WATER JET PROPULSION SYSTEM
    11.
    发明专利

    公开(公告)号:JPH092386A

    公开(公告)日:1997-01-07

    申请号:JP18205595

    申请日:1995-06-26

    Abstract: PURPOSE: To provide a water jet propulsion system capable of changing the sectional area of an opening of an injection nozzle itself by a simple structure, improving the propulsive force and the fuel consumption, and reducing the cost. CONSTITUTION: In a water jet propulsion device in which a propeller 13 rotated by a propeller shaft 12 and a jet nozzle 15 are provided on a water sucking duct 11, water is sucked from the end part of the duct 11, and water is accelerated by the propeller 13, and ejected from the jet nozzle to propel a ship, an opening sectional area changing means 16 Is provided in which the sectional area of an opening of the jet nozzle 15 is increase when the ship speed is low, while the sectional area is reduced when the ship speed is high.

    FORGING PRESS
    12.
    发明专利

    公开(公告)号:JPH03118936A

    公开(公告)日:1991-05-21

    申请号:JP25555089

    申请日:1989-09-30

    Inventor: SATO YASUMASA

    Abstract: PURPOSE:To continuously forge with the last spurt at a high speed and with high accuracy on the way of forming by causing to flow back and forth the hydraulic oil through the fixed delivery pump into the forming plunger which moves the die and supplying further the hydraulic oil in the last spurt through the hydraulic oil volume adjusting apparatus. CONSTITUTION:The forming cylinder 3 to hold the die are arranged in opposition and the above hydraulic oil room 9 and pull back hydraulic room 6 are connected respectively to the power generator 10 of the fixed delivery pumps and the pressurized air source 31. By going back and forth the hydraulic oil to the above hydraulic oil room 9 through the power generator 10 and going back and forth the die 5 to the arrow mark A. B directions together with the piston, the work 29 which was positioned through the manipulator 30 in its midway is forged. On the above hydraulic system forging press, the last spurt work is executed by supplying the hydraulic oil of the prescribed set same volume to each piping 27, 28 of the hydraulic oil circuit from the power generator 10 to the forming cylinder 3 through the hydraulic oil volume adjusting apparatus 20. Therefore, the forging press with universal applicability which executes the die positioning and the continuous last spurt of pressing at a high speed and with high accuracy is obtained.

    STATIC PRESSURE BEARING, METHOD OF MANUFACTURING IT, AND NON-CONTACT GUIDE DEVICE USING IT

    公开(公告)号:JP2002039180A

    公开(公告)日:2002-02-06

    申请号:JP2000222211

    申请日:2000-07-24

    Abstract: PROBLEM TO BE SOLVED: To provide a static pressure bearing capable of increasing the rigidity and accuracy of a stage device which moves with high speed and accuracy inside a vacuum chamber. SOLUTION: The static pressure bearing 1 has a bearing surface 1a with a compressed air outlet, and an exhaust groove 2 for collecting compressed air spit out of the outlet is formed around the bearing surface. Further, an evacuation groove 3 is formed around the exhaust groove. In particular, the size of clearance between the bearing surface and a supporting surface 4a is greater than the size of clearance among a first surface 1c between the exhaust groove and the evacuation groove, a second surface 1d located outside of the evacuation groove, and the supporting surface.

    WAFER TRANSFER HAND AND WAFER TRANSFER METHOD USING THE SAME

    公开(公告)号:JP2000260858A

    公开(公告)日:2000-09-22

    申请号:JP6590699

    申请日:1999-03-12

    Abstract: PROBLEM TO BE SOLVED: To suppress increase in an installation area for a manufacturing device due to larger diameter of a wafer and to allow transportation of a wafer in vertical attitude, by using a wafer carrier hand comprising a plurality of V-like grooves which support the edge part on the down side of circumference of a wafer in vertical attitude. SOLUTION: A transfer handle 20 comprises one fixing claw 24 which is fixed to a plate-like frame 22 directly below a wafer 10 and comprises a V-like groove of almost the same radius as the wafer 10. Two movable claws 26 are provided which comprises a V-like groove of almost the same radius as the wafer 10 and provided to the frame 22 through a gripping actuator 28 at upper two points of the wafer 10. The three claws of the carrier handle 20 grip the wafer 10 and move horizontally in vertical attitude. Since the wafer 10 is held from above and below using movable claws 26, the wafer 10 is surely gripped. Thus, the transportation of a wafer in vertical attitude, including transfer between robots, is allowed even in vacuum.

    GLASS FORMING MACHINE
    15.
    发明专利

    公开(公告)号:JP2000044257A

    公开(公告)日:2000-02-15

    申请号:JP21673698

    申请日:1998-07-31

    Abstract: PROBLEM TO BE SOLVED: To improve the reproducibility of the heat up time and temp. distribution of a metal mold device. SOLUTION: This glass forming machine has a first core, a second core which freely movably disposed to face this first core, a mold 13 which encloses the first and second cores, a heating device 40 which heats the first and second cores, a pressurizing device 60 which applies pressurizing force to the second core and a mold clamping device 50 which clamps the mold 13 by applying mold clamping force thereto. The mold clamping is applied to the mold 13 and mold clamping is executed while at least the first and second cores are heated and, therefore, the occurrence of variation in the heat transfer quantity between the metal mold device 10 and the device body in each respective forming shots at the time of heating is prevented.

