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    BIASED ROTATABLE COMBDRIVE DEVICES AND METHODS
    1.
    发明申请
    BIASED ROTATABLE COMBDRIVE DEVICES AND METHODS 审中-公开
    可弯曲的可旋转装置和方法

    公开(公告)号：WO0173936A3

    公开(公告)日：2002-04-18

    申请号：PCT/US0109554

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

    CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

    Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers (702, 712) are substantially interdigitated according to a predetermined engagement. A rotating element (700) may be attached to a rotatable flexure (711) disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimballed structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical services, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.

    Abstract translation: 描述了包括使用梳齿的致动器和位置传感器的旋转装置。 提供由单层制造的梳齿驱动器的一个设计，使得在标称状态下，两组梳指（702,712）根据预定的接合基本上是交错的。 旋转元件（700）可以附接到沿着轴线设置的可旋转的弯曲部（711），并且与附接到旋转元件的偏置元件一起耦合到梳齿，以使梳齿与旋转元件一起受到控制 来自初始接合的角位移和响应于来自感测可移动或旋转元件的位置的反馈（780）。 可以在梳齿之间施加电压，使得旋转元件以预定的方式围绕轴进行进一步的旋转。 或者，可以在旋转元件上施加时变偏压力，使得第一梳指与旋转元件一起以预定方式围绕轴进一步旋转。 梳齿装置可用作旋转执行器和位置传感器。 通过将两个这样的梳齿机布置在结构结构中，可以构造双轴旋转致动器和位置传感器。 本发明的梳状驱动装置可以用于广泛的应用，包括生物医学服务，用于跟踪和显示的光学装置，诸如光纤开关，惯性传感器和磁盘驱动器之类的电信设备。

    Biased rotatable comb drive actuator methods
    2.
    发明专利
    Biased rotatable comb drive actuator methods 未知

    公开(公告)号：AU4598401A

    公开(公告)日：2001-10-15

    申请号：AU4598401

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

    Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
    3.
    发明专利
    Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods 未知

    公开(公告)号：AU8729701A

    公开(公告)日：2001-10-15

    申请号：AU8729701

    申请日：2001-03-22

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: B81B5/00 ,  B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  H02N1/00

    Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.

    Biased rotatable comb drive sensor methods
    4.
    发明专利
    Biased rotatable comb drive sensor methods 未知

    公开(公告)号：AU4770201A

    公开(公告)日：2001-10-15

    申请号：AU4770201

    申请日：2001-03-22

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

    Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Biased rotatable combdrive devices and methods
    5.
    发明专利
    Biased rotatable combdrive devices and methods 未知

    公开(公告)号：AU4777001A

    公开(公告)日：2001-10-08

    申请号：AU4777001

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/00

    Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
    6.
    发明专利
    Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods 未知

    公开(公告)号：AU4774801A

    公开(公告)日：2001-10-08

    申请号：AU4774801

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: B81B5/00 ,  B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  H02N1/00

    Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.

    Optical switch employing biased rotatable comb drive devices and methods
    8.
    发明专利
    Optical switch employing biased rotatable comb drive devices and methods 未知

    公开(公告)号：AU4943901A

    公开(公告)日：2001-10-08

    申请号：AU4943901

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/00

    Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

    Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics
    9.
    发明专利
    Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics 未知

    公开(公告)号：AU7480501A

    公开(公告)日：2001-10-03

    申请号：AU7480501

    申请日：2001-03-23

    Applicant: ONIX MICROSYSTEMS INC

    Inventor： DANEMAN MICHAEL J ,  BEHIN BEHRANG ,  PANNU SATINDERPALL S

    IPC: B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00 ,  G02B26/00

    Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

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