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公开(公告)号：US09744765B2
公开(公告)日：2017-08-29
申请号：US15191154
申请日：2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Lorenzo Colombo , Carlo Luigi Prelini , Mauro Cattaneo
CPC classification number: B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14241 , B41J2002/14411 , B41J2202/12
Abstract: A fluid ejection device, comprising: a first semiconductor body including an actuator, which is operatively coupled to a chamber for containing the fluid and is configured to cause ejection of the fluid; and a channel for inlet of the fluid, which extends in a first direction and has a section having a first dimension; and a second semiconductor body, which is coupled to the first semiconductor body and has an ejection nozzle configured to expel the fluid. The second semiconductor body further comprises a first restriction channel, which is fluidically coupled to the inlet channel, extends in a second direction orthogonal to the first direction and has a respective section with a second dimension smaller than the first dimension so as to form a restriction between the inlet channel and the chamber.
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公开(公告)号：US12185633B2
公开(公告)日：2024-12-31
申请号：US18329975
申请日：2023-06-06
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini
Abstract: A MEMS device having a body with a first and a second surface, a first portion and a second portion. The MEMS device further has a cavity extending in the body from the second surface; a deformable portion between the first surface and the cavity; and a piezoelectric actuator arranged on the first surface, on the deformable portion. The deformable portion has a first region with a first thickness and a second region with a second thickness greater than the first thickness. The second region is adjacent to the first region and to the first portion of the body.
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公开(公告)号：US11981558B2
公开(公告)日：2024-05-14
申请号：US17240782
申请日：2021-04-26
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini
CPC classification number: B81B3/007 , B81C1/00658 , F16K31/005 , H04R1/02 , H04R3/00 , H04R7/04 , H04R7/18 , H04R19/02 , B81B2201/0257 , B81B2201/054 , B81B2203/0127 , B81B2203/0315 , B81B2203/0338 , B81B2203/04 , B81B2207/03 , H04R2201/003
Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.
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公开(公告)号：US11884071B2
公开(公告)日：2024-01-30
申请号：US17572374
申请日：2022-01-10
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini , Lorenzo Tentori
CPC classification number: B41J2/14201 , B41J2/1433 , B41J2/1652
Abstract: Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.
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公开(公告)号：US20180065371A1
公开(公告)日：2018-03-08
申请号：US15812960
申请日：2017-11-14
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
CPC classification number: B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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Patent Agency Ranking
公开(公告)号：US11498335B2
公开(公告)日：2022-11-15
申请号：US17107683
申请日：2020-11-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini , Mauro Cattaneo , Andrea Nomellini
Abstract: A method for manufacturing a device for ejecting a fluid, including the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.
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公开(公告)号：US11214061B2
公开(公告)日：2022-01-04
申请号：US16885908
申请日：2020-05-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Cattaneo , Carlo Luigi Prelini
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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公开(公告)号：US10974508B2
公开(公告)日：2021-04-13
申请号：US16392007
申请日：2019-04-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Marco Ferrera , Carlo Luigi Prelini
Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.
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公开(公告)号：US10703102B2
公开(公告)日：2020-07-07
申请号：US16030630
申请日：2018-07-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Cattaneo , Carlo Luigi Prelini
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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公开(公告)号：US09991316B2
公开(公告)日：2018-06-05
申请号：US15374304
申请日：2016-12-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Paola Zuliani , Gianluigi Confalonieri , Annalisa Gilardini , Carlo Luigi Prelini
CPC classification number: H01L27/2463 , H01L27/2436 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/1293 , H01L45/144 , H01L45/16 , H01L45/1683
Abstract: A phase-change memory cell, comprising: a substrate housing a transistor, for selection of the memory cell, that includes a first conduction electrode; a first electrical-insulation layer on the selection transistor; a first conductive through via through the electrical-insulation layer electrically coupled to the first conduction electrode; a heater element including a first portion in electrical contact with the first conductive through via and a second portion that extends in electrical continuity with, and orthogonal to, the first portion; a first protection element extending on the first and second portions of the heater element; a second protection element extending in direct lateral contact with the first portion of the heater element and with the first protection element; and a phase-change region extending over the heater element in electrical and thermal contact therewith.
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