Abstract:
The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
Abstract:
A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.
Abstract:
Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.
Abstract:
A high inductance, out-of -plane inductor is achieved by forming on a flat flexible base (103) conductive elements (105) that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors (109) may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.
Abstract:
A representative embodiment of the invention provides an infrared (IR) imaging system (300) adapted to (i) convert an IR image of an object into mechanical displacements of a plurality of movable plates (304,306), (ii) use the mechanical displacements to impart a corresponding spatial phase modulation pattern onto a beam of visible light, and (iii) apply spatial filtering to convert the spatial phase modulation pattern into a visible image of the object.
Abstract:
Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.
Abstract:
A micro-electromechanical actuator (100) employs metal for the hot arm (101) and silicon for at least the flexible portion of the cold arm (105). The cold arm (105) made of silicon is coupled to a metal wire (107) that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.
Abstract:
An apparatus includes a mechanical switch. The mechanical switch includes a bilayer (10, 24) with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.