    VARIABLE PITCH PROPELLER DEVICE FOR OUTBOARD MOTOR FOR SMALL HIGH SPEED SHIP

    公开(公告)号:JPH072177A

    公开(公告)日:1995-01-06

    申请号:JP24731393

    申请日:1993-09-09

    Abstract: PURPOSE:To reduce size and weight, to simplify operation, and to increase a response speed by a method wherein a variable pitch propeller device for an outboard motor for a small high speed ship comprises a rack engaged with a pinion and a rack operating means to reciprocate the rack, and through operation of the rack operating means, the pitch angle of a propeller is varied. CONSTITUTION:When a rack 46 is operated by means of a rack operating means and an adjust screw 37 is rotated by means of a pinion 45 engaged with the rack 46, a screw part 37A is joined in a screwed-in state with a fixed nut 42, whereby the adjust screw 37 is reciprocated through rotation. Thereby, a control rod 35 coupled to an adjust screw 37 through a bearing 36 is reciprocated. A link 39 coupled through a pin 38 is pulled and closed and a propeller 40 is rotated around a rotary shaft 41 through an eccentric pin 43 coupled to the link 39. This constitution changes the pitch angle of the propeller 40.

    STAGE DEVICE
    17.
    发明专利

    公开(公告)号:JP2002107479A

    公开(公告)日:2002-04-10

    申请号:JP2000298564

    申请日:2000-09-29

    Abstract: PROBLEM TO BE SOLVED: To provide a stage device capable of miniaturizing a vacuum chamber by minimizing a driving mechanism-related part in the vacuum chamber. SOLUTION: An X guide mechanism and a Y guide mechanism capable of moving movable rods 1X and 1Y in the X direction and the Y direction are respectively arranged in mutually opposed two pairs of positions on the outside adjacent to the side surface of the vacuum chamber 10. An X actuator and a Y actuator for driving the movable rods in the X axis direction and the Y axis direction are respectively arranged in the X guide mechanism and the Y guide mechanism. The X guide mechanism and the Y guide mechanism respectively house a central part of the movable rods 1X and 1Y in an airtight state, and have vacuum chamber introducing chambers 6X and 6Y communicating with the vacuum chamber 10, and a stage and the movable rods 1X and 1Y are connected by a common X connecting a shaft member at a right angle to the X axis direction and a Y connecting shaft member at a right angle to the Y axis direction via the communicating part.

    METHOD AND APPARATUS FOR CLEANING WAFER

    公开(公告)号:JP2000252249A

    公开(公告)日:2000-09-14

    申请号:JP5638699

    申请日:1999-03-04

    Abstract: PROBLEM TO BE SOLVED: To clean not only the surface of a wafer but also the rear surface thereof simultaneously in same degree without prolonging the cleaning time by arranging tubes each arranged with nozzles for cleaning the rear surface around the wafer including the lower symmetrical position and spraying cleaning fluid slightly upward in the horizontal direction. SOLUTION: Tubes 2 each arranged with nozzles 3 for cleaning the rear surface are arranged around a wafer 10 including the lower symmetrical position and cleaning fluid 4 is sprayed slightly upward in the horizontal direction thus cleaning the surface 10F and the rear surface 10R of the wafer simultaneously. A process hand disposed in a cleaning chamber enables to spray the cleaning fluid over the entire surface and rear surface of the wafer when both sides of the wafer are cleaned. In the cleaning chamber, two tubes 2 are arranged with nozzles 3 at a substantially constant interval allowing passage of the wafer and the process hand in order to spray the cleaning fluid toward the lower part of the wafer passing between the tubes.

    METAL MOLD FOR GLASS FORMING
    19.
    发明专利

    公开(公告)号:JP2000044261A

    公开(公告)日:2000-02-15

    申请号:JP21673798

    申请日:1998-07-31

    Abstract: PROBLEM TO BE SOLVED: To simplify work and to reduce the cost of glass formed parts without requiring the execution of additional processing after the forming is finished. SOLUTION: This metal mold has a first die, a second die which is disposed freely movably with respect to this first die, a pressurizing means which pressurizes a glass blank 16 disposed between the first die and the second die with prescribed pressing force by pressing the second die to the first die and a regulating means 14 which presses the peripheral edge of the glass blank and regulate the spreading of the glass blank in a plane direction. The second die is moved and is pressed to the first die, by which the glass blank disposed between the first die and the second die is pressurized with prescribed pressing force and the glass formed parts may be obtd.

    DOUBLE ARM EXPANSION ROBOT
    20.
    发明专利

    公开(公告)号:JPH08257973A

    公开(公告)日:1996-10-08

    申请号:JP8883695

    申请日:1995-03-22

    Abstract: PURPOSE: To provide a robot having high rigidity and accuracy and capable of having a wide operating range by providing a pair of arms that can be raised and lowered and be rotated around bases as a fulcrum, while providing flexible knuckles in the middles of the arms, and enabling a holding device to move in a straight line by the bending motion of the pair of arms. CONSTITUTION: Upper and lower end plates 2 are rotatably journalled to the upper and lower parts of a C-shaped frame 1 and are connected together by two rotatable front spline shafts 8, 9 and a fixed ball spring shaft. When one spline shaft 8 is rotated by the drive of an arm-turning motor, the other spline shaft 9 is rotated in the direction opposite to the rotation of the spline shaft 8 via an interlocking gear 22, a pair of intermediate interlocking gears 24, 25, and an interlocking gear 23. A pair of arms 14, 15 splined to the spline shafts 8, 9 are therefore rotated in opposite directions and, as the arms 14, 15 are bent at knuckles 45 in their middles, they cause mounting flanges 41 at the arm ends to move back and forth in a straight line.

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