Hydrogen sensor having vertical nanogap structure and method for manufacturing the same

    公开(公告)号:US11946920B2

    公开(公告)日:2024-04-02

    申请号:US17148242

    申请日:2021-01-13

    CPC classification number: G01N33/005 H01L21/02107

    Abstract: The present disclosure relates to a hydrogen sensor and a method for manufacturing the same, and more particularly, to a hydrogen sensor having a vertical nanogap structure, in which a nanogap is formed below a sensor portion to bring the sensor portion and an electrode into contact with each other when the sensor portion reacts with hydrogen, so as to allow the sensor portion to expand and contract freely without resistance on a substrate, thereby improving hydrogen sensing accuracy, and it is possible to form a precise nanogap with uniformity and reproducibility at a low cost and a method for manufacturing the same.

    Method of analyzing binding efficiency of adhesive nanoparticles
    15.
    发明授权
    Method of analyzing binding efficiency of adhesive nanoparticles 有权
    分析粘合剂纳米粒子结合效率的方法

    公开(公告)号:US09442115B2

    公开(公告)日:2016-09-13

    申请号:US13895708

    申请日:2013-05-16

    CPC classification number: G01N33/574 G01N33/587

    Abstract: Provided is a method of analyzing binding efficiency of adhesive nanoparticles. The method includes (a) injecting a solution containing nanoparticles into a first chamber slide, (b) evaporating only the solution from the first chamber slide into which the solution containing the nanoparticles is injected, and measuring a saturation temperature using a thermal imager while radiating light from a light source, (c) injecting cells into a second chamber slide, (d) injecting a solution containing nanoparticles into the second chamber slide in which the cells are cultured, (e) removing nanoparticles which are not bound to the cells from the second chamber slide into which the cells and the nanoparticles are injected, and (f) evaporating only the solution from the second chamber slide from which the nanoparticles are removed, and measuring a saturation temperature using a thermal image while radiating light from the light source.

    Abstract translation: 提供了分析粘合剂纳米粒子的结合效率的方法。 该方法包括:(a)将含有纳米颗粒的溶液注入到第一室载玻片中,(b)仅蒸发来自注入含有纳米颗粒的溶液的第一室载玻片的溶液,并且使用热成像仪测量饱和温度,同时辐射 来自光源的光,(c)将细胞注射到第二室载玻片中,(d)将含有纳米颗粒的溶液注入培养细胞的第二室载玻片中,(e)除去未结合细胞的纳米颗粒 注入细胞和纳米颗粒的第二室滑动,和(f)仅从去除了纳米颗粒的第二室载玻片蒸发溶液,并且使用热图像测量饱和温度,同时辐射来自光源的光 。

    Apparatus and method for extreme ultraviolet spectrometer calibration
    16.
    发明授权
    Apparatus and method for extreme ultraviolet spectrometer calibration 有权
    用于极紫外光谱仪校准的仪器和方法

    公开(公告)号:US09188485B1

    公开(公告)日:2015-11-17

    申请号:US14490948

    申请日:2014-09-19

    CPC classification number: G01J3/0297 G01J3/10 G01J3/28 G01J3/2803 G01J2003/282

    Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

    Abstract translation: 本文公开了用于极紫外(EUV)分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块,Al滤光片,衍射光栅,CCD照相机,光谱转换模块和控制模块,该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序,从频谱转换模块转换成具有预定参考波长值的EUV光的顺序,以计算具有最接近参考波长值的差值,并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此,可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

    Module-type robot control system
    17.
    发明授权

    公开(公告)号:US11660744B2

    公开(公告)日:2023-05-30

    申请号:US17204946

    申请日:2021-03-18

    CPC classification number: B25J9/08 B25J9/0009 B25J9/1689 G05B2219/40304

    Abstract: The present disclosure relates to a module-type robot control system comprising: a robot platform including a driving unit which is driven by a control signal, at least one function block which is assemblable and disassemblable on the robot platform and configured to perform a specific function, and a user terminal capable of wirelessly communicating with the robot platform and the function block. According to the system. The user may remotely control the module-type robot through a smart device, or receive related content by receiving data from the robot through the terminal. The user may easily control the robot or receive more diverse customized contents by connection between the smart device and the module-type robot system.

    Optical imaging apparatus using metamaterial and optical imaging method using metamaterial

    公开(公告)号:US11175186B2

    公开(公告)日:2021-11-16

    申请号:US16809275

    申请日:2020-03-04

    Abstract: One embodiment of the present invention provides an optical imaging apparatus using a metamaterial including a metamaterial array sensor which includes a plurality of unit cells made of a metamaterial and is positioned adjacent to an observation object, an imaging beam providing unit which provides an imaging beam toward the metamaterial array sensor, a control beam providing unit which controls a control beam provided to the unit cell to block the imaging beam incident on the unit cell, and an imaging beam measuring unit which measures a unit cell imaging beam transmission amount passing through the unit cell by measuring an imaging beam transmission amount of the metamaterial array sensor when the imaging beam passes through the unit cell and an imaging beam transmission amount of the metamaterial array sensor when the control beam is focused on the unit cell to block the imaging beam incident on the unit cell.

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