ARTICLE HAVING PASSIVE SELF-ASSEMBLY INDUCTOR

    公开(公告)号:JP2000150251A

    公开(公告)日:2000-05-30

    申请号:JP25568699

    申请日:1999-09-09

    Abstract: PROBLEM TO BE SOLVED: To provide an MEMS(microelectromachining system) type inductor capable of monolithic integration. SOLUTION: An inductor 102 is constituted of a conductive loop 104, whose one or more coils are suspended above the upper part of a substrate 100 by at least two conductive supports 110 and 114, including a passive self-assembly means. In an example, the passive self-assembly means includes a layer, having a high level specific stress provided on the conductive supports 110 and 114. A stress layer is accumulated on the structure layer (for example, polysilicon) of the conductive supports 110 and 114. When the structure of the supports of the inductor is 'released' in manufacture process by removing a certain sacrificial layer, the stress layer contracts and residual distortion can be reduced. As a result, an upward force is impressed to the free edge of the supports to which the conductive loop belongs. Thus, the supports 110 and 114 and the loop can be separated and lifted up from the substrate 100.

    MICRO ELECTROMECHANICAL SYSTEM OPTICAL DEVICE

    公开(公告)号:JP2001221962A

    公开(公告)日:2001-08-17

    申请号:JP2000309805

    申请日:2000-10-10

    Abstract: PROBLEM TO BE SOLVED: To provide a micro electromechanical system optical device having a reduced occupied area. SOLUTION: In order to increases the production quantity on a substrate, the micro electromechanical system (MEM) optical device has the reduced occupied area. The MEM device has the optical element which has an outer edge and is supported by a supporting structure body disposed at the substrate. The supporting structure body is mechanically connected to the substrate by the pair of first and second beam which moves the structure to the startup position at which the optical element is raised upward of the substrate. At the raised position, the optical element is selectively inclined in order to deflect an optical signal. The beam is connected at one end to the supporting structure body, and is connected at the other end to the substrate, and the edge of the first and the second beam is placed so that they may be approached and located in the outer edge of the optical element. In order to decrease the contact area between the edge of the optical element and the substrate, it is suitable that a static frictional force reduction element is located in the outer edge of the optical element.

    VARIABLE OPTICAL DELAY LINE FOR MICRO ELECTRONIC MACHINE

    公开(公告)号:JP2001208988A

    公开(公告)日:2001-08-03

    申请号:JP2000341870

    申请日:2000-11-09

    Abstract: PROBLEM TO BE SOLVED: To provide a variable optical delay line using a MEMS device. SOLUTION: A reflecting machine on a micromachine linear rack is disposed separating from an input source and/or the output point, an input light wave signal is received and is directed to the output point. The distances between the reflective machine and an input point and between the reflecting machine and the output point are variable, and, thereby, the selective pass delay compensation of a input light wave signal can be performed. The selective pass delay compensation necessary for an optical system is given by adjusting the pivot angle between a pivotally drivable MEMS mirror and a pivotally drivable mirror in another embodiment.

    OPTICAL CROSS CONNECTION MONITOR DEVICE

    公开(公告)号:JP2001174723A

    公开(公告)日:2001-06-29

    申请号:JP2000341869

    申请日:2000-11-09

    Abstract: PROBLEM TO BE SOLVED: To provide a method and a device which detect rotation drift of a mirror element in a MENS inclined mirror array used in an optical cross connection device. SOLUTION: In the optical cross connection device, by arranging the mirror element in a desired position while rotating it, an optical signal from an input fiber is directed toward an output fiber along an optical path. A monitor device arranged on the outside of the optical path is used to obtain a picture of a MENS array or transmit and receive a test signal through the cross connection device in order to detect the existence of mirror element drift.

    MICRO ELECTROMECHANICAL OPTICAL DEVICE

    公开(公告)号:JP2001117029A

    公开(公告)日:2001-04-27

    申请号:JP2000265137

    申请日:2000-09-01

    Abstract: PROBLEM TO BE SOLVED: To provide a method to increase a range of motion of an optical device. SOLUTION: This method to pivotally operate the optical device around one or plural axes of it is disclosed. The optical device is connected with micro electromechanical structure by springs. A part of the springs are fixed on the micro electromechanical structure. Transfer of the optical device in the translational direction by the springs is prevented when the optical device is pivotally operated around one or plural axes by fixing the part of each spring on the electromechanical structure.

    HYBRID INTEGRATED CIRCUIT
    7.
    发明专利

    公开(公告)号:JP2001198897A

    公开(公告)日:2001-07-24

    申请号:JP2000314632

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a hybrid integrated circuit having a MEMS relay flip-chip bonded to a CMOS chip. SOLUTION: The CMOS chip is bonded to a MEMS microrelay to form a rigid electric connection between the chips, whereby highly integral electric transmission through the hybrid integrated circuit can be formed. If a delay of signal propagation between the CMOS chip and the MEMS chip is greatly reduced, the hybrid integrated circuit can be used in high band width applications.

    MEMS OPTICAL ISOLATOR
    8.
    发明专利

    公开(公告)号:JP2001194597A

    公开(公告)日:2001-07-19

    申请号:JP2000342851

    申请日:2000-11-10

    Abstract: PROBLEM TO BE SOLVED: To provide an opto-isolator for selectively carrying an optical signal along an optical path from a signal source to a detector separate from the signal source. SOLUTION: The opto-isolator 10 incorporating an MEMS device 16 includes the optical signal source 12 and the optical signal detector 14 fixed while putting the optical path for communicating the optical signal in between. The device 16 having an actuator 22 for controlling a movable element 18 is provided between the signal source 12 and the detector 14 in order to operate the optical signal. In one embodiment, the element 18 is a shutter selectively making the detector 14 receive the optical signal and acting to prevent the signal from being detected. In another embodyment, a movable member is an MEMS inclined mirror for selectively making the optical signal go toward the detector 14.

    DRIVE MECHANISM FOR DEVICE WITH MOVABLE ELECTRODE AND FIXED ELECTRODE

    公开(公告)号:JP2001176369A

    公开(公告)日:2001-06-29

    申请号:JP2000314633

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a drive mechanism that can maintain a switching condition without power consumption. SOLUTION: This device has a movable electrode 12 which has a first electric contact point 20 and a fixed electrode 28 which has a second electric contact point 18. It is composed of a latching magnetic material 14 arranged on one of the movable electrode and the fixed electrode, electric conductors 10 arranged separately from the latching magnetic material, and a second magnetic material 16 arranged on the other of the movable electrode and the fixed electrode separately from the latching magnetic material. By exposing the latching magnetic material 14 to the exterior magnetic field formed by feeding a current into the electric conductors 10, a change in the magnetization direction of the latching magnetic material is caused, and the changed magnetization direction is maintained in the latching magnetic material 14 even after that its exposure to the formed exterior magnetic field has ended.

    OPTICAL CROSS CONNECT
    10.
    发明专利

    公开(公告)号:JP2001174724A

    公开(公告)日:2001-06-29

    申请号:JP2000350490

    申请日:2000-11-17

    Abstract: PROBLEM TO BE SOLVED: To provide an optical connect system which reduces a power loss and has a flexible frequency routing function. SOLUTION: The optical cross connect 100 has a lens array 114 which receives an optical signal from plural input fibers 112. The lens array consists of plural lens elements, and each lens element directs the optical signal to MEMS mirror arrays 118 and 122, that is, converges light. These MEMS mirror arrays have plural mirror elements, and each element is inclined around one or plural axes of rotation by applying a control signal to a desired mirror element. Thus, the optical signal is directed to various output fibers 128 along various paths.

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