公开(公告)号：US20200328278A1

公开(公告)日：2020-10-15

申请号：US16914052

申请日：2020-06-26

Applicant: Intel Corporation

Inventor： Matthew V. Metz ,  Willy Rachmady ,  Harold W. Kennel ,  Van H. Le ,  Benjamin Chu-Kung ,  Jack T. Kavalieros ,  Gilbert Dewey

IPC: H01L29/267 ,  H01L21/8238 ,  H01L27/092 ,  H01L27/11 ,  H01L29/10 ,  H01L29/66 ,  H01L29/78

Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.

公开(公告)号：US10734488B2

公开(公告)日：2020-08-04

申请号：US15752209

申请日：2015-09-11

Applicant: Intel Corporation

Inventor： Matthew V. Metz ,  Willy Rachmady ,  Harold W. Kennel ,  Van H. Le ,  Benjamin Chu-Kung ,  Jack T. Kavalieros ,  Gilbert Dewey

IPC: H01L29/267 ,  H01L27/092 ,  H01L29/10 ,  H01L27/11 ,  H01L29/78 ,  H01L21/8238 ,  H01L29/66

Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.

公开(公告)号：US20200083225A1

公开(公告)日：2020-03-12

申请号：US16124877

申请日：2018-09-07

Applicant: Intel Corporation

Inventor： Sean T. Ma ,  Aaron D. Lilak ,  Abhishek A. Sharma ,  Van H. Le ,  Seung Hoon Sung ,  Gilbert W. Dewey ,  Benjamin Chu-Kung ,  Jack T. Kavalieros ,  Tahir Ghani

IPC: H01L27/108 ,  H01L23/528 ,  H01L21/822 ,  H01L29/06 ,  H01L49/02

Abstract: Disclosed herein are memory cells and memory arrays, as well as related methods and devices. For example, in some embodiments, a memory device may include: a support having a surface; and a three-dimensional array of memory cells on the surface of the support, wherein individual memory cells include a transistor and a capacitor, and a channel of the transistor in an individual memory cell is oriented parallel to the surface.

公开(公告)号：US10580895B2

公开(公告)日：2020-03-03

申请号：US16040505

申请日：2018-07-19

Applicant: Intel Corporation

Inventor： Han Wui Then ,  Robert S. Chau ,  Sansaptak Dasgupta ,  Marko Radosavljevic ,  Benjamin Chu-Kung ,  Seung Hoon Sung ,  Sanaz Gardner ,  Ravi Pillarisetty

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/20 ,  H01L29/10 ,  H01L29/205 ,  H01L21/762 ,  H01L21/306 ,  H01L21/02 ,  H01L29/66 ,  H01L29/08 ,  H01L27/06 ,  H01L27/12 ,  H01L29/34 ,  H01L21/8234 ,  H01L27/088 ,  H01L21/8258 ,  H01L21/84 ,  H01L27/092

Abstract: Techniques are disclosed for forming a GaN transistor on a semiconductor substrate. An insulating layer forms on top of a semiconductor substrate. A trench, filled with a trench material comprising a III-V semiconductor material, forms through the insulating layer and extends into the semiconductor substrate. A channel structure, containing III-V material having a defect density lower than the trench material, forms directly on top of the insulating layer and adjacent to the trench. A source and drain form on opposite sides of the channel structure, and a gate forms on the channel structure. The semiconductor substrate forms a plane upon which both GaN transistors and other transistors can form.

公开(公告)号：US20190305085A1

公开(公告)日：2019-10-03

申请号：US15942252

申请日：2018-03-30

Applicant: INTEL CORPORATION

Inventor： Seung Hoon Sung ,  Dipanjan Basu ,  Ashish Agrawal ,  Benjamin Chu-Kung ,  Siddharth Chouksey ,  Cory C. Bomberger ,  Tahir Ghani ,  Anand S. Murthy ,  Jack T. Kavalieros

IPC: H01L29/06 ,  H01L29/423 ,  H01L29/10 ,  H01L29/66 ,  H01L29/78 ,  H01L29/16

Abstract: An integrated circuit structure includes: a semiconductor nanowire extending in a length direction and including a body portion; a gate dielectric surrounding the body portion; a gate electrode insulated from the body portion by the gate dielectric; a semiconductor source portion adjacent to a first side of the body portion; and a semiconductor drain portion adjacent to a second side of the body portion opposite the first side, the narrowest dimension of the second side of the body portion being smaller than the narrowest dimension of the first side. In an embodiment, the nanowire has a conical tapering. In an embodiment, the gate electrode extends along the body portion in the length direction to the source portion, but not to the drain portion. In an embodiment, the drain portion at the second side of the body portion has a lower dopant concentration than the source portion at the first side.

