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    Integrated electronic module including two micromirrors, and system including the electronic module
    12.
    发明授权
    Integrated electronic module including two micromirrors, and system including the electronic module 有权

    公开(公告)号：US12204092B2

    公开(公告)日：2025-01-21

    申请号：US17480634

    申请日：2021-09-21

    Applicant: STMicroelectronics S.r.l.

    Inventor： Marco Del Sarto ,  Alex Gritti ,  Amedeo Maierna ,  Luca Maggi

    IPC: G02B26/08 ,  G02B26/10

    Abstract: An electronic module includes a first die of semiconductor material including a first reflector, a second die of semiconductor material including a second reflector, and a frame including a first supporting portion and a second supporting portion parallel to one another. The first and second dies are carried, respectively, by the first and second supporting portions and are respectively arranged so that the first reflector faces the second supporting portion and the second reflector faces the first supporting portion. An incoming light beam impinges upon the first reflector and is reflected on the second reflector so as to be supplied at output from the electronic module.

    Opto-mechanical transducer apparatus and corresponding method
    14.
    发明授权
    Opto-mechanical transducer apparatus and corresponding method 有权

    公开(公告)号：US11598920B2

    公开(公告)日：2023-03-07

    申请号：US17326955

    申请日：2021-05-21

    Applicant: STMicroelectronics S.r.l.

    Inventor： Luca Maggi ,  Mark Andrew Shaw

    IPC: G02B6/32 ,  G02F1/01 ,  G02B6/028 ,  G01L9/00

    Abstract: An embodiment apparatus comprises an optically transparent substrate having first and second surfaces; a piezoelectric membrane, arranged at the first surface, that oscillates in response to a light beam propagated through the substrate; at least one reflective facet facing the substrate and arranged at the piezoelectric membrane; and an optical element receiving the light beam at an input end and guiding the light beam towards an output end coupled to the second surface. The optical element incorporates a light focusing path focusing the light beam at a focal point at the piezoelectric membrane, and at least one light collimating path collimating the light beam onto the at least one reflective facet. The optical element guides light reflected from the at least one reflective facet to the input end, the reflected light indicating a position of the optical element with respect to the focal point.

    Photonic Wafer Level Testing Systems, Devices, and Methods of Operation
    15.
    发明申请
    Photonic Wafer Level Testing Systems, Devices, and Methods of Operation 有权

    公开(公告)号：US20210270699A1

    公开(公告)日：2021-09-02

    申请号：US17318831

    申请日：2021-05-12

    Applicant: STMicroelectronics S.r.l.

    Inventor： Marco Piazza ,  Antonio Canciamilla ,  Piero Orlandi ,  Luca Maggi

    IPC: G01M11/00 ,  G02B6/293 ,  G01M11/02 ,  G01R31/3185 ,  G01R31/317

    Abstract: A method of testing a photonic device includes providing a plurality of optical test signals at respective inputs of a first plurality of inputs of an optical input circuit located on a substrate, combining the plurality of optical test signals into a combined optical test signal at an output of the optical input circuit, transmitting the combined optical test signal through the output to an input waveguide of an optical device under test, the optical device under test being located on the substrate, and measuring a response of the optical device under test to the combined optical test signal. Each of the plurality of optical test signals comprises a respective dominant wavelength of a plurality of dominant wavelengths.

    Method of producing a device for adiabatic coupling between waveguide arrays, corresponding device, and system
    16.
    发明授权
    Method of producing a device for adiabatic coupling between waveguide arrays, corresponding device, and system 有权

    公开(公告)号：US10761279B2

    公开(公告)日：2020-09-01

    申请号：US16428428

    申请日：2019-05-31

    Applicant: STMicroelectronics S.r.l.

    Inventor： Mark Andrew Shaw ,  Luca Maggi ,  Antonio Fincato

    IPC: G02B6/42 ,  G02B6/122 ,  G02B6/12

    Abstract: A method includes providing a semiconductor body comprising a surface with a recessed portion therein. The recessed portion includes a bottom surface. Optical waveguide cores in a first array of optical waveguide cores extend side-by-side at the bottom surface. The method further includes providing a second array of optical waveguide cores over the first array of optical waveguide cores. Optical waveguide cores in the second array of optical waveguide cores extend side-by-side. Each optical waveguide core in the second array of optical waveguide cores is in an adiabatic coupling relationship with a corresponding optical waveguide core in the first array of optical waveguide cores. The method also includes applying an optical waveguide cladding material over the second array of optical waveguide cores.

    Photonic IC chip
    19.
    发明授权
    Photonic IC chip 有权

    公开(公告)号：US11609378B2

    公开(公告)日：2023-03-21

    申请号：US17649520

    申请日：2022-01-31

    Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics (Crolles 2) SAS

    Inventor： Frédéric Boeuf ,  Luca Maggi

    IPC: G02B6/124 ,  G02B6/34 ,  G02B6/43 ,  G02B6/30 ,  G02B6/12 ,  G02B6/136

    Abstract: A photonic integrated circuit chip includes vertical grating couplers defined in a first layer. Second insulating layers overlie the vertical grating coupler and an interconnection structure with metal levels is embedded in the second insulating layers. A cavity extends in depth through the second insulating layers all the way to an intermediate level between the couplers and the metal level closest to the couplers. The cavity has lateral dimensions such that the cavity is capable of receiving a block for holding an array of optical fibers intended to be optically coupled to the couplers.

    OPTO-MECHANICAL TRANSDUCER APPARATUS AND CORRESPONDING METHOD
    20.
    发明申请
    OPTO-MECHANICAL TRANSDUCER APPARATUS AND CORRESPONDING METHOD 有权

    公开(公告)号：US20210382332A1

    公开(公告)日：2021-12-09

    申请号：US17326955

    申请日：2021-05-21

    Applicant: STMicroelectronics S.r.l.

    Inventor： Luca Maggi ,  Mark Andrew Shaw

    IPC: G02F1/01 ,  H01L41/053

    Abstract: An embodiment apparatus comprises an optically transparent substrate having first and second surfaces; a piezoelectric membrane, arranged at the first surface, that oscillates in response to a light beam propagated through the substrate; at least one reflective facet facing the substrate and arranged at the piezoelectric membrane; and an optical element receiving the light beam at an input end and guiding the light beam towards an output end coupled to the second surface. The optical element incorporates a light focusing path focusing the light beam at a focal point at the piezoelectric membrane, and at least one light collimating path collimating the light beam onto the at least one reflective facet. The optical element guides light reflected from the at least one reflective facet to the input end, the reflected light indicating a position of the optical element with respect to the focal point.

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