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11.发明公开QUARTZ GLASS CRUCIBLE AND MANUFACTURING METHOD THEREFOR 审中-公开QUARZGLASTIEGEL UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP3088572A4
公开(公告)日：2017-07-26
申请号：EP14873978
申请日：2014-12-25
Applicant: SUMCO CORP
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA KEN , KITAHARA ERIKO
CPC classification number: C30B15/10 , C03B19/095 , C30B29/06 , C30B35/002 , Y02P40/57
Abstract: Provided is a vitreous silica crucible suppressing deformation under high temperature, and a method for manufacturing the same. A vitreous silica crucible 1 includes a cylindrical straight body portion 10a, a corner portion 10c formed at lower end of the straight body portion 10a, and a bottom portion 10b connected with the straight body portion 10a via the corner portion 10c. Moreover, the vitreous silica crucible 1 includes a bubble-containing opaque layer 11 constituting an outer layer, and a bubble-free transparent layer 12 constituting an inner layer. A boundary surface, between the opaque layer 11 and the transparent layer 12 in at least the straight body portion 10a, forms a periodic wave surface in a vertical direction.
Abstract translation: 本发明提供抑制高温下变形的氧化硅玻璃坩埚及其制造方法。 氧化硅玻璃坩埚1具有圆筒状的直体部10a，形成于直体部10a的下端的角部10c以及经由角部10c与直体部10a连接的底部10b。 此外，氧化硅玻璃坩埚1具备构成外层的含气泡不透明层11和构成内层的无气泡透明层12。 至少在直体部分10a中的不透明层11和透明层12之间的边界表面在垂直方向上形成周期性波面。
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公开(公告)号：EP3018236A4
公开(公告)日：2017-06-21
申请号：EP13888681
申请日：2013-06-30
Applicant: SUMCO CORP
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA KEN , KITAHARA ERIKO
CPC classification number: C30B29/06 , C03B19/095 , C30B15/10 , Y02P40/57
Abstract: A vitreous silica crucible, comprising a substantially cylindrical straight body portion having an opening on top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is larger than that of the bottom portion, wherein, an inner surface of the crucible has a concavo-convex structure in which a groove-shaped valley is interposed between ridges, and an average interval of the ridges is 5 - 100 µm.
Abstract translation: 本发明提供一种氧化硅玻璃坩埚，其特征在于，具有：在上端开口且沿上下方向延伸的大致圆筒状的直体部;弯曲的底部;以及连结直体部与底部的角部，其曲率大 其中，所述坩埚的内表面具有凹凸结构，在所述凹凸结构中，在所述凸起之间插入有凹槽状凹部，所述凸部的平均间隔为5〜100μm。
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13.发明公开DEVICE FOR ASSISTING WITH SETTING OF MANUFACTURING CONDITIONS FOR SILICA GLASS CRUCIBLE, DEVICE FOR ASSISTING WITH SETTING OF MANUFACTURING CONDITIONS FOR MOLD FOR MANUFACTURING SILICA GLASS CRUCIBLE, DEVICE FOR ASSISTING WITH CONDITION SETTING FOR RAISING MONOCRYSTALLINE SILICON USING SILICA GLASS CRUCIBLE 审中-公开DEVICE FOR配套生产条件的调整中的一个石英玻璃坩埚设备用于支持表单生产条件的调整用于制造石英玻璃坩埚装置用于支撑所述调整条件用于提升单晶硅使用该石英玻璃坩埚
公开(公告)号：EP2799598A4
公开(公告)日：2016-01-27
申请号：EP12863396
申请日：2012-10-31
Applicant: SUMCO CORP
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA ERIKO , TOBITA SHUJI , SUZUKI KOICHI
CPC classification number: G06F17/50 , B01L3/04 , C03B19/095 , C30B15/10 , C30B29/06 , G06F17/5009 , G06F2217/12 , G06F2217/16 , Y02P90/265
Abstract: A vitreous silica crucible is manufactured by rotational molding in such a manner that the three-dimensional shape thereof matches design data to a high degree. If the degree of matching between three-dimensional shapes of simulation data obtained based on initial property parameters and measurement data falls below a predetermined level, improved property parameters are set such that the degree of matching becomes higher than or equal to the predetermined level. If the degree of matching between three-dimensional shapes of simulation data obtained based on initial manufacturing conditions and the measurement data falls below a predetermined level, improved manufacturing conditions are set such that simulation data matching design data to a degree higher than or equal to the predetermined level is obtained. As a result, the degree of matching between the three-dimensional shapes of the design data and measurement data of the vitreous silica crucible can be enhanced to the predetermined level or higher. That is, it is possible to manufacture a vitreous silica crucible by rotational molding in such a manner that the three-dimensional shape thereof matches the design data to a high degree.
