公开(公告)号：EP3407492A1

公开(公告)日：2018-11-28

申请号：EP18172940.1

申请日：2018-05-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

IPC: H03H9/24 ,  H03H9/02

Abstract: A MEMS resonator (10) is equipped with a substrate (13); a moving structure (12) suspended above the substrate in a horizontal plane (xy) formed by a first (x) and a second (y) axis, having a first (12a) and a second (12b) arm, parallel to one another and extending along the second axis, coupled at their respective ends by a first (14a) and a second (14b) transverse joining element, forming an internal window (15); a first electrode structure (20), positioned outside the window, capacitively coupled to the moving structure; a second electrode structure (21), positioned inside the window, one of the first and second electrode structures causing an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other of the first and second electrode structures having a function of detecting the oscillation; a suspension structure (16) having a suspension arm (17) in the window; and an attachment arrangement (18), coupled to the suspension element centrally in the window, near the second electrode structure.

公开(公告)号：EP3312559A1

公开(公告)日：2018-04-25

申请号：EP17177405.2

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  FALORNI, Luca Giuseppe ,  COMI, Claudia ,  ZEGA, Valentina

IPC: G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope (10), having two mobile masses (11A, 11B); a first and a second driving body (31A, 31B) coupled to the mobile masses (11A, 11B) through elastic elements (41A, 41B) rigid in a first direction (X) and compliant in a second direction transverse to the first direction (Y); and a third and a fourth driving body (32A, 32B) coupled to the mobile masses through elastic elements (42A, 42B) rigid in the second direction and compliant in the first direction (X). A first and a second driving element (59A) are coupled to the first and second driving bodies (31A, 31B) for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element (63A) are coupled to the third and fourth driving bodies (32A, 32B) for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element (68A) is coupled to the first and second mobile masses for causing a translation in a third direction (Z), in phase opposition. Movement-sensing electrodes (60A, 64A, 69A) generate frequency signals as a function of external angular velocities.

Abstract translation: 一种频率调制MEMS三轴陀螺仪（10），具有两个移动质量块（11A，11B）; 第一和第二驱动体（31A，31B），其通过在第一方向（X）上刚性且在横向于第一方向（X）的第二方向上柔性的弹性元件（41A，41B） Y）; 以及通过在第二方向上刚性且在第一方向（X）上柔性的弹性元件（42A，42B）联接到移动质量块的第三和第四驱动体（32A，32B）。 第一和第二驱动元件（59A）联接到第一和第二驱动体（31A，31B），用于使可动质量块在第一方向上反相平移。 第三和第四驱动元件（63A）联接到第三和第四驱动体（32A，32B），用于使可动质量块在第二方向上平移并且反相。 平面外驱动元件（68A）联接到第一和第二可动质量块上，用于在第三方向（Z）上进行反相的平移。 运动感测电极（60A，64A，69A）产生作为外部角速度的函数的频率信号。

公开(公告)号：EP3156804A1

公开(公告)日：2017-04-19

申请号：EP16193820.4

申请日：2016-10-13

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  GUERINONI, Luca

IPC: G01P15/125 ,  B81B3/00 ,  G01C19/5755 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0072 ,  G01C19/5755 ,  G01P1/00 ,  G01P2015/0814

Abstract: A MEMS sensor device (41) provided with a sensing structure (20), having: a substrate (2) with a top surface (2a) extending in a horizontal plane (xy); an inertial mass (30), suspended over the substrate (2); elastic coupling elements (32), elastically connected to the inertial mass (30) so as to enable inertial movement thereof with respect to the substrate (2) as a function of a quantity to be detected along a sensing axis (x) belonging to the horizontal plane (xy); and sensing electrodes (35a, 35b), capacitively coupled to the inertial mass (30) so as to form at least one sensing capacitor (C 1 , C 2 ), a value of capacitance of which is indicative of the quantity to be detected. The sensing structure (20) moreover has a suspension structure (21), to which the sensing electrodes (35a, 35b) are rigidly coupled, and to which the inertial mass (30) is elastically coupled through the elastic coupling elements (32); the suspension structure (21) is connected to an anchorage structure (23), fixed with respect to the substrate (2), by means of elastic suspension elements (28).

