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1.发明专利
公开(公告)号：JP2003149408A
公开(公告)日：2003-05-21
申请号：JP2002281177
申请日：2002-09-26
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BOLLE CRISTIAN A
IPC: G02B3/00 , B29D11/00 , B44C1/22 , H01L21/00 , H01L21/302 , H01L21/3065 , H01L21/461
Abstract: PROBLEM TO BE SOLVED: To provide a method for compensating for non-uniformity of etching. SOLUTION: In an example of etching, a specific non-uniform parameter of a structure obtained from a non-uniform etch profile during the etching of a mask consisting of the same structures can be evaded by changing the mask to be used for specifying an etching area in order to compensate for the etch profile. Concretely the mask is changed from a specific structure characteristic for determining a specific parameter by a method of being in inverse proportion to the etch profile. When each lens has a minimum diameter in the case of forming a lens string for example, the specific parameter is a focal distance. In order to attain a uniform focal distance, the diameter/height of a photoresist disk is changed over the surface of a substrate.
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公开(公告)号：JP2003139920A
公开(公告)日：2003-05-14
申请号：JP2002185554
申请日：2002-06-26
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BOLLE CRISTIAN A
Abstract: PROBLEM TO BE SOLVED: To provide a method of forming a microlens to a substrate without etching mesa. SOLUTION: The substrate 101 coated (covered) with an extremely thin conformal coating layer 105 and a fluid object 103 are put into a fluid state by, for example, heating. As a result thereof, the flow of the fluid object is limited by the coating layer 105 and the shape of the bottom in the fluid state is not changed, by which the lens is formed.
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公开(公告)号：CA2322122C
公开(公告)日：2003-12-23
申请号：CA2322122
申请日：2000-10-03
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BISHOP DAVID JOHN , BOLLE CRISTIAN A , AKSYUK VLADIMIR ANATOLYEVICH , GILES RANDY CLINTON , PARDO FLAVIO
Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.
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公开(公告)号：CA2323189A1
公开(公告)日：2001-04-15
申请号：CA2323189
申请日：2000-10-13
Applicant: LUCENT TECHNOLOGIES INC
Inventor： KIM JUNGSANG , BISHOP DAVID JOHN , BOLLE CRISTIAN A
Abstract: A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode.
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公开(公告)号：CA2321021A1
公开(公告)日：2001-04-01
申请号：CA2321021
申请日：2000-09-27
Applicant: LUCENT TECHNOLOGIES INC
Inventor： AKSYUK VLADIMIR ANATOLYEVICH , GATES JOHN VANATTA II , SCOTTI RONALD EDWARD , GILES RANDY CLINTON , BOLLE CRISTIAN A , BISHOP DAVID JOHN
Abstract: An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.
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Patent Agency Ranking
公开(公告)号：CA2366527C
公开(公告)日：2005-06-28
申请号：CA2366527
申请日：2001-12-27
Applicant: LUCENT TECHNOLOGIES INC , AGERE SYST GUARDIAN CORP
Inventor： PARDO FLAVIO , BOLLE CRISTIAN A , AKSYUK VLADIMIR ANATOLYEVICH
Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element that is rotatably connected to a support structure via torsional members. The torsional members provide a restoring force to keep the actuated element planar to the surface of an underlying substrate. The surface of the substrate has electrodes formed thereon. The electrodes are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes, an electrostatic force is generated which causes the actuated element to rotate out of plane. The electrodes have three components. At least a portion of two of the components is within the tilting area of the actuated element. The third is outside the tilting area of the actuated element. The tilting area is defined as the surface area of the actuated element as projected onto the underlying substrate.
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公开(公告)号：CA2384044A1
公开(公告)日：2002-12-29
申请号：CA2384044
申请日：2002-04-30
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BASAVANHALLY NAGESH R , WELD JOHN DAVID , BOLLE CRISTIAN A , RUEL RENE R , KOLODNER PAUL ROBERT
Abstract: A precise fiber array is formed using a chuck to tightly hold as an array wi th hexagonal packing a group of precision ferrules into ones of which is insert ed and, bonded a fiber end. The bonding is typically performed by gluing the fiber into the ferrule. The ferrules may also be bonded to each other. Once the ferrules ar e bonded together, the chuck may be removed. The terminating end of the fibers may be polished. Alternatively, cleaved terminating fiber ends may be employed, wit h the various terminating ends being coordinated, e.g., by as optical flat. The ferrules may have a tip and a conical entrance. The chuck may hold the ferrules in a straight orientation. The fiber terminating faces of all of the ferrules may be substantially coplanar. The ferrules may be arranged in a hexagonal configuration.
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公开(公告)号：CA2366527A1
公开(公告)日：2002-07-05
申请号：CA2366527
申请日：2001-12-27
Applicant: LUCENT TECHNOLOGIES INC , AGERE SYST GUARDIAN CORP
Inventor： BOLLE CRISTIAN A , AKSYUK VLADIMIR ANATOLYEVICH , PARDO FLAVIO
Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element that is rotatably connected to a support structure via torsional members. The torsional members provide a restoring force to keep the actuated element planar to the surface of an underlying substrate. The surface of the substrate has electrodes formed thereon. The electrodes are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes, an electrostatic force is generated which causes the actuated element to rotate out of plane. The electrodes have three components. At least a portion of two of the components is within the tilting area of the actuated element. The third is outside the tilting area of the actuated element. The tilting area is defined as the surface area of the actuated element as projected onto the underlying substrate.
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公开(公告)号：CA2325247A1
公开(公告)日：2001-05-17
申请号：CA2325247
申请日：2000-11-08
Applicant: LUCENT TECHNOLOGIES INC
Inventor： BISHOP DAVID JOHN , AKSYUK VLADIMIR ANATOLYEVICH , GILES RANDY CLINTON , PARDO FLAVIO , BOLLE CRISTIAN A
Abstract: An optical switch for use in optical applications utilizes a MEMS reflective shutter and at least one reflecting device to provide optical switching between an input and two or more outputs while reducing the amount of physic al space required to position the respective input and outputs, and thereby minimize the size of the optical switch.
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公开(公告)号：CA2322122A1
公开(公告)日：2001-04-08
申请号：CA2322122
申请日：2000-10-03
Applicant: LUCENT TECHNOLOGIES INC
Inventor： PARDO FLAVIO , BISHOP DAVID JOHN , AKSYUK VLADIMIR ANATOLYEVICH , BOLLE CRISTIAN A , GILES RANDY CLINTON
Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.
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