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14.发明公开METHOD FOR EVALUATING SILICA GLASS CRUCIBLE, METHOD FOR PRODUCING SILICON SINGLE CRYSTALS 审中-公开FOR石英玻璃坩埚的评估和工艺方法用于硅单晶
公开(公告)号：EP2796595A4
公开(公告)日：2015-07-29
申请号：EP12859405
申请日：2012-10-31
Applicant: SUMCO CORP
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA KEN , KITAHARA ERIKO , KODAMA MAKIKO
CPC classification number: C30B15/26 , C30B15/10 , C30B29/06 , G01B11/005 , G01B11/06 , G01B11/24 , G01B11/245 , G01J3/42 , G01J5/58
Abstract: The present invention provides a method for evaluating a vitreous silica crucible which can measure a three-dimensional shape of the inner surface of the crucible in a non-destructive manner. According to the present invention, A method for evaluating a vitreous silica crucible, including the steps of: moving an internal ranging section along an inner surface of the vitreous silica crucible in a contactless manner; measuring a distance between the internal ranging section and the inner surface as a distance from the inner surface, by subjecting the inner surface of the crucible to irradiation with laser light and then detecting a reflected light from the inner surface, the laser light being emitted from the internal ranging section in an oblique direction with respect to the inner surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the internal ranging section; and obtaining a three-dimensional shape of the inner surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the inner surface, is provided.
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公开(公告)号：JP2015091758A
公开(公告)日：2015-05-14
申请号：JP2015021939
申请日：2015-02-06
Applicant: SUMCO CORP
Inventor： SUDO TOSHIAKI , SUZUKI ERIKO
Abstract: 【課題】内表面の状態(ルツボ内表面特性)などが適切に制御されたシリカガラスルツボを製造する。【解決手段】回転するモールド10内で、シリカ粉末からなるシリカ粉層11を複数本の炭素電極13によるアーク放電で加熱熔融し、シリカガラスルツボを製造する方法であって、上記シリカ粉層11の複数箇所について、加熱熔融時における最適熔融温度を予め求めておく予備工程と、上記複数箇所の加熱熔融時の実温度を測定する温度測定工程と、上記最適熔融温度になるように、上記複数箇所の上記実温度を制御する温度制御工程とを有するシリカガラスルツボの製造方法。【選択図】図1
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Patent Agency Ranking
公开(公告)号：JP2014091640A
公开(公告)日：2014-05-19
申请号：JP2012241406
申请日：2012-10-31
Applicant: Sumco Corp , 株式会社Sumco
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA MASARU , KITAHARA ERIKO
Abstract: PROBLEM TO BE SOLVED: To provide an evaluation method of a silica glass crucible that can specify a three-dimensional position of a foreign matter present on an inner surface of or in a wall of a crucible, or can determine three-dimensional distribution of strain of the crucible.SOLUTION: An evaluation method of a silica glass crucible includes a step of radiating a laser beam in the oblique direction from an inside measuring section 17 to the inner surface of a crucible 11 and correlating an inner surface distance measured by detecting the reflection light between the inside measuring section 17 and the inner surface with a three-dimensional coordinate of each measuring point to obtain a three-dimensional configuration of the inner surface of the crucible, and further includes at least one step of (1) a step of specifying a three-dimensional position of the foreign matter by changing a focal position of the crucible 11 in the thickness direction at a location where an image is obtained to obtain a plurality of images, when the foreign matter is determined to be present in the obtained image at the measuring point, and (2) a step of determining of a three-dimensional distribution of strain by obtaining a strain image at a plurality of the measuring points.