Abstract translation: 具有感测结构（20）的MEMS传感器装置（41）具有：具有在水平面（xy）中延伸的顶表面（2a）的基底（2）; 悬浮在基底（2）上的惯性块（30）; 弹性连接元件（32），其弹性地连接到惯性块（30），以便能够沿着属于所述基座（2）的感测轴（x）沿着要检测的量的函数来相对于所述基板（2）的惯性运动 水平面（xy）; 以及感测电极（35a，35b），其电容耦合到所述惯性块（30），以形成至少一个感测电容器（C 1，C 2），其电容值指示要检测的量。 感测结构（20）还具有一个悬置结构（21），感测电极（35a，35b）刚性连接到该悬挂结构上，并且惯性块（30）通过弹性联接元件（32）弹性联接到该悬挂结构上。 悬挂结构（21）通过弹性悬挂元件（28）连接到相对于基板（2）固定的锚固结构（23）。

公开(公告)号：EP3680671A1

公开(公告)日：2020-07-15

申请号：EP19220232.3

申请日：2019-12-31

Applicant: STMicroelectronics S.r.l.

Inventor： RIZZINI, Francesco ,  TOCCHIO, Alessandro

IPC: G01P15/125 ,  B81B5/00 ,  G01C19/5712 ,  G01P15/08

Abstract: A MEMS device (50; 150) with teeter-totter structure includes a mobile mass (51; 151) having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis (A) extending parallel to the plane and formed by a first and by a second half-masses (54, 55) arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid (B1, B2), respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings (60) are formed in the first half-mass (54) and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings (61) are formed in the second half-mass (55) and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1 x b1 = p2 x b2.

公开(公告)号：EP3407492B1

公开(公告)日：2020-03-11

申请号：EP18172940.1

申请日：2018-05-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

IPC: H03H9/24 ,  H03H9/02

公开(公告)号：EP3477852A1

公开(公告)日：2019-05-01

申请号：EP18203883.6

申请日：2018-10-31

Applicant: STMicroelectronics S.r.l.

Inventor： VALZASINA, Carlo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  LANGFELDER, Giacomo

IPC: H03B5/04 ,  H03B5/30 ,  H03L1/02 ,  G01R23/09 ,  H03H3/00

Abstract: A MEMS resonator system (20) has a micromechanical resonant structure (22) and an electronic processing circuit (24), which has: a first resonant loop (24a), which excites a first vibrational mode of the structure and generates a first signal (S(f ΔT,1 )) at a first resonance frequency (f ΔT,1 ); and a compensation module (32), which compensates, as a function of a measurement of temperature variation (ΔT), a first variation (Δf 1 ) of the first resonance frequency caused by the temperature variation so as to generate a clock signal (CLK) at a desired frequency that is stable in regard to temperature. The electronic processing circuit further has: a second resonant loop (24b), which excites a second vibrational mode of the structure and generates a second signal (S(f ΔT,2 )) at a second resonance frequency (f ΔT,2 ); and a temperature-sensing module (30), which receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and of a second variation (Δf 2 ) of the second resonance frequency caused by the same temperature variation.

公开(公告)号：EP3226008A1

公开(公告)日：2017-10-04

申请号：EP17162576.7

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo

IPC: G01P15/125

CPC classification number: G01P1/006 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0834

Abstract: The accelerometric sensor has a suspended region (21), mobile with respect to a supporting structure (24), and a sensing assembly (37) coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region (21) has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region (21) is formed by a first region (22) rotatably anchored to the supporting structure (24) and by a second region (23) coupled to the first region (22) through elastic connection elements (25) configured to allow a relative movement of the second region (23) with respect to the first region (22). A driving assembly (40) is coupled to the second region (23) so as to control the relative movement of the latter with respect to the first region.

Abstract translation: 加速度传感器具有相对于支撑结构（24）可移动的悬置区域（21）以及耦合到悬置区域且被配置为检测悬置区域相对于支撑结构的移动的感测组件（37） 。 悬挂区域（21）在与相互不同的各个质心相关联的至少两个配置之间具有几何变量。 悬挂区域（21）由可旋转地锚定到支撑结构（24）的第一区域（22）和通过弹性连接元件（25）连接到第一区域（22）的第二区域（23）形成，所述弹性连接元件 第二区域（23）相对于第一区域（22）的相对运动。 驱动组件（40）联接到第二区域（23），以便控制后者相对于第一区域的相对运动。

公开(公告)号：EP3450992B1

公开(公告)日：2020-04-01

申请号：EP18188857.9

申请日：2018-08-14

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

IPC: G01P15/097 ,  G01P15/18

公开(公告)号：EP3346281B1

公开(公告)日：2019-10-09

申请号：EP17172105.3

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

IPC: G01R33/00

公开(公告)号：EP3318882B1

公开(公告)日：2019-07-31

申请号：EP17177420.1

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco

IPC: G01P15/125 ,  G01P15/18