SCANNING MICROSCOPE AND METHOD FOR SCANNING TARGET

    公开(公告)号:JP2003098437A

    公开(公告)日:2003-04-03

    申请号:JP2002212454

    申请日:2002-07-22

    Abstract: PROBLEM TO BE SOLVED: To provide a scanning microscope which is capable of adapting the image formation of the illumination rays and rotating point of a ray deflector to the axial position of a pupil for various objective lenses and illumination wavelengths and a method for scanning a target. SOLUTION: As the scanning microscope, a device for axially displacing the images of at least one illumination ray and rotating point within the pupil (28) of the objective lens (30) is provided. As a method for operation, the objective lens (30) is taken into a working position and the objective lens (30) defines the pupil (28), the position of the pupil (28) is determined depending upon the taken-in objective lens (30) and the wavelength of the illumination ray (14), the device for axially displacing the images of at least one illumination ray and rotating point is so operated that the images of at least one illumination ray and rotating point exist within the pupil (2).

    Test sample examining method and scanning electron microscope
    13.
    发明专利
    Test sample examining method and scanning electron microscope 审中-公开
    测试样品检测方法和扫描电子显微镜

    公开(公告)号:JP2003028795A

    公开(公告)日:2003-01-29

    申请号:JP2002125511

    申请日:2002-04-26

    Abstract: PROBLEM TO BE SOLVED: To provide an examining method and a scanning electron microscope capable of improving a fading (decoloring) characteristic of a fluorescent colored substance in a test sample, especially a test sample excitable in an ultraviolet spectrum area, for carrying out simultaneous multicolor detection. SOLUTION: This examining method for the test sample having at least two optical excitation lines and optically excitable with light at a first wavelength and light at a second wavelength at least is carried out through the following steps: a step of irradiating the test sample 27 with illuminating light 15 having a wavelength of several-fold of the first wavelength and that of several-fold of the second wavelength at least and focusing the illuminating light 15 on partial areas of the test sample 27, a step of sequentially guiding the illuminating light 15 along a plurality of the partial areas for scanning the test sample 27, a step of detecting detection light 29 arriving from the test sample 27, a step of converting the detection light 29 into a detection signal having an amplitude depending on power or intensity of the detection light 29, a step of arranging the detection signal to a plurality of scanned partial areas, and a step of displaying the detection signal on a display.

    Abstract translation: 要解决的问题:提供一种能够改善测试样品中的荧光着色物质的褪色(脱色)特性的检查方法和扫描电子显微镜,特别是可在紫外光谱区域激发的测试样品,用于同时进行多色 检测。 解决方案:具有至少两个光学激发线和在第一波长的光可激发的测试样品的测试样品的检查方法至少通过以下步骤进行:将测试样品27照射到 至少将第一波长和第二波长几倍的波长的照明光15聚焦到被测样品27的部分区域上,顺序引导照明光15 沿着用于扫描测试样本27的多个部分区域,检测从测试样本27到达的检测光29的步骤,将检测光29转换成具有取决于功率或强度的幅度的检测信号的步骤 检测光29,将检测信号配置到多个扫描部分区域的步骤,以及在显示器上显示检测信号的步骤。

    METHOD AND APPARATUS FOR PHASE COMPENSATION OF POSITION SIGNAL AND DETECTION SIGNAL IN SCANNING MICROSCOPIC METHOD AND SCANNING MICROSCOPE

    公开(公告)号:JP2002131646A

    公开(公告)日:2002-05-09

    申请号:JP2001223124

    申请日:2001-07-24

    Abstract: PROBLEM TO BE SOLVED: To propose plural realizable means capable of easily correcting the time lag between a position signal and a detection signal to users. SOLUTION: This method includes steps of: forming the position signal from the position of a beam deflector (7); and forming the detection signal associated with the position signal from light (17) coming from a sample (15). The position signal and the detection signal are transmitted to a processor (23). The correction values are determined in the processor (23). The correction values are transmitted to a computer (34) in order to compensate the time lag between the position signal and the detection signal.

    OPTICAL ASSEMBLY MD DEVICE FOR COUPLING LIGHT OF AT LEAST ONE WAVELENGTH TO CONFOCAL SCANNING MICROSCOPE

    公开(公告)号:JP2002072098A

    公开(公告)日:2002-03-12

    申请号:JP2001203637

    申请日:2001-07-04

    Abstract: PROBLEM TO BE SOLVED: To provide a device in which the change in the power and/or wavelength of a laser beam source does not affect the power of the light coupled to an optical assembly and a confocal scanning microscope as the device for coupling the light of at least one wavelength of the laser beam source the optical assembly and the confocal scanning microscope. SOLUTION: This invention relates to the device for optically coupling the light (1) of at least one wavelength of the laser beam source (2) to the optical assembly (3), more specifically the confocal scanning microscope, having an optically active element (4) acting to select the wavelength and to set the power of the coupling light (5). This device is characterized in that the element (4) acts as a regulating element of a control system (11) to affect the coupling light (5) in order to assure that the change in the power and/or wavelength of the laser beam source does not affect the power of the light (5) coupled to an optical assembly.

    MICROSCOPE ASSEMBLY
    18.
    发明专利

    公开(公告)号:JP2002023059A

    公开(公告)日:2002-01-23

    申请号:JP2001168267

    申请日:2001-06-04

    Abstract: PROBLEM TO BE SOLVED: To provide a microscope assembly with which a sample can be surely observed in real time while using the means of simple design. SOLUTION: The microscope assembly has a light source (1), in particular, a laser light source for generating a light beam (2) for irradiating a sample (6) which is an examination object, a means (3) for widening the light beam (2) into practically linear irradiation light beam, an objective lens (5) for guiding the irradiation light beam to the sample (6) and a device for relatively moving the irradiation light beam and the sample (6). The above microscope assembly, in particular, a confocal laser scan type microscope is made concrete for surely observing the sample (6) in real time in simple design, and the device of the assembly is constituted in a manner that the irradiation light beam can be rotated inside the pupil of the objective lens by the device or that the sample (6) can be one-dimensionally moved by the device at least.

    CONFOCAL SCANNING TYPE MICROSCOPE
    20.
    发明专利

    公开(公告)号:JP2001235684A

    公开(公告)日:2001-08-31

    申请号:JP2001020141

    申请日:2001-01-29

    Abstract: PROBLEM TO BE SOLVED: To provide the characteristic of a confocal scanning type microscope design in which a high signal output and a high ratio between a signal and a noise are realized with a simple means. SOLUTION: In a microscope design for a confocal scanning type microscope having a light source 1 to irradiate an object 6 which is an inspection object specially by using exciting light 2 and at least two detection channels 8 and 9 indicating formed detection light, at least two detection channels are optically superposed by superposing devices 11, 12, 13, 15, 17 and 18 with respect to the high signal output and the high ratio between the signal and the noise.

Patent Agency Ranking