公开(公告)号：ITTO20101080A1

公开(公告)日：2012-06-30

申请号：ITTO20101080

申请日：2010-12-29

Applicant: ST MICROELECTRONICS SRL

Inventor： SANTANGELO ANTONELLO ,  SMERZI SANTO ALESSANDRO

公开(公告)号：DE69033271T2

公开(公告)日：2000-02-17

申请号：DE69033271

申请日：1990-02-20

Applicant: ST MICROELECTRONICS SRL

Inventor： SANTANGELO ANTONELLO ,  MAGRO CARMELO ,  FERLA GIUSEPPE ,  LANZA PAOLO

IPC: H01L21/265 ,  H01L21/28 ,  H01L21/285 ,  H01L21/329 ,  H01L21/768 ,  H01L21/60

Abstract: The process consists of enrichment of the surface of the semiconductor on which the contact is to be formed, by ion implantation of dopant, followed by deposition of a metal film on the implanted surface and then by thermal annealing at a temperature considerably lower than 500 DEG C and for a period considerably shorter than 60 minutes.

公开(公告)号：DE69033271D1

公开(公告)日：1999-10-07

申请号：DE69033271

申请日：1990-02-20

Applicant: ST MICROELECTRONICS SRL

Inventor： SANTANGELO ANTONELLO ,  MAGRO CARMELO ,  FERLA GIUSEPPE ,  LANZA PAOLO

IPC: H01L21/265 ,  H01L21/28 ,  H01L21/285 ,  H01L21/329 ,  H01L21/768 ,  H01L21/60

Abstract: The process consists of enrichment of the surface of the semiconductor on which the contact is to be formed, by ion implantation of dopant, followed by deposition of a metal film on the implanted surface and then by thermal annealing at a temperature considerably lower than 500 DEG C and for a period considerably shorter than 60 minutes.

公开(公告)号：ITTO20120553A1

公开(公告)日：2013-12-23

申请号：ITTO20120553

申请日：2012-06-22

Applicant: ST MICROELECTRONICS SRL

Inventor： PRIVITERA STEFANIA ,  SANTANGELO ANTONELLO

公开(公告)号：IT1402165B1

公开(公告)日：2013-08-28

申请号：ITTO20100559

申请日：2010-06-30

Applicant: ST MICROELECTRONICS SRL

Inventor： SANTANGELO ANTONELLO ,  PRIVITERA STEFANIA MARIA SERENA

公开(公告)号：ITMI20101963A1

公开(公告)日：2012-04-26

申请号：ITMI20101963

申请日：2010-10-25

Applicant: ST MICROELECTRONICS SRL

Inventor： ALBERTI ALESSANDRA ,  BADALA PAOLO ,  SANTANGELO ANTONELLO

公开(公告)号：ITTO20100559A1

公开(公告)日：2011-12-31

申请号：ITTO20100559

申请日：2010-06-30

Applicant: ST MICROELECTRONICS SRL

Inventor： PRIVITERA STEFANIA MARIA SERENA ,  SANTANGELO ANTONELLO

公开(公告)号：DE69033234T2

公开(公告)日：2000-02-03

申请号：DE69033234

申请日：1990-02-20

Applicant: ST MICROELECTRONICS SRL

Inventor： SANTANGELO ANTONELLO ,  MAGRO CARMELO ,  LANZA PAOLO

IPC: H01L21/28 ,  H01L21/285 ,  H01L29/47 ,  H01L29/872

公开(公告)号：ITTO20121081A1

公开(公告)日：2014-06-15

申请号：ITTO20121081

申请日：2012-12-14

Applicant: ST MICROELECTRONICS SRL

Inventor： GIUFFRIDA MARCELLO FRANCESCO SALVATORE ,  SANTANGELO ANTONELLO

公开(公告)号：IT1404038B1

公开(公告)日：2013-11-08

申请号：ITTO20101080

申请日：2010-12-29

Applicant: ST MICROELECTRONICS SRL

Inventor： SMERZI SANTO ALESSANDRO ,  SANTANGELO ANTONELLO