公开(公告)号：EP4187258A1

公开(公告)日：2023-05-31

申请号：EP22206006.3

申请日：2022-11-08

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  RIZZINI, Francesco ,  DALL'OGLIO, Cristian

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical sensor device has a detection structure (10), having: a substrate (13), with a top surface (13a); an inertial mass (12), suspended above the top surface (13a) of the substrate (13) and elastically coupled to a rotor anchor (15) so as to perform an inertial movement relative to the substrate (13) as a function of a quantity to be detected; and stator electrodes (18a, 18b), integrally coupled to the substrate (13) at respective stator anchors (19a, 19b) and capacitively coupled to the inertial mass (12) so as to generate a differential capacitive variation in response to, and indicative of, the quantity to be detected. In particular, the inertial mass (12) performs, as the inertial movement, a translation movement along a vertical axis (z) orthogonal to the top surface (13a) of the substrate (13); and the stator electrodes (18a, 18b) are arranged in a suspended manner above the top surface (13a) of the substrate (13).

公开(公告)号：EP3882640A1

公开(公告)日：2021-09-22

申请号：EP21162249.3

申请日：2021-03-12

Applicant: STMicroelectronics S.r.l.

Inventor： RIZZINI, Francesco ,  GATTERE, Gabriele ,  ZERBINI, Sarah

IPC: G01P15/08 ,  G01P15/18 ,  B81B3/00 ,  G01C19/5733 ,  G01P15/125

Abstract: A MEMS inertial sensor including: a supporting structure; an inertial structure, which includes at least one inertial mass; an elastic structure, which is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction; and a stopper structure, fixed with respect to the supporting structure and including at least one primary stopper element and one secondary stopper element . If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：EP3450992B1

公开(公告)日：2020-04-01

申请号：EP18188857.9

申请日：2018-08-14

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

IPC: G01P15/097 ,  G01P15/18

公开(公告)号：EP3318882B1

公开(公告)日：2019-07-31

申请号：EP17177420.1

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco

IPC: G01P15/125 ,  G01P15/18

公开(公告)号：EP4321876A1

公开(公告)日：2024-02-14

申请号：EP23185740.0

申请日：2023-07-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  DARMANIN, Jean Marie ,  RIZZINI, Francesco

IPC: G01P15/125 ,  G01P21/00 ,  G01P15/08 ,  B81B3/00

Abstract: A microelectromechanical sensor device having a sensing structure (1) with: a substrate (2); an inertial mass (3), suspended above the substrate (2) and elastically coupled to a rotor anchoring structure (6) by elastic coupling elements (8), to perform at least one inertial movement due to a quantity to be sensed; first sensing electrodes (9), integrally coupled to the inertial mass (3) to be movable due to the inertial movement; and second sensing electrodes (12), fixed with respect to the quantity to be sensed, facing and capacitively coupled to the first sensing electrodes (9) to form sensing capacitances having a value that is indicative of the quantity to be sensed. The second sensing electrodes (12) are arranged in a suspended manner above the substrate (2) and a compensation structure (20) is configured to move the second sensing electrodes (12) with respect to the first sensing electrodes (9) and vary a facing distance thereof, in the absence of the quantity to be sensed, in order to compensate for a native offset of the sensing structure (1).

公开(公告)号：EP3882580A1

公开(公告)日：2021-09-22

申请号：EP21163189.0

申请日：2021-03-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  RIZZINI, Francesco ,  GUERINONI, Luca ,  CORSO, Lorenzo ,  GIUSTI, Domenico

IPC: G01F1/84

Abstract: A method for manufacturing a Coriolis-force-based flow sensing device (1), comprising the steps of: forming a driving electrode (6b; 6c); forming, on the driving electrode (6b; 6c), a first sacrificial region (21); forming, on the first sacrificial region, a first structural portion with a second sacrificial region (28) buried therein; forming openings for selectively etching the second sacrificial region (28); forming, within the openings, a porous layer (34) having pores; removing the second sacrificial region (28) through the pores of the porous layer, forming a buried channel (4); growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body (5); selectively removing the first sacrificial region (21) thus suspending the structural body on the driving electrode.

公开(公告)号：EP3872451A1

公开(公告)日：2021-09-01

申请号：EP21159287.8

申请日：2021-02-25

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  RIZZINI, Francesco

IPC: G01C9/00 ,  G01P15/02 ,  G01P15/125 ,  G01C9/06

Abstract: A MEMS inclinometer including a substrate (21), a first mobile mass (23) and a sensing unit (22,28A-28D,32A-32D, 24A-24D,27A-27B,29A-29B), which includes: a second mobile mass (22); a number of elastic elements (28A-28D), which are interposed between the second mobile mass and the substrate and are compliant in a direction parallel to a first axis (Y); a number of elastic structures (32A-32D), each of which is interposed between the first and second mobile masses and is compliant in a direction parallel to the first axis (Y) and to a second axis (Z); a fixed electrode (29A) fixed with respect to the substrate and a mobile electrode (27A) fixed with respect to the second mobile mass, which form a variable capacitor (31A). Each elastic structure includes a respective elongated structure (32A-32D), which in resting conditions extends in a direction parallel to a third axis (X) and, in a plane parallel to a plane (ZY) containing the first and second axes (Y, Z), has main axes of inertia (I 1 , I 2 ) transverse with respect to the first and second axes (Y, Z) in such a way that movements of the first mobile mass in a direction parallel to the second axis cause corresponding movements of the second mobile mass in a direction parallel to the first axis.

公开(公告)号：EP3680671A1

公开(公告)日：2020-07-15

申请号：EP19220232.3

申请日：2019-12-31

Applicant: STMicroelectronics S.r.l.

Inventor： RIZZINI, Francesco ,  TOCCHIO, Alessandro

IPC: G01P15/125 ,  B81B5/00 ,  G01C19/5712 ,  G01P15/08

Abstract: A MEMS device (50; 150) with teeter-totter structure includes a mobile mass (51; 151) having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis (A) extending parallel to the plane and formed by a first and by a second half-masses (54, 55) arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid (B1, B2), respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings (60) are formed in the first half-mass (54) and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings (61) are formed in the second half-mass (55) and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1 x b1 = p2 x b2.

公开(公告)号：EP3226008A1

公开(公告)日：2017-10-04

申请号：EP17162576.7

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo

IPC: G01P15/125

CPC classification number: G01P1/006 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0834

Abstract: The accelerometric sensor has a suspended region (21), mobile with respect to a supporting structure (24), and a sensing assembly (37) coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region (21) has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region (21) is formed by a first region (22) rotatably anchored to the supporting structure (24) and by a second region (23) coupled to the first region (22) through elastic connection elements (25) configured to allow a relative movement of the second region (23) with respect to the first region (22). A driving assembly (40) is coupled to the second region (23) so as to control the relative movement of the latter with respect to the first region.

Abstract translation: 加速度传感器具有相对于支撑结构（24）可移动的悬置区域（21）以及耦合到悬置区域且被配置为检测悬置区域相对于支撑结构的移动的感测组件（37） 。 悬挂区域（21）在与相互不同的各个质心相关联的至少两个配置之间具有几何变量。 悬挂区域（21）由可旋转地锚定到支撑结构（24）的第一区域（22）和通过弹性连接元件（25）连接到第一区域（22）的第二区域（23）形成，所述弹性连接元件 第二区域（23）相对于第一区域（22）的相对运动。 驱动组件（40）联接到第二区域（23），以便控制后者相对于第一区域的相对运动。