSH JAMES L ,  ALTMAN SJOERD ,  RINNE RAY ,  BALDERES DEMETRIOS ,  GOLDBERG HOWARD D ,  STALNAKER W MARC

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01D21/00 ,  B65D85/38

Abstract: A sensor apparatus (104) includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module (305) support ed by a planar surface (345) within a cavity (340) of a housing (205) coupled t o a first end cap (210) by a PC-board connection (355). Housing (205) is furth er coupled to first end cap (210) by a first coupling member (315) and a second coupling member (320) and is also coupled to an opposite second end cap (215 ) by a third coupling member (320) and a fourth coupling member (325). Interfa ce sealing members (330a, 330b, 330c, 330d) seal between housing (205) and firs t end cap (210). Interface sealing members (335a, 335b, 335c, 335d) seal betwe en housing (205) and second end cap (215).

公开(公告)号：NO993813L

公开(公告)日：2000-02-08

申请号：NO993813

申请日：1999-08-06

Applicant: INPUT OUTPUT INC

Inventor： SIGMAR AXEL ,  ISELI JAMES W ,  SZALAY JOZSEF ,  HAIDE JANOS ,  FESZTHAMMER ANDRAS A

IPC: G01V1/22 ,  G01V1/00

公开(公告)号：NO993813A

公开(公告)日：2000-02-08

申请号：NO993813

申请日：1999-08-06

Applicant: INPUT OUTPUT INC

Inventor： SIGMAR AXEL ,  ISELI JAMES W ,  SZALAY JOZSEF ,  HAIDE JANOS ,  FESZTHAMMER ANDRAS A

IPC: G01V1/22 ,  G01V1/00

CPC classification number: G01V1/22

公开(公告)号：DE60034451T2

公开(公告)日：2007-08-30

申请号：DE60034451

申请日：2000-03-17

Applicant: INPUT OUTPUT INC

Inventor： RUSHEFSKY LARRY ,  SIGMAR AXEL ,  GOLDBERG HOWARD D ,  STALNAKER W MARC ,  RINNE RAY ,  BALDERES DEMETRIOS ,  LEMKE AL ,  IP MATTHEW ,  BEHN LAWRENCE P ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  MAXWELL PETER ,  MORGAN DAVID ,  BUIE THOMAS ,  FABER KEES ,  ALTMAN SJOERD ,  LAROO RICHARD

IPC: G01D11/24 ,  G01P21/00 ,  G01D18/00 ,  G01D21/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：AT360191T

公开(公告)日：2007-05-15

申请号：AT00915012

申请日：2000-03-17

Applicant: INPUT OUTPUT INC

Inventor： RUSHEFSKY LARRY ,  SIGMAR AXEL ,  GOLDBERG HOWARD D ,  STALNAKER W MARC ,  RINNE RAY ,  BALDERES DEMETRIOS ,  LEMKE AL ,  IP MATTHEW ,  BEHN LAWRENCE P ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  MAXWELL PETER ,  MORGAN DAVID ,  BUIE THOMAS ,  FABER KEES ,  ALTMAN SJOERD ,  LAROO RICHARD

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01P15/00 ,  G01D21/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：NO20015715A

公开(公告)日：2002-01-11

申请号：NO20015715

申请日：2001-11-23

Applicant: INPUT OUTPUT INC

Inventor： SIGMAR AXEL ,  ISELI JAMES W ,  SZALAY JOZSEF ,  HAIDE JANOS ,  FESZTHAMMER ANDRAS A ,  GRANDE JOHANNES ,  HAYES JUSTIN ,  VELASCO JAMES

IPC: G01V1/22 ,  G06F19/00

CPC classification number: G01V1/223

公开(公告)号：NO20014460L

公开(公告)日：2001-11-16

申请号：NO20014460

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： RUSHEFSKY LARRY ,  SIGMAR AXEL ,  GOLDBERG HOWARD D ,  STALNAKER W MARC ,  RINNE RAY ,  BALDERES DEMETRIOS ,  LEMKE AL ,  IP MATTHEW ,  BEHN LAWRENCE P ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  MAXWELL PETER ,  MORGAN DAVID ,  BUIE THOMAS ,  FABER KEES ,  ALTMAN SJOERD ,  LAROO RICHARD

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01D21/00 ,  B65D85/38

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2374949A1

公开(公告)日：2000-12-21

申请号：CA2374949

申请日：2000-05-24

Applicant: INPUT OUTPUT INC

Inventor： ISELI JAMES ,  SIGMAR AXEL ,  SZALAY JOZSEF ,  HAIDE JANOS ,  HAYES JUSTIN ,  VELASCO JAMES ,  FESZTHAMMER ANDRAS ,  GRANDE JOHANNES

IPC: G01V1/22 ,  G06F19/00

Abstract: A system for remotely controlling (100) acquiring and monitoring the acquisition of seismic data (170). The system includes remote equipment for collecting seismic data (105) and for transmitting and receiving communicati on signals (135, 140) to and from the remote location. In this manner, the collection of seismic data at remote locations can be controlled and monitor ed locally.

公开(公告)号：CA2277635A1

公开(公告)日：2000-02-07

申请号：CA2277635

申请日：1999-07-19

Applicant: INPUT OUTPUT INC

Inventor： SIGMAR AXEL ,  ISELI JAMES ,  FESZTHAMMER ANDRAS ,  SZALAY JOZSEF ,  HAIDE JANOS

IPC: G01V1/22 ,  G01V1/20 ,  G01V1/28 ,  G01V1/32

Abstract: A system for remotely controlling, acquiring and monitoring the acquisition of seismic data. The system includes remote equipment for collecting seismic data and for transmitting and receiving communication signals to and from a remote location. The system also includes local equipment for transmitting and receiving communication signals to and from the remote location. In this manner, the collection of seismic data at remote locations can be controlled and monitored locally on a real-time basis.