公开(公告)号：US08841217B1

公开(公告)日：2014-09-23

申请号：US13801243

申请日：2013-03-13

Applicant: Life Technologies Corporation

Inventor： Keith Fife ,  James Bustillo ,  Jordan Owens

IPC: H01L21/311 ,  G01N27/414

CPC classification number: G01N27/414

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.

Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 在开口的侧壁上并在电介质材料的上表面上延伸的导电元件。

公开(公告)号：US09995708B2

公开(公告)日：2018-06-12

申请号：US14543551

申请日：2014-11-17

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  James Bustillo ,  Jordan Owens

IPC: G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4145

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor.

公开(公告)号：US09835585B2

公开(公告)日：2017-12-05

申请号：US14197741

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

IPC: H01L27/14 ,  G01N27/414

CPC classification number: G01N27/4145

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A conductive element protrudes from the upper surface of the floating gate conductor into an opening. A dielectric material defines a reaction region. The reaction region overlies and extends below an upper surface of the conductive element.

公开(公告)号：US09476853B2

公开(公告)日：2016-10-25

申请号：US14566098

申请日：2014-12-10

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng Li ,  Jordan Owens

IPC: G01N27/414 ,  B01L3/00 ,  H01L21/302

CPC classification number: G01N27/4145 ,  B01L3/502707 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0663 ,  B01L2300/0877 ,  B01L2300/0887 ,  B01L2300/12 ,  H01L21/302

Abstract: A method of forming a sensor component includes forming a first layer over a sensor pad of a sensor of a sensor array. The first layer includes a first inorganic material. The method further includes forming a second layer over the first layer. The second layer includes a polymeric material. The method also includes forming a third layer over the second layer, the third layer comprising a second inorganic material; patterning the third layer; and etching the second layer to define a well over the sensor pad of the sensor array.

Abstract translation: 形成传感器部件的方法包括在传感器阵列的传感器的传感器焊盘上形成第一层。 第一层包括第一无机材料。 该方法还包括在第一层上形成第二层。 第二层包括聚合材料。 该方法还包括在第二层上形成第三层，第三层包括第二无机材料; 图案化第三层; 并蚀刻第二层以在传感器阵列的传感器焊盘上限定一个孔。

公开(公告)号：US09128044B2

公开(公告)日：2015-09-08

申请号：US14198382

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

IPC: G01N27/414 ,  B01L3/00

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.

Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 材料限定了延伸到浮动栅极导体的上表面的开口。 该材料包括位于第二电介质下面的第一电介质。 导电元件接触浮动栅极导体的上表面并且沿着开口的侧壁延伸一定距离，该距离由第一电介质的厚度限定。

公开(公告)号：US09116117B2

公开(公告)日：2015-08-25

申请号：US14197710

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

IPC: G01N27/414

CPC classification number: G01N27/4145

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor. A material defines an opening overlying the floating gate conductor. The material comprises a conductive element having an inner surface defining a lower portion of a sidewall of the opening. A dielectric is on the conductive element and has an inner surface defining an upper portion of the sidewall.

Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有浮栅导体的化学敏感场效应晶体管。 材料限定了覆盖浮栅导体的开口。 该材料包括具有限定开口的侧壁的下部的内表面的导电元件。 电介质位于导电元件上，并具有限定侧壁上部的内表面。

公开(公告)号：US20140264465A1

公开(公告)日：2014-09-18

申请号：US13801112

申请日：2013-03-13

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith Fife ,  James Bustillo ,  Jordan Owens

IPC: G01N27/414 ,  H01L29/788 ,  H01L29/66

CPC classification number: H01L29/788 ,  G01N27/4145

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element is on a sidewall of the opening and spaced away from an upper surface of the dielectric material, the conductive element communicating with the floating gate conductor.

Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 导电元件位于开口的侧壁上并与电介质材料的上表面间隔开，导电元件与浮动栅极导体连通。

公开(公告)号：US12140557B2

公开(公告)日：2024-11-12

申请号：US17267772

申请日：2019-08-16

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Phil Waggoner ,  Jordan Owens ,  Scott Parker

IPC: G01N27/414 ,  H01L21/28 ,  H01L21/3065

Abstract: A method for manufacturing a sensor includes etching an insulator layer disposed over a substrate to define an opening exposing a sensor surface of a sensor disposed on the substrate, a native oxide forming on the sensor surface; sputtering the sensor surface with a noble gas to at least partially remove the native oxide from the sensor surface; and annealing the sensor surface in a hydrogen atmosphere.

公开(公告)号：US11499938B2

公开(公告)日：2022-11-15

申请号：US17070142

申请日：2020-10-14

Applicant: Life Technologies Corporation

Inventor： Jonathan M. Rothberg ,  Keith G Fife ,  Jordan Owens ,  James Bustillo

IPC: G01N27/414 ,  C12Q1/6874 ,  H01L29/66

Abstract: In one embodiment, a device is described. The device includes a material defining a reaction region. The device also includes a plurality of chemically-sensitive field effect transistors have a common floating gate in communication with the reaction region. The device also includes a circuit to obtain respective output signals from the chemically-sensitive field effect transistors indicating an analyte within the reaction region.

公开(公告)号：US11231388B2

公开(公告)日：2022-01-25

申请号：US16544106

申请日：2019-08-19

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： James Li ,  Jordan Owens ,  James Bustillo

IPC: G01N27/414 ,  G01N27/12

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.