公开(公告)号：US20190273133A1

公开(公告)日：2019-09-05

申请号：US16347110

申请日：2016-12-14

Applicant: Intel Corporation

Inventor： Ashish Agrawal ,  Benjamin Chu-Kung ,  Seung Hoon Sung ,  Siddharth Chouksey ,  Glenn A. Glass ,  Van H. Le ,  Anand S. Murthy ,  Jack T. Kavalieros ,  Matthew V. Metz ,  Willy Rachmady

IPC: H01L29/08 ,  H01L29/165 ,  H01L29/16 ,  H01L29/36 ,  H01L29/423 ,  H01L29/78 ,  H01L29/06 ,  H01L29/66 ,  H01L21/02 ,  H01L21/324 ,  H01L29/45 ,  H01L29/417 ,  H01L29/10

Abstract: Disclosed herein are transistor amorphous interlayer arrangements, and related methods and devices. For example, in some embodiments, transistor amorphous interlayer arrangement may include a channel material and a transistor source/drain stack. The transistor source/drain stack may include a transistor electrode material configured to be a transistor source/drain contact, i.e. either a source contact or a drain contact of the transistor, and a doped amorphous semiconductor material disposed between the transistor electrode material and the channel material.

公开(公告)号：US10388733B2

公开(公告)日：2019-08-20

申请号：US16248708

申请日：2019-01-15

Applicant: Intel Corporation

Inventor： Van H. Le ,  Benjamin Chu-Kung ,  Harold Hal W. Kennel ,  Willy Rachmady ,  Ravi Pillarisetty ,  Jack T. Kavalieros

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/08 ,  H01L29/423 ,  H01L29/66 ,  H01L29/161 ,  H01L29/15 ,  H01L29/165 ,  H01L29/10 ,  H01L21/283 ,  H01L21/02 ,  H01L29/786

Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.

公开(公告)号：US10325774B2

公开(公告)日：2019-06-18

申请号：US15504634

申请日：2014-09-18

Applicant: Intel Corporation

Inventor： Sansaptak Dasgupta ,  Han Wui Then ,  Benjamin Chu-Kung ,  Marko Radosavljevic ,  Sanaz K. Gardner ,  Seung Hoon Sung ,  Ravi Pillarisetty ,  Robert S. Chau

IPC: H01L21/02 ,  H01L29/778 ,  H01L29/04 ,  H01L29/06 ,  H01L29/20 ,  H01L21/8252 ,  H01L27/06 ,  H01L29/16 ,  H01L29/267 ,  H01L29/78

Abstract: III-N semiconductor heterostructures including a raised III-N semiconductor structures with inclined sidewall facets are described. In embodiments, lateral epitaxial overgrowth favoring semi-polar inclined sidewall facets is employed to bend crystal defects from vertical propagation to horizontal propagation. In embodiments, arbitrarily large merged III-N semiconductor structures having low defect density surfaces may be overgrown from trenches exposing a (100) surface of a silicon substrate. III-N devices, such as III-N transistors, may be further formed on the raised III-N semiconductor structures while silicon-based transistors may be formed in other regions of the silicon substrate.

公开(公告)号：US10263074B2

公开(公告)日：2019-04-16

申请号：US15605795

申请日：2017-05-25

Applicant: Intel Corporation

Inventor： Han Wui Then ,  Robert Chau ,  Benjamin Chu-Kung ,  Gilbert Dewey ,  Jack Kavalieros ,  Matthew Metz ,  Niloy Mukherjee ,  Ravi Pillarisetty ,  Marko Radosavljevic

IPC: H01L29/06 ,  H01L29/66 ,  H01L29/775 ,  G05F3/02 ,  H01L29/786 ,  B82Y10/00 ,  H01L21/02 ,  H01L21/225 ,  H01L21/283 ,  H01L21/306 ,  H01L21/31 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/324 ,  H01L29/04 ,  H01L29/417 ,  H01L29/423 ,  H01L29/20

Abstract: Transistors suitable for high voltage and high frequency operation are disclosed. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.

公开(公告)号：US10249490B2

公开(公告)日：2019-04-02

申请号：US15458897

申请日：2017-03-14

Applicant: Intel Corporation

Inventor： Niti Goel ,  Robert S. Chau ,  Jack T. Kavalieros ,  Benjamin Chu-Kung ,  Matthew V. Metz ,  Niloy Mukherjee ,  Nancy M. Zelick ,  Gilbert Dewey ,  Willy Rachmady ,  Marko Radosavljevic ,  Van H. Le ,  Ravi Pillarisetty ,  Sansaptak Dasgupta

IPC: H01L21/02 ,  H01L29/78 ,  H01L29/66 ,  H01L21/8238 ,  H01L21/8252 ,  H01L27/092 ,  H01L29/06 ,  H01L29/165 ,  H01L29/205 ,  H01L29/10 ,  H01L29/16 ,  H01L29/20

Abstract: A single fin or a pair of co-integrated n- and p-type single crystal electronic device fins are epitaxially grown from a substrate surface at a bottom of one or a pair of trenches formed between shallow trench isolation (STI) regions. The fin or fins are patterned and the STI regions are etched to form a height of the fin or fins extending above etched top surfaces of the STI regions. The fin heights may be at least 1.5 times their width. The exposed sidewall surfaces and a top surface of each fin is epitaxially clad with one or more conformal epitaxial materials to form device layers on the fin. Prior to growing the fins, a blanket buffer epitaxial material may be grown from the substrate surface; and the fins grown in STI trenches formed above the blanket layer. Such formation of fins reduces defects from material interface lattice mismatches.