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    Silicon@ sensor with controlled membrane thickness
    16.
    发明专利
    Silicon@ sensor with controlled membrane thickness 未知

    公开(公告)号：FR2742224A1

    公开(公告)日：1997-06-13

    申请号：FR9514688

    申请日：1995-12-12

    Applicant: SEXTANT AVIONIQUE

    Inventor： PEDRAZA RAMOS SYLVIE ,  GIROUD PIERRE ,  GUILLEMIN PIERRE ,  MIGEON ANDRE

    IPC: G01L9/00 ,  G01P15/08 ,  G01P15/12 ,  G01D5/12 ,  G01P15/09

    Abstract: A single crystal silicon-based sensor has a membrane with an upper surface in a plane (p1) and a lower surface in a plane (p2). The membrane is suspended from solid parts having upper surfaces in the plane (p1) and lower surfaces in a plane (p3). The novelty is that: (a) the distance between the planes (p1, p2) is small compared with the distance between the planes (p2, p3); and (b) the solid parts include, in the plane (p2), a layer (1) of greater chemical etching stability than silicon. Also claimed is a method of making the sensor by chemically etching a monolithic element which has an upper surface in a plane (p), a lower surface in the plane (p3) and an insulating layer (1) in the plane (p2). The etching is carried out between planes (p3) and (p2) and stops on the layer (1) to define one or more membranes in the monolithic element. Preferably the layer (1) is a silicon oxide or nitride layer.

    17.
    发明专利
    未知

    公开(公告)号：FR2737610A1

    公开(公告)日：1997-02-07

    申请号：FR9509366

    申请日：1995-08-01

    Applicant: SEXTANT AVIONIQUE

    Inventor： THOMAS ISABELLE ,  GIROUD PIERRE

    IPC: G01L9/00 ,  G01P15/08 ,  H01L49/02

    Abstract: A capacitive microsensor with a sandwich of three silicon wafers (1, 2, 3) where each surface of a frame-like region of the central wafer is attached to the facing surface of each outer wafer via a thin film forming an insulating strip (5, 6). The insulating strips have surface recesses that reduce the stray capacitances of the microsensor. Said microsensor may be used as a pressure sensor or an acceleration sensor.

    20.
    发明专利
    未知

    公开(公告)号：FR2788163B1

    公开(公告)日：2001-03-16

    申请号：FR9816659

    申请日：1998-12-30

    Applicant: SEXTANT AVIONIQUE

    Inventor： GUILLEMIN PIERRE ,  GIROUD PIERRE

    IPC: G01V1/18 ,  H01F7/08 ,  H01F7/121

    Abstract: An electromagnetic accelerometer including a stationary stator element (12) associated with a movable polar element (14) securable to an external member (2), the stationary stator element (12) and the movable polar element (14) forming a magnetic circuit and defining between them at least two gaps (51), a magnet (5) helping to create magnetic field lines in the magnetic circuit, a coil (6) and a mechanism for energizing the coil for controlling the displacement of the movable polar element (14) through electromagnetic induction phenomena. The electromagnetic accelerometer further includes an adjustment polar element (15) for placing the movable polar element (14) in an adjusted position with respect to that of the stationary stator element (12), by deviating the magnetic field lines.

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