MICRO-ELECTRO-MECHANICAL OPTICAL DEVICE

    公开(公告)号:CA2322122C

    公开(公告)日:2003-12-23

    申请号:CA2322122

    申请日:2000-10-03

    Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.

    MEMS ACTUATOR
    13.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS致动器

    公开(公告)号:WO2009045346A4

    公开(公告)日:2009-12-30

    申请号:PCT/US2008011212

    申请日:2008-09-26

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 装置包括与推动器组件相邻的衬底,推动器组件和屈肌组件。 推杆组件包括热推和冷推臂。 热推和冷推臂的第一端固定在基板上。 热推动臂和冷推动臂的第二端联接在一起并悬挂以在基底上横向移位。 屈肌组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚定在基底上。 推动器组件被构造成用于引起屈肌臂的第二端和致动器在衬底上的接触的横向位移。 方法包括提供装置并使推动器组件横向移动屈肌臂的第二端和促动器接触在衬底上。

    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS
    14.
    发明申请
    HIGH INDUCTANCE, OUT-OF-PLANE INDUCTORS 审中-公开
    高电感,超平面电感

    公开(公告)号:WO2008005224A3

    公开(公告)日:2008-04-24

    申请号:PCT/US2007014759

    申请日:2007-06-25

    Inventor: PARDO FLAVIO

    Abstract: A high inductance, out-of -plane inductor is achieved by forming on a flat flexible base (103) conductive elements (105) that are arranged in a pattern such that when the flat flexible base, e.g., a polymer film, is curled, e.g., by application of heat, the conductive elements are likewise curled and opposite ends of different ones of the conductive elements are brought into conductive contact, and may be bonded, so as to form a conductive coil using at least two of the conductive elements. Additional conductors (109) may be formed on the flexible base to act as wires to provide connections to the resulting conductive coil. A portion of the flexible base, e.g., extending beyond the coil, can serve as a base to which one or more chips, e.g., flip-chip mounted, or other components are attached.

    Abstract translation: 通过在平坦的柔性基底(103)导电元件(105)上形成高电感,平面外的电感器来实现,导电元件(105)以图案布置,使得当扁平柔性基底(例如聚合物膜)卷曲时, 例如通过施加热量,导电元件同样卷曲,并且不同导电元件的相对端被导电接触,并且可以被接合,以便使用至少两个导电元件形成导电线圈。 附加的导体(109)可以形成在柔性基座上以用作导线以提供到所得到的导电线圈的连接。 柔性基座的一部分,例如延伸超过线圈,可以用作一个或多个芯片,例如倒装芯片安装或其它部件附接到的基座。

    MEMS ACTUATOR
    16.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS执行器

    公开(公告)号:WO2009045346A3

    公开(公告)日:2009-11-05

    申请号:PCT/US2008011212

    申请日:2008-09-26

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 包括靠近推进器组件的基底,推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

    MICRO-ACUTUATOR AND LOCKING SWITCH
    17.
    发明申请
    MICRO-ACUTUATOR AND LOCKING SWITCH 审中-公开
    微动器和锁定开关

    公开(公告)号:WO2008033269A3

    公开(公告)日:2008-06-05

    申请号:PCT/US2007019526

    申请日:2007-09-07

    Inventor: PARDO FLAVIO

    Abstract: A micro-electromechanical actuator (100) employs metal for the hot arm (101) and silicon for at least the flexible portion of the cold arm (105). The cold arm (105) made of silicon is coupled to a metal wire (107) that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.

    Abstract translation: 微机电致动器(100)使用用于热臂(101)的金属和用于至少冷臂(105)的柔性部分的硅。 由硅制成的冷臂(105)被耦合到与其一起移动的金属线(107),并且当至少两个这样的致动器形成开关时,用于承载要切换的信号。 第一芯片上的这种开关的阵列可以与倒装芯片接合到第一芯片的第二芯片协同地布置,第二芯片具有将电控制电流路由到各种热臂以加热它们的电线, 信号由各种开关切换。

Patent Agency Ranking