ANISOTROPIC CONDUCTIVITY CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD
    12.
    发明公开
    ANISOTROPIC CONDUCTIVITY CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD 有权
    各向异性导电连接器,导电浆料组合物,探针成员,晶片检查装置和WAFER INVESTIGATIONS

    公开(公告)号:EP1553622A4

    公开(公告)日:2006-05-24

    申请号:EP03784569

    申请日:2003-08-07

    Applicant: JSR CORP

    Abstract: An anisotropic conductivity connector enabling easy alignment of a wafer and capable of holding and fixing the wafer even if the wafer has a large area and a diameter of 8 inches or more and the pitches of the electrodes to be inspected of the wafer are small and maintaining its favorable conductivity even after repetitive use, and its application are disclosed. The connector comprises a frame sheet where holes for arrangement of anisotropic conductive films are formed in positions corresponding to electrode regions of all or a part of the integrated circuits of a wafer and elastic anisotropic conductive films formed in the holes. Each elastic anisotropic conductive film has connection conductive sections containing conductive particles and extending in the direction of thickness and insulating sections insulating the connection conductive sections from one another. Each conductive particle is composed of a core particle exhibiting magnetism and a high-conductivity metal with which the core particle is coated. The content of the high-conductivity metal to the core particle is 15 mass% or more. The measurand t=[1/(Sw.rho)] x[N/(1-N)] is 50 nm or more [Sw is the BET specific surface (m /kg) of the core particle, rho is the specific gravity (kg/m ) of the high-conductivity metal, and N is (the mass of the high-conductivity metal/the mass of the whole conductive particles).

    ANISOTROPIC CONDUCTIVE SHEET
    13.
    发明公开
    ANISOTROPIC CONDUCTIVE SHEET 审中-公开
    ANISOTROPISCHELEITFÄHIGEFOLIE

    公开(公告)号:EP1315241A4

    公开(公告)日:2008-03-19

    申请号:EP01956808

    申请日:2001-08-08

    Applicant: JSR CORP

    Abstract: An anisotropic conductive sheet which can retain electric charge on the surface thereof under no pressurization, and move the charge on the surface in a thickness direction under a thickness-direction pressurization to thereby control charge amounts on the surface, and which comprises magnetic, conductive particles (P) contained in an elastomer-made sheet substrate (10) so as to be aligned in the thickness direction thereof and dispersed in the surface direction thereof, wherein a volume resistance R1 is 1 x 10 to 1 x 10 OMEGA .m and a ratio (R0/R1) of volume resistance R0 to volume resistance R1 is 1 x 10 to 1 x 10 , where R0 is a thickness-direction volume resistance under no pressurization, and R1 thickness-direction volume resistance under a thickness-direction pressure of 1 g/mm .

    Abstract translation: 本发明提供一种各向异性导电片,其能够在不加压的情况下在其表面上保持电荷,并且使厚度方向上的表面上的电荷在厚度方向加压下移动,从而控制表面上的电荷量,并且其包括磁性导电颗粒 (P)包含在弹性体制成的片基板(10)中,以沿其厚度方向排列并在其表面方向上分散,其中体积电阻R1为1×10 7至1×10 12 > OMEGA·m,并且体积电阻R0与体积电阻R1之比(R0 / R1)为1×10 1至1×10 4,其中R 0为不加压时的厚度方向体积电阻,R1 在厚度方向压力下的厚度方向体积电阻为1g / mm 2。

    ANISOTROPIC CONDUCTIVITY CONNECTOR, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD
    14.
    发明公开
    ANISOTROPIC CONDUCTIVITY CONNECTOR, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD 有权
    各向异性导电连接器,探头件,晶圆检测设备和晶圆INVESTIGATIONS

    公开(公告)号:EP1553623A4

    公开(公告)日:2006-05-24

    申请号:EP03784570

    申请日:2003-08-07

    Applicant: JSR CORP

    Abstract: An anisotropic conductivity connector wherein the favorable conductivity can be maintained for a long term even if the connector is used repetitively many times or even if the connector is used repetitively in a high-temperature environment. The anisotropic conductivity connector comprises elastic anisotropic conductive films having connection conductive sections extending in the direction of thickness. Each elastic anisotropic conductive film has an initial characteristic such that, letting the electric resistance of the connection conductive sections measured when a load Yx1g is exerted on the elastic anisotropic conductive film in the thickness direction where Y is a total number of connection conductive films be R1g, and letting the electric resistance of the connection conductive sections measured when a load Yx6g is exerted on the elastic anisotropic conductive film in the thickness direction be R6g, the number of connection conductive sections having the electric resistance R1g of below 1ohm is 90% or more of the total number of connection conductive sections, the number of connection conductive sections having the electric resistance R6g of below 0.1ohm is 95% or more of the total number of connection conductive sections, and the number of connection conductive sections having the electric resistance R6g of 0.5 ohm or more is 1% or less of the total number of connection conductive sections.

