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    COMPENSATED MEMS FTIR SPECTROMETER ARCHITECTURE
    12.
    发明申请
    COMPENSATED MEMS FTIR SPECTROMETER ARCHITECTURE 审中-公开
    补偿MEMS FTIR光谱仪结构

    公开(公告)号：WO2011031791A1

    公开(公告)日：2011-03-17

    申请号：PCT/US2010/048169

    申请日：2010-09-08

    Applicant: SI-WARE SYSTEMS ,  KHALIL, Diaa A. ,  MORTADA, Bassem ,  NABIL, Mohamed ,  MEDHAT, Mostafa ,  SAADANY, Bassam A.

    Inventor： KHALIL, Diaa A. ,  MORTADA, Bassem ,  NABIL, Mohamed ,  MEDHAT, Mostafa ,  SAADANY, Bassam A.

    IPC: G01J3/02 ,  G01J3/45 ,  G01J3/453

    CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

    Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

    Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS
    13.
    发明申请
    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS 审中-公开
    光机械光学路径延迟乘法器用于光学MEMS应用

    公开(公告)号：WO2010121185A1

    公开(公告)日：2010-10-21

    申请号：PCT/US2010/031467

    申请日：2010-04-16

    Applicant: SI-WARE SYSTEMS ,  MEDHAT, Mostafa ,  SAADANY, Bassam, A. ,  KHALIL, Diaa, A., M. ,  MORTADA, Bassem

    Inventor： MEDHAT, Mostafa ,  SAADANY, Bassam, A. ,  KHALIL, Diaa, A., M. ,  MORTADA, Bassem

    IPC: G02B5/124 ,  G02B17/02

    CPC classification number: G02B5/124 ,  G02B17/023 ,  G02B26/0841

    Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed mirror and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed mirror is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.

    Abstract translation: 光学微机电系统（MEMS）装置提供光路延迟乘法器。 MEMS器件包括可移动角立方反射器，固定反射镜和MEMS致动器。 可移动角立方反射器被光学耦合以接收入射光束并将入射光束朝着固定镜反射180度。 固定镜被光耦合以沿着入射光束的反向路径将反射光束反射回朝向可移动角立方反射体。 MEMS致动器耦合到可移动角立方反射器以引起可移动角立方反射器的位移以延伸反射光束的光路长度。

    SELF-REFERENCED SPECTROMETER
    16.
    发明申请
    SELF-REFERENCED SPECTROMETER 审中-公开

    公开(公告)号：WO2019191698A3

    公开(公告)日：2019-10-03

    申请号：PCT/US2019/025021

    申请日：2019-03-29

    Applicant: SI-WARE SYSTEMS

    Inventor： MEDHAT, Mostafa ,  MORTADA, Bassem ,  SABRY, Yasser, M. ,  HOSSAM, Mohamed ,  ANWAR, Momen ,  SHEBL, Ahmed ,  HADDARA, Hisham ,  SAADANY, Bassam, A.

    IPC: G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G01J3/26 ,  G01J3/453 ,  G01B9/02 ,  G02B26/08 ,  G02B17/02

    Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.

    LONG TRAVEL RANGE MEMS ACTUATOR
    18.
    发明申请
    LONG TRAVEL RANGE MEMS ACTUATOR 审中-公开

    公开(公告)号：WO2010121121A3

    公开(公告)日：2010-10-21

    申请号：PCT/US2010/031380

    申请日：2010-04-16

    Applicant: SI-WARE SYSTEMS ,  MEDHAT, Mostafa ,  NADA, Yasseen ,  MORTADA, Bassem ,  SAADANY, Bassam, A.

    Inventor： MEDHAT, Mostafa ,  NADA, Yasseen ,  MORTADA, Bassem ,  SAADANY, Bassam, A.

    IPC: B81B3/00

    Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

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