公开(公告)号：JP2003179046A

公开(公告)日：2003-06-27

申请号：JP2002272119

申请日：2002-09-18

Applicant: JSR CORP

Inventor： NISHIKAWA MICHINORI ,  PATZ MATTHIAS ,  SEKIGUCHI MANABU ,  SHIODA ATSUSHI ,  YAMADA KINJI

IPC: H01L21/312

Abstract: PROBLEM TO BE SOLVED: To obtain a multilayer film for a semiconductor having superb coherency with a CVD film in a semiconductor device or the like. SOLUTION: In the multilayer film, a film where a hydrolysis condensation product is heated is layered. In this case, the hydrolysis condensation product is obtained by allowing (A) an organic compound film where content of carbon is equal to 60 wt.% or more, and (B) at least one kind of compound that is selected from a group of compounds that are shown by the following general expressions (1) to (4) to be subjected to hydrolysis and condensation. The above general expressions include (1) HSi(OR 51 ) 3 (In this case, OR 51-57 indicates a monovalent organic group.), (2) R a 'Si(OR 52 ) 4-a ' (In this case, R indicates a fluorine atom or the monovalent organic group, and a' indicates integers of 1 to 2.), (3) Si(OR 53 ) 4 , and (4) R 54 b (R 55 O) 3-b 'Si-(R 58 ) d '-Si(OR 56 ) 3-c 'R 57 c ' (In this case, b' and c' are the same or different and integers of 0 to 2, R 58 is an oxygen atom, a phenylene group, or a group that is expressed by -(CH 2 ) n ' (In this case, n' is integers of 1 to 6, and n' indicates 0 or 1). COPYRIGHT: (C)2003,JPO

公开(公告)号：JPH11228692A

公开(公告)日：1999-08-24

申请号：JP2860798

申请日：1998-02-10

Applicant: JSR CORP

Inventor： PATZ MATTHIAS ,  TAKAHASHI MASAYUKI ,  GOTO KOHEI

IPC: H01L51/50 ,  C08G73/08 ,  C09K11/06 ,  H05B33/14 ,  H05B33/22

Abstract: PROBLEM TO BE SOLVED: To obtain the subject polymer soluble in an organic solvent, capable of exhibiting excellent heat stability and electron transporting properties, useful as an organic electroluminescent element, etc., by introducing a phenyl indane group-containing oxadiazole segment into a molecule. SOLUTION: This polyoxadiazole derivative comprises a segment of formula I (X is a group of the formula Ar-(Z-Ar)n Ar is a bifunctional (heterocyclic) aromatic group; Z is a group of the formula CRR [R is H, a 1-6C (halogenated) alkyl or a 6-30C aryl], a group of the formula CR=CR, O, S or SO2 ; (n) is 0-2}) and is obtained, for example, by reacting a compound of formula II with a 1,1,3-trimethyl-3-phenylindane-4',5-dicarboxylic acid of formula III.