Abstract:
PROBLEM TO BE SOLVED: To provide a scanning microscope which is capable of adapting the image formation of the illumination rays and rotating point of a ray deflector to the axial position of a pupil for various objective lenses and illumination wavelengths and a method for scanning a target. SOLUTION: As the scanning microscope, a device for axially displacing the images of at least one illumination ray and rotating point within the pupil (28) of the objective lens (30) is provided. As a method for operation, the objective lens (30) is taken into a working position and the objective lens (30) defines the pupil (28), the position of the pupil (28) is determined depending upon the taken-in objective lens (30) and the wavelength of the illumination ray (14), the device for axially displacing the images of at least one illumination ray and rotating point is so operated that the images of at least one illumination ray and rotating point exist within the pupil (2).
Abstract:
PROBLEM TO BE SOLVED: To provide a scanning microscope which is universally usable, provides the advantages of various known scanning microscopes, does not require a position adjusting cost or reduces the position adjusting cost and can be post installed. SOLUTION: An exchangeable module (66) which separates an irradiation optical path and a detecting optical path so as to form a specific angle with each other and has at least one acousto-optic member (13) is arranged between the irradiation optical path and the detecting optical path. COPYRIGHT: (C)2003,JPO
Abstract:
PROBLEM TO BE SOLVED: To provide an examining method and a scanning electron microscope capable of improving a fading (decoloring) characteristic of a fluorescent colored substance in a test sample, especially a test sample excitable in an ultraviolet spectrum area, for carrying out simultaneous multicolor detection. SOLUTION: This examining method for the test sample having at least two optical excitation lines and optically excitable with light at a first wavelength and light at a second wavelength at least is carried out through the following steps: a step of irradiating the test sample 27 with illuminating light 15 having a wavelength of several-fold of the first wavelength and that of several-fold of the second wavelength at least and focusing the illuminating light 15 on partial areas of the test sample 27, a step of sequentially guiding the illuminating light 15 along a plurality of the partial areas for scanning the test sample 27, a step of detecting detection light 29 arriving from the test sample 27, a step of converting the detection light 29 into a detection signal having an amplitude depending on power or intensity of the detection light 29, a step of arranging the detection signal to a plurality of scanned partial areas, and a step of displaying the detection signal on a display.
Abstract:
PROBLEM TO BE SOLVED: To provide a method capable of sufficiently suppressing adverse interference by shortening the coherence length of a laser beam. SOLUTION: The phase position of a light field in the method of irradiating an object with the light (2) of a laser beam source (3) is changed by a modulating means (4), by which the occurrence of the interference within an optical path is averted within presettable time intervals or the such interference is allowed to occur only within the non-detectable range.
Abstract:
PROBLEM TO BE SOLVED: To propose plural realizable means capable of easily correcting the time lag between a position signal and a detection signal to users. SOLUTION: This method includes steps of: forming the position signal from the position of a beam deflector (7); and forming the detection signal associated with the position signal from light (17) coming from a sample (15). The position signal and the detection signal are transmitted to a processor (23). The correction values are determined in the processor (23). The correction values are transmitted to a computer (34) in order to compensate the time lag between the position signal and the detection signal.
Abstract:
PROBLEM TO BE SOLVED: To provide a device in which the change in the power and/or wavelength of a laser beam source does not affect the power of the light coupled to an optical assembly and a confocal scanning microscope as the device for coupling the light of at least one wavelength of the laser beam source the optical assembly and the confocal scanning microscope. SOLUTION: This invention relates to the device for optically coupling the light (1) of at least one wavelength of the laser beam source (2) to the optical assembly (3), more specifically the confocal scanning microscope, having an optically active element (4) acting to select the wavelength and to set the power of the coupling light (5). This device is characterized in that the element (4) acts as a regulating element of a control system (11) to affect the coupling light (5) in order to assure that the change in the power and/or wavelength of the laser beam source does not affect the power of the light (5) coupled to an optical assembly.
Abstract:
PROBLEM TO BE SOLVED: To provide an instrument capable of transmitting ultraviolet rays and rays having other wavelengths to a scanning microscope sufficiently, without loss, or without damage. SOLUTION: An optical inducing element consists of many minute optical structure elements having at least two different optical densities.
Abstract:
PROBLEM TO BE SOLVED: To provide a microscope assembly with which a sample can be surely observed in real time while using the means of simple design. SOLUTION: The microscope assembly has a light source (1), in particular, a laser light source for generating a light beam (2) for irradiating a sample (6) which is an examination object, a means (3) for widening the light beam (2) into practically linear irradiation light beam, an objective lens (5) for guiding the irradiation light beam to the sample (6) and a device for relatively moving the irradiation light beam and the sample (6). The above microscope assembly, in particular, a confocal laser scan type microscope is made concrete for surely observing the sample (6) in real time in simple design, and the device of the assembly is constituted in a manner that the irradiation light beam can be rotated inside the pupil of the objective lens by the device or that the sample (6) can be one-dimensionally moved by the device at least.
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus for selecting and detecting at least one spectral region of a spectral divergent beam preferably in a beam path of a confocal scanning microscope. SOLUTION: The spectral divergent beam can be focused on a focal line, so that a selected part thereof is not detected duplicately. Since an optical effective part of an optical element becomes larger or smaller along its surface, the spectral region reaching a detector can be defined by an orientation of the optical element related to the focal line and the resulting overlap (part) of the focal line and the optical element.
Abstract:
PROBLEM TO BE SOLVED: To provide the characteristic of a confocal scanning type microscope design in which a high signal output and a high ratio between a signal and a noise are realized with a simple means. SOLUTION: In a microscope design for a confocal scanning type microscope having a light source 1 to irradiate an object 6 which is an inspection object specially by using exciting light 2 and at least two detection channels 8 and 9 indicating formed detection light, at least two detection channels are optically superposed by superposing devices 11, 12, 13, 15, 17 and 18 with respect to the high signal output and the high ratio between the signal and the noise.