公开(公告)号：EP3975273A1

公开(公告)日：2022-03-30

申请号：EP21199247.4

申请日：2021-09-27

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  MARTINI, Irene ,  ASSANELLI, Davide ,  FERRARINI, Paolo ,  PRELINI, Carlo Luigi ,  QUAGLIA, Fabio

IPC: H01L41/08 ,  H01L41/09 ,  H01L41/319 ,  B06B1/06

Abstract: A piezoelectric microelectromechanical structure (10), provided with a piezoelectric layer structure (11) having a main extension in a horizontal plane (xy) and a variable cross-section in a plane (xz) transverse to the horizontal plane, comprises a bottom electrode (12), a piezoelectric material (14) constituted by a PZT film arranged on the bottom electrode, and a top electrode (16) arranged on the piezoelectric material, wherein the piezoelectric material has a first thickness (w1) along a vertical axis (z) at a first area (14') and a second thickness (w2) along the vertical axis (z) at a second area (14"), the second thickness being smaller than the first thickness. A corresponding manufacturing process is also disclosed.

公开(公告)号：EP3907178A1

公开(公告)日：2021-11-10

申请号：EP21171642.8

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  PRELINI, Carlo Luigi ,  FERRERA, Marco ,  LAZZARI, Carla Maria ,  SEGHIZZI, Luca ,  BONI, Nicolò ,  CARMINATI, Roberto ,  QUAGLIA, Fabio

IPC: B81B7/00

Abstract: The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

公开(公告)号：EP3907177A1

公开(公告)日：2021-11-10

申请号：EP21171635.2

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  FERRERA, Marco ,  PRELINI, Carlo Luigi

IPC: B81B3/00 ,  H01L41/09 ,  H04R17/00 ,  H04R7/18

Abstract: The MEMS actuator (50) is formed by a body (51), which surrounds a cavity (52) and by a deformable structure (54), which is suspended on the cavity and is formed by a movable portion (56) and by a plurality of deformable elements (55). The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator (50) further comprises at least one plurality of actuation structures (80A, 80B), which are supported by the deformable elements (55) and are configured to cause a translation of the movable portion greater than the deformation of each deformable element (55). The actuation structures each have a respective first piezoelectric region (82).