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    1.
    发明专利
    未知

    公开(公告)号：FR2742230B1

    公开(公告)日：1998-01-09

    申请号：FR9514686

    申请日：1995-12-12

    Applicant: SEXTANT AVIONIQUE

    Inventor： LEFORT OLIVIER ,  PEDRAZA RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

    IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84 ,  G01P15/09

    Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

    2.
    发明专利
    未知

    公开(公告)号：FR2742231A1

    公开(公告)日：1997-06-13

    申请号：FR9514687

    申请日：1995-12-12

    Applicant: SEXTANT AVIONIQUE

    Inventor： GIROUD PIERRE ,  GUILLEMIN PIERRE ,  MIGEON ANDRE ,  PEDRAZA RAMOS SYLVIE

    IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/09

    Abstract: An electromagnetic accelerometer comprising a sensitive silicon portion with a movable weight (2) connected to a frame (3) via a suspension arm (80, 81). The sensitive silicon portion is secured to a motor (1) having so-called negative stiffness and including a stationary pole chamber (12) connected to the frame, a magnet (5), a coil (6) and a movable pole portion (14) inserted into the chamber (12) and secured to the movable weight (2). Said accelerometer is useful in geophones.

    3.
    发明专利
    未知

    公开(公告)号：DE69522165D1

    公开(公告)日：2001-09-20

    申请号：DE69522165

    申请日：1995-10-24

    Applicant: SEXTANT AVIONIQUE VELIZY VILLA

    Inventor： FIMA HENRI ,  PEDRAZA RAMOS SYLVIE

    IPC: G01C19/56

    Abstract: The micro-gyrometer is designed to detect rotation around a first direction (z). It includes a plate (1) which is orthogonal to the first direction, suspended w.r.t a fixed frame (8), and excited at its resonant frequency in a second direction (x) perpendicular to the first direction (z). Rotation around the direction (z) causes vibration of the plate in a third direction (y) orthogonal to the two others (x,z). The plate has teeth (9,10) extending in the second (x) and third (y) directions. These teeth engage without contact into slots (11,12) fixed to the frame (8). Each of the teeth supports a metal coatings, which form capacitors (Cx,Cy), w.r.t similar metal coatings on the slots (11,12).

    Silicon@ sensor with controlled membrane thickness
    4.
    发明专利
    Silicon@ sensor with controlled membrane thickness 未知

    公开(公告)号：FR2742224A1

    公开(公告)日：1997-06-13

    申请号：FR9514688

    申请日：1995-12-12

    Applicant: SEXTANT AVIONIQUE

    Inventor： PEDRAZA RAMOS SYLVIE ,  GIROUD PIERRE ,  GUILLEMIN PIERRE ,  MIGEON ANDRE

    IPC: G01L9/00 ,  G01P15/08 ,  G01P15/12 ,  G01D5/12 ,  G01P15/09

    Abstract: A single crystal silicon-based sensor has a membrane with an upper surface in a plane (p1) and a lower surface in a plane (p2). The membrane is suspended from solid parts having upper surfaces in the plane (p1) and lower surfaces in a plane (p3). The novelty is that: (a) the distance between the planes (p1, p2) is small compared with the distance between the planes (p2, p3); and (b) the solid parts include, in the plane (p2), a layer (1) of greater chemical etching stability than silicon. Also claimed is a method of making the sensor by chemically etching a monolithic element which has an upper surface in a plane (p), a lower surface in the plane (p3) and an insulating layer (1) in the plane (p2). The etching is carried out between planes (p3) and (p2) and stops on the layer (1) to define one or more membranes in the monolithic element. Preferably the layer (1) is a silicon oxide or nitride layer.

    5.
    发明专利
    未知

    公开(公告)号：FR2726361B1

    公开(公告)日：1997-01-17

    申请号：FR9413146

    申请日：1994-10-28

    Applicant: SEXTANT AVIONIQUE

    Inventor： FIMA HENRI ,  PEDRAZA RAMOS SYLVIE

    IPC: G01C19/56

    Abstract: The micro-gyrometer is designed to detect rotation around a first direction (z). It includes a plate (1) which is orthogonal to the first direction, suspended w.r.t a fixed frame (8), and excited at its resonant frequency in a second direction (x) perpendicular to the first direction (z). Rotation around the direction (z) causes vibration of the plate in a third direction (y) orthogonal to the two others (x,z). The plate has teeth (9,10) extending in the second (x) and third (y) directions. These teeth engage without contact into slots (11,12) fixed to the frame (8). Each of the teeth supports a metal coatings, which form capacitors (Cx,Cy), w.r.t similar metal coatings on the slots (11,12).

    6.
    发明专利
    未知

    公开(公告)号：DE69522165T2

    公开(公告)日：2002-05-02

    申请号：DE69522165

    申请日：1995-10-24

    Applicant: SEXTANT AVIONIQUE VELIZY VILLA

    Inventor： FIMA HENRI ,  PEDRAZA RAMOS SYLVIE

    IPC: G01C19/56

    Abstract: The micro-gyrometer is designed to detect rotation around a first direction (z). It includes a plate (1) which is orthogonal to the first direction, suspended w.r.t a fixed frame (8), and excited at its resonant frequency in a second direction (x) perpendicular to the first direction (z). Rotation around the direction (z) causes vibration of the plate in a third direction (y) orthogonal to the two others (x,z). The plate has teeth (9,10) extending in the second (x) and third (y) directions. These teeth engage without contact into slots (11,12) fixed to the frame (8). Each of the teeth supports a metal coatings, which form capacitors (Cx,Cy), w.r.t similar metal coatings on the slots (11,12).

    9.
    发明专利
    未知

    公开(公告)号：FR2742231B1

    公开(公告)日：1998-01-02

    申请号：FR9514687

    申请日：1995-12-12

    Applicant: SEXTANT AVIONIQUE

    Inventor： GIROUD PIERRE ,  GUILLEMIN PIERRE ,  MIGEON ANDRE ,  PEDRAZA RAMOS SYLVIE

    IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/09

    Abstract: PCT No. PCT/FR96/01969 Sec. 371 Date May 4, 1999 Sec. 102(e) Date Apr. 5, 1999 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22011 PCT Pub. Date Jun. 19, 1997An electromagnetic accelerometer includes a peripheral frame, a mass suspended from the peripheral frame, a plurality of strain gauges configured to detect displacement of the mass, and a magnetic motor. The magnetic motor includes a first pole piece defining a chamber, a second pole piece positioned in the chamber and coupled to the mass, a permanent magnet coupled to the first pole piece, and a coil coupled to the first pole piece. The permanent magnet and the coil surround at least a portion of the second pole piece.

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