Abstract translation: 要解决的问题：提供可以指定存在于坩埚的内表面或其壁的异物的三维位置的石英玻璃坩埚的评价方法，或者可以确定应变的三维分布 解决方案：石英玻璃坩埚的评价方法包括从内侧测量部17向坩埚11的内表面沿倾斜方向照射激光的步骤，并且通过检测坩埚11测量的内表面距离相关联 在内侧测量部分17和内表面之间具有每个测量点的三维坐标的反射光，以获得坩埚内表面的三维构型，还包括以下步骤：（1）步骤 通过在获得图像的位置处改变坩埚11的厚度方向的焦点位置来指定异物的三维位置 以获得多个图像，当确定在测量点处获得的图像中存在异物时，以及（2）通过获得多个应变图像来确定应变的三维分布的步骤 的测量点。
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17.发明专利
公开(公告)号：JP2008040545A
公开(公告)日：2008-02-21
申请号：JP2006210031
申请日：2006-08-01
Applicant: Sumco Corp , 株式会社Sumco
Inventor： SUDO TOSHIAKI
Abstract: PROBLEM TO BE SOLVED: To provide an electronic information management system which can unitarily manage information when many organizations deal with many kinds of information at the same time. SOLUTION: A system 1 for managing intellectual property-related electronic information manages intellectual property-related information, which is used in an organization body comprising a plurality of organizations, as the electronic data. In addition, the models of descriptions of multiple kinds of invention, which are prepared in accordance with technical fields of proposed invention, are stored in a proposed-invention table 122. A management server 11 directly or indirectly extracts the models of the descriptions of the invention, which are stored in the proposed-invention table 122, according to instructions from an invention organization terminal computer 13 and displays them on the invention organization terminal computer. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：提供一种电子信息管理系统，其可以在许多组织同时处理多种信息的情况下统一管理信息。 解决方案：用于管理与知识产权相关的电子信息的系统1管理用于包括多个组织的组织机构中的知识产权相关信息作为电子数据。 此外，根据所提出的发明的技术领域制备的多种发明的描述的模型被存储在提出的发明表122中。管理服务器11直接或间接地提取关于 发明，其根据来自发明组织终端计算机13的指令存储在所提出的发明表122中，并将其显示在本发明的组织终端计算机上。 版权所有（C）2008，JPO＆INPIT
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18.发明专利
公开(公告)号：JP2013139352A
公开(公告)日：2013-07-18
申请号：JP2011290375
申请日：2011-12-29
Applicant: Sumco Corp , 株式会社Sumco
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA MASARU , OHARA MAMI
Abstract: PROBLEM TO BE SOLVED: To provide a silica glass crucible producible by an easy method and suppressing melt level vibration.SOLUTION: The silica glass crucible includes: a straight body extending in the vertical direction and having an approximately cylindrical shape; a curved bottom; and a corner part connecting smoothly the straight body and the bottom. The inner surface of the crucible has a fine uneven structure.
Abstract translation: 要解决的问题：提供一种易于制造并抑制熔融水平振动的二氧化硅玻璃坩埚。解决方案：二氧化硅玻璃坩埚包括：在垂直方向上延伸并具有大致圆筒形状的直体; 一个弯曲的底部; 以及将直体和底部平滑连接的角部。 坩埚的内表面具有细小的不均匀结构。
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公开(公告)号：JP2013139353A
公开(公告)日：2013-07-18
申请号：JP2011290380
申请日：2011-12-29
Applicant: Sumco Corp , 株式会社Sumco
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA MASARU , OHARA MAMI
Abstract: PROBLEM TO BE SOLVED: To provide a method for inspecting an abnormal site such as a brown ring in a silica glass crucible.SOLUTION: The method for inspecting an abnormal site includes a determination process for determining whether an abnormal site is generated or not on a measurement point based on the spectrum obtained by measuring at least one of the IR spectrum and the Raman spectrum at the measurement point on the inner surface of the silica glass. The determination on the IR spectrum measurement is performed in accordance with the presence or absence of a peak between wavenumbers of 1,080 cmand 1,100 cmor the presence or absence of a peak between wavenumbers of 1,150 and 1,250 cm. Also the determination in the Raman spectrum measurement is performed in accordance with the presence or absence of a peak between wavenumbers of 500 and 550 cm.
Abstract translation: 要解决的问题：提供一种在石英玻璃坩埚中检查诸如棕色环的异常部位的方法。解决方案：用于检查异常部位的方法包括用于确定异常部位是否产生的确定处理 基于通过测量石英玻璃的内表面上的测量点处的IR光谱和拉曼光谱中的至少一个而获得的光谱的测量点。 红外光谱测定的确定是根据1080cm -1和1100cm波长之间峰值的存在或不存在，或者在1,150和1,250cm波数之间是否存在峰。 此外，拉曼光谱测量中的测定根据是否存在500和550cm波数之间的峰值而进行。
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公开(公告)号：JP2017081822A
公开(公告)日：2017-05-18
申请号：JP2017018186
申请日：2017-02-03
Applicant: 株式会社Sumco , Sumco Corp , 株式会社Sumco
Inventor： SUDO TOSHIAKI , SATO TADAHIRO , KITAHARA KEN , KITAHARA ERIKO
CPC classification number: C30B15/10 , C03B19/095 , C30B29/06 , C30B35/002 , Y02P40/57
Abstract: 【課題】高温下での変形が抑制された石英ガラスルツボを提供すること。【解決手段】本発明の一態様に係る石英ガラスルツボは、円筒状の直胴部と、直胴部の下端に形成されたコーナー部と、コーナー部を介して直胴部に接続された底部とを有する石英ガラスルツボであって、ルツボの外層を構成する気泡を内包する不透明層と、ルツボの内層を構成する気泡が除去された透明層とを備え、少なくとも直胴部における不透明層と透明層との境界面には、直胴部の上下方向に進行する周期的な波面が形成され、透明層側からみて横縞模様の変化パターンが形成されていることを特徴とする。【選択図】図2
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