    Electronic component, method of connecting electronic member and circuit connection member
    15.
    发明专利
    Electronic component, method of connecting electronic member and circuit connection member 审中-公开
    电子部件,连接电子部件和电路连接部件的方法

    公开(公告)号:JP2011233421A

    公开(公告)日:2011-11-17

    申请号:JP2010103969

    申请日:2010-04-28

    Abstract: PROBLEM TO BE SOLVED: To provide an electronic component which consists of two connected electronic members and is capable of uniformly energizing the whole anisotropic conductive sheet even if an anisotropic conductive sheet having a small thickness is used in connection with downsizing of electronic components.SOLUTION: The electronic component is provided with a first electronic member 10, an anisotropic conductive sheet 30 placed on the wiring surface side of the first electronic member 10, a second electronic member 20, a pressing member 40, a pressure member 50 on which a projection 51 is formed above the sheet 30 at the position corresponding to the sheet, and which is placed on the side opposite to where the second electronic member 20 of the pressing member 40 is arranged so that the pressing member 40 and the projection 51 contact each other, and a housing 60 placed above the first electronic member 10 to hold the pressure member 50. The first electronic member 10 and the second electronic member 20 are electrically connected by a force acting on the pressing member 40 which contacts the projection 51.

    Abstract translation: 要解决的问题:为了提供由两个连接的电子部件组成的电子部件,并且能够均匀地赋能整个各向异性导电片,即使使用具有小厚度的各向异性导电片与电子部件的小型化 。 解决方案:电子部件设置有第一电子部件10,放置在第一电子部件10的布线面侧的各向异性导电片30,第二电子部件20,按压部件40,压力部件50 在与片材相对应的位置上在片材30的上方形成有突起51,放置在与按压部件40的第二电子部件20相对的一侧,使得按压部件40和突起部 51彼此接触,以及设置在第一电子部件10上方以保持压力部件50的壳体60.第一电子部件10和第二电子部件20通过作用在与突出部接触的按压部件40上的力而电连接 51.版权所有(C)2012,JPO&INPIT

    Electronic component, connection method of electronic member, and circuit connection member
    16.
    发明专利
    Electronic component, connection method of electronic member, and circuit connection member 有权
    电子部件,电子部件的连接方法以及电路连接部件

    公开(公告)号:JP2011249312A

    公开(公告)日:2011-12-08

    申请号:JP2011011980

    申请日:2011-01-24

    Abstract: PROBLEM TO BE SOLVED: To provide an electronic component to which two electronic members, having sufficient cushioning function against pressing force even when a thin anisotropic conductive sheet is used to reduce the size of the electronic component, are connected.SOLUTION: The electronic component includes a first electronic member 10, an anisotropic conductive sheet 30 arranged on a wiring surface side of the first electronic member 10, a second electronic member 20 arranged on a surface of the anisotropic conductive sheet 30 which is opposite to the surface on which the first electronic member 10 is arranged, an elastic body 40 arranged on a surface of the second electronic member 20 which is opposite to the surface on which the anisotropic conductive sheet 30 is arranged, and a pressure member 50 arranged on a surface of the elastic body 40 which is opposite to the surface on which the second electronic member 20 is arranged. The first electronic member 10 is electrically connected with the second electronic member 20.

    Abstract translation: 要解决的问题:为了提供一种电子部件,其中即使使用薄的各向异性导电片来减小电子部件的尺寸,两个电子部件也具有抵抗按压力的足够的缓冲功能。 解决方案:电子部件包括第一电子部件10,布置在第一电子部件10的布线面侧的各向异性导电片30,布置在各向异性导电片30的表面上的第二电子部件20, 与布置有第一电子部件10的表面相对的弹性体40,布置在第二电子部件20的与布置各向异性导电片30的表面相对的表面上的弹性体40和布置在其上的压力部件50 在弹性体40的与布置第二电子部件20的表面相对的表面上。 第一电子部件10与第二电子部件20电连接。版权所有:(C)2012,JPO&INPIT

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