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公开(公告)号：PL307591A1
公开(公告)日：1995-05-29
申请号：PL30759193
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：NO950777L
公开(公告)日：1995-02-28
申请号：NO950777
申请日：1995-02-28
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：NO950777A
公开(公告)日：1995-02-28
申请号：NO950777
申请日：1995-02-28
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
CPC classification number: G01L19/0618 , G01L9/0042
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公开(公告)号：AU3495901A
公开(公告)日：2001-08-20
申请号：AU3495901
申请日：2001-02-09
Applicant: ROSEMOUNT INC
Inventor： WILLCOX CHARLES R , LUTZ MARK A , ROMO MARK G , RUD STANLEY E JR
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公开(公告)号：AU2443201A
公开(公告)日：2001-07-16
申请号：AU2443201
申请日：2000-12-20
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , FRICK ROGER L , SITTLER FRED C , TOY ADRIAN C
Abstract: A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
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Patent Agency Ranking
公开(公告)号：AU680430B2
公开(公告)日：1997-07-31
申请号：AU4841293
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：NO950777D0
公开(公告)日：1995-02-28
申请号：NO950777
申请日：1995-02-28
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：FI950912A0
公开(公告)日：1995-02-28
申请号：FI950912
申请日：1995-02-28
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：FI950912A
公开(公告)日：1995-02-28
申请号：FI950912
申请日：1995-02-28
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：EP2242596A4
公开(公告)日：2013-01-09
申请号：EP08868040
申请日：2008-12-16
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A
CPC classification number: G01L19/0007 , G01L13/025 , G01L19/0645 , Y10T29/53039
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