公开(公告)号：WO0176054A3

公开(公告)日：2002-04-18

申请号：PCT/US0109260

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

Abstract translation: 用于旋转梳齿装置的方法使用偏置力的应用来响应于旋转元件的位置测量来围绕一个或两个轴线可控地旋转装置。 本发明可以用于现有技术的交错梳状驱动器，单层自对准梳状驱动装置，以及在光通信切换，视频，生物医学，惯性传感器和存储磁盘驱动器中的广泛应用中。

公开(公告)号：WO0173934A3

公开(公告)日：2002-03-14

申请号：PCT/US0109462

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: B81B5/00 ,  B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers (14) and a second comb structure having a plurality of second comb fingers (24), wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage (15) between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axes.

Abstract translation: 多层垂直梳状驱动致动器包括具有多个第一梳指（14）的第一梳结构和具有多个第二梳指（24）的第二梳结构，其中第一梳指和第二梳指基本相互交错 。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。 在第一和第二梳齿之间施加电压（15）使得第二梳状结构相对于第一梳状结构移动。 本发明包括沿两个轴线旋转可移动元件的2D柔性配置。

公开(公告)号：WO0173935A3

公开(公告)日：2002-04-18

申请号：PCT/US0109553

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: Optical switches based on combdriven MEMs rotating devices (700) including actuators and position sensors. The present invention includes an embodiment that uses rotating elements attached to rotatable flexure (711) disposed along an axis and coupled to the comb fingers (702, 712) with a biasing element coupled to the rotating element causing the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element (720). A voltage applied between comb fingers may cause the rotating element to undergo further rotation about the axis in a predetermined manner to deflect and switch an optical signal. The switches of the present invention can be employed with prior-art staggered combdrives and single layer self-aligned combdriven devices.

Abstract translation: 基于梳状MEMs旋转装置（700）的光学开关，包括致动器和位置传感器。 本发明包括一个实施例，其使用连接到沿轴线设置的旋转挠曲件（711）的旋转元件，并且与旋转元件连接的偏置元件（702,712）连接到梳齿（702,712），使得旋转元件经受受控角度 从初始接合的位移和响应于感测可移动或旋转元件（720）的位置的反馈（780）。 施加在梳齿之间的电压可能导致旋转元件以预定方式围绕轴进行进一步旋转以偏转和切换光信号。 本发明的开关可以与现有技术的交错梳齿驱动器和单层自对准梳齿装置一起使用。

公开(公告)号：WO0176055A3

公开(公告)日：2002-03-07

申请号：PCT/US0109533

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first (712) and second (702) comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback (780) to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

Abstract translation: 围绕轴线旋转梳齿驱动装置的方法使用施加的偏压力以及第一（712）和第二（702）梳齿之间的施加电压，以围绕一个或两个轴线可控地旋转该装置。 本发明的一个模式包括测量旋转元件的位置并通过改变偏压力和/或驱动电压来提供反馈（780）来控制其角位置。 本发明可以用于现有技术的交错梳状驱动器，单层自对准梳状驱动装置，以及在光通信切换，视频，生物医学，惯性传感器和存储磁盘驱动器中的广泛应用中。

公开(公告)号：WO0173937A3

公开(公告)日：2002-01-03

申请号：PCT/US0109611

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3556 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器定位在万向架结构的外框架和基座之间，第二组垂直梳驱动致动器定位在万向架结构的中间部分和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：WO0174707A2

公开(公告)日：2001-10-11

申请号：PCT/US0109261

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: B81B5/00 ,  B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

Abstract translation: 一种制造多层垂直梳状驱动致动器的方法，该致动器包括具有多个第一梳齿的第一梳结构和具有多个第二梳指的第二梳结构，其中第一和第二梳指基本相互交错。 本发明包括掩蔽和蚀刻包含这些多层的结构，其中同时制造第一和第二梳齿。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。