公开(公告)号：FR2742230A1

公开(公告)日：1997-06-13

申请号：FR9514686

申请日：1995-12-12

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84 ,  G01P15/09

Abstract: An accelerometer based on single-crystal silicon and including a movable weight (1) connected to a stationary frame (3) via suspension arms (21, 22). The resulting sensor is formed in a stack of two silicon plates (6, 7) provided with abutment (43, 44, 47, 48) and counter-abutment (41, 42, 45, 46) functions for limiting the magnitude of the movements of the movable weight (1).

公开(公告)号：FR2686191B1

公开(公告)日：1994-10-28

申请号：FR9302339

申请日：1993-02-23

Applicant: SEXTANT AVIONIQUE

Inventor： GIROUD PIERRE ,  LEFORT PIERRE-OLIVIER ,  PRESSET RENE

IPC: G01P15/08 ,  G01P15/125 ,  H01L21/58 ,  H01L23/34

公开(公告)号：DE69409991D1

公开(公告)日：1998-06-10

申请号：DE69409991

申请日：1994-02-08

Applicant: SEXTANT AVIONIQUE

Inventor： LEGOUX CHRISTOPHE ,  PRESSET RENE

IPC: G01D5/241 ,  G01L9/00 ,  G01P15/125 ,  G01D5/24

公开(公告)号：FR2742230B1

公开(公告)日：1998-01-09

申请号：FR9514686

申请日：1995-12-12

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84 ,  G01P15/09

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：FR2686191A1

公开(公告)日：1993-07-16

申请号：FR9302339

申请日：1993-02-23

Applicant: SEXTANT AVIONIQUE

Inventor： GIROUD PIERRE ,  LEFORT PIERRE-OLIVIER ,  PRESSET RENE

IPC: G01P15/08 ,  G01P15/125 ,  H01L21/58 ,  H01L23/34

Abstract: The present invention relates to a flat parallelepipedal microcomponent layout consisting of an assembly of silicon wafers (1, 2, 3) mounted on a support. A silicon plate (30) is fixed by a first small-size region (31) of its upper surface to one of the wafers of the microcomponent, and by a second small-size region (32) of its lower surface to the support (20).

公开(公告)号：BR9612776A

公开(公告)日：2001-01-02

申请号：BR9612776

申请日：1996-12-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：DE69409991T2

公开(公告)日：1998-12-24

申请号：DE69409991

申请日：1994-02-08

Applicant: SEXTANT AVIONIQUE

Inventor： LEGOUX CHRISTOPHE ,  PRESSET RENE

IPC: G01D5/241 ,  G01L9/00 ,  G01P15/125 ,  G01D5/24

公开(公告)号：AU1101597A

公开(公告)日：1997-07-03

申请号：AU1101597

申请日：1996-12-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：AU706765B2

公开(公告)日：1999-06-24

申请号：AU1101597

申请日：1996-12-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84

Abstract: PCT No. PCT/FR96/01968 Sec. 371 Date Jul. 30, 1998 Sec. 102(e) Date Jul. 30, 1998 PCT Filed Dec. 10, 1996 PCT Pub. No. WO97/22010 PCT Pub. Date Jun. 19, 1997An accelerometer based on monocrystalline silicon. A moving mass is connected to a fixed frame by suspension arms. The sensor is produced in the stack of two silicon wafers in which stop and counter-stop functions are produced so as to limit the amplitude of the movements of the moving mass.

公开(公告)号：CA2239106A1

公开(公告)日：1997-06-19

申请号：CA2239106

申请日：1996-12-10

Applicant: SEXTANT AVIONIQUE

Inventor： LEFORT OLIVIER ,  PEDRAZA-RAMOS SYLVIE ,  PRESSET RENE ,  GIROUD PIERRE

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  G01P15/18 ,  H01L29/84 ,  G01P15/02

Abstract: L'invention concerne un accéléromètre à base de silicium monocristallin comprenant une masse mobile (1) reliée à un cadre fixe (3) par des bras de suspension (21, 22). Ce capteur est réalisé dans l'empilement de deux plaques de silicium (6, 7), dans lesquelles sont réalisées des fonctions de butées (43, 44, 47, 48) et de contre-butées (41, 42, 45, 46) pour limiter l'ampleur des mouvements de la masse mobile (1).