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    MICRO ELECTROMECHANICAL SYSTEM OPTICAL DEVICE
    1.
    发明专利
    MICRO ELECTROMECHANICAL SYSTEM OPTICAL DEVICE 失效

    公开(公告)号：JP2001221962A

    公开(公告)日：2001-08-17

    申请号：JP2000309805

    申请日：2000-10-10

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN ,  BOLLE CHRISTIAN A ,  GILES RANDY CLINTON ,  PARDO FLAVIO

    IPC: B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  B81B7/02 ,  G02B26/08

    Abstract: PROBLEM TO BE SOLVED: To provide a micro electromechanical system optical device having a reduced occupied area. SOLUTION: In order to increases the production quantity on a substrate, the micro electromechanical system (MEM) optical device has the reduced occupied area. The MEM device has the optical element which has an outer edge and is supported by a supporting structure body disposed at the substrate. The supporting structure body is mechanically connected to the substrate by the pair of first and second beam which moves the structure to the startup position at which the optical element is raised upward of the substrate. At the raised position, the optical element is selectively inclined in order to deflect an optical signal. The beam is connected at one end to the supporting structure body, and is connected at the other end to the substrate, and the edge of the first and the second beam is placed so that they may be approached and located in the outer edge of the optical element. In order to decrease the contact area between the edge of the optical element and the substrate, it is suitable that a static frictional force reduction element is located in the outer edge of the optical element.

    HYBRID INTEGRATED CIRCUIT
    2.
    发明专利
    HYBRID INTEGRATED CIRCUIT 失效

    公开(公告)号：JP2001198897A

    公开(公告)日：2001-07-24

    申请号：JP2000314632

    申请日：2000-10-16

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： BISHOP DAVID JOHN ,  BOLLE CHRISTAIN A ,  KIM JUNGSANG ,  PARDO FLAVIO

    IPC: B81B3/00 ,  H01H50/00 ,  H01H59/00

    Abstract: PROBLEM TO BE SOLVED: To provide a hybrid integrated circuit having a MEMS relay flip-chip bonded to a CMOS chip. SOLUTION: The CMOS chip is bonded to a MEMS microrelay to form a rigid electric connection between the chips, whereby highly integral electric transmission through the hybrid integrated circuit can be formed. If a delay of signal propagation between the CMOS chip and the MEMS chip is greatly reduced, the hybrid integrated circuit can be used in high band width applications.

    ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE
    5.
    发明专利
    ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE 未知

    公开(公告)号：CA2366527C

    公开(公告)日：2005-06-28

    申请号：CA2366527

    申请日：2001-12-27

    Applicant: LUCENT TECHNOLOGIES INC ,  AGERE SYST GUARDIAN CORP

    Inventor： PARDO FLAVIO ,  BOLLE CRISTIAN A ,  AKSYUK VLADIMIR ANATOLYEVICH

    IPC: B81B3/00 ,  B81B7/02 ,  G02B26/08 ,  B81B5/00 ,  H04Q3/52

    Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element that is rotatably connected to a support structure via torsional members. The torsional members provide a restoring force to keep the actuated element planar to the surface of an underlying substrate. The surface of the substrate has electrodes formed thereon. The electrodes are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes, an electrostatic force is generated which causes the actuated element to rotate out of plane. The electrodes have three components. At least a portion of two of the components is within the tilting area of the actuated element. The third is outside the tilting area of the actuated element. The tilting area is defined as the surface area of the actuated element as projected onto the underlying substrate.

    ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE
    6.
    发明专利
    ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE 未知

    公开(公告)号：CA2366527A1

    公开(公告)日：2002-07-05

    申请号：CA2366527

    申请日：2001-12-27

    Applicant: LUCENT TECHNOLOGIES INC ,  AGERE SYST GUARDIAN CORP

    Inventor： BOLLE CRISTIAN A ,  AKSYUK VLADIMIR ANATOLYEVICH ,  PARDO FLAVIO

    IPC: B81B3/00 ,  B81B7/02 ,  G02B26/08 ,  B81B5/00 ,  H04Q3/52

    Abstract: A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element that is rotatably connected to a support structure via torsional members. The torsional members provide a restoring force to keep the actuated element planar to the surface of an underlying substrate. The surface of the substrate has electrodes formed thereon. The electrodes are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes, an electrostatic force is generated which causes the actuated element to rotate out of plane. The electrodes have three components. At least a portion of two of the components is within the tilting area of the actuated element. The third is outside the tilting area of the actuated element. The tilting area is defined as the surface area of the actuated element as projected onto the underlying substrate.

    MICRO-ELECTRO-MECHANICAL OPTICAL DEVICE
    8.
    发明专利
    MICRO-ELECTRO-MECHANICAL OPTICAL DEVICE 未知

    公开(公告)号：CA2322122A1

    公开(公告)日：2001-04-08

    申请号：CA2322122

    申请日：2000-10-03

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： PARDO FLAVIO ,  BISHOP DAVID JOHN ,  AKSYUK VLADIMIR ANATOLYEVICH ,  BOLLE CRISTIAN A ,  GILES RANDY CLINTON

    IPC: B81B3/00 ,  B81B5/00 ,  B81B7/00 ,  B81B7/02 ,  G02B26/08

    Abstract: A micro-electro-mechanical (MEM] optical device having a reduced footprint f or increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and secon d pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second bea m ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device f or reducing the contact area between the optic device edge and the substrate.

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