公开(公告)号：EP1825490B1

公开(公告)日：2015-01-21

申请号：EP05817517.5

申请日：2005-12-12

Applicant: THALES

Inventor： LEGAGNEUX, Pierre ,  GANGLOFF, Laurent ,  MINOUX, Eric ,  SCHNELL, Jean-Philippe ,  ANDRE, Frédéric ,  DIEUMEGARD, Dominique

IPC: H01J1/34 ,  H01J1/304 ,  H01J23/04

CPC classification number: H01J1/304 ,  B82Y10/00 ,  H01J1/34 ,  H01J23/04 ,  H01J2201/304 ,  H01J2201/30469 ,  H01J2223/04

公开(公告)号：EP3238225A1

公开(公告)日：2017-11-01

申请号：EP15820149.1

申请日：2015-12-22

Applicant: THALES

Inventor： MAZELLIER, Jean-Paul ,  LEGAGNEUX, Pierre ,  GANGLOFF, Laurent ,  ANDRIANIAZY, Florian ,  PONARD, Pascal

IPC: H01J1/304 ,  H01J35/06

CPC classification number: H01J1/304 ,  H01J35/065 ,  H01J2235/062 ,  H01J2235/068

Abstract: A high-energy switchable electron source controlled by a current source (SCCO) in which: • the switchable cathode comprises at least one field-effect transmitter (105) and one screening electrode (111) located in or under a plane P comprising the conductive surface located under the foot of the transmitter (105), • an input terminal (132) of the SCCO (120) disposed outside the vacuum chamber is linked to the HV power supply and to the screening electrode (111), • an output terminal (131) of the SCCO is linked to the base electrode between the transmitter (105) and the substrate. • The high voltage power supply (103) delivers a potential for creating an anode field for inducing the transmission from the transmitter (105), • the output potential (131) being greater than or equal to the input potential (132), the screening electrode (111) is capable of reducing the electric field induced by the anode (106) on the transmitter (105) such that the current transmitted by the transmitter is equal to the current delivered by the SCCO.

Abstract translation: 一种由电流源（SCCO）控制的高能量可切换电子源，其中：·可切换阴极包括至少一个场效应发射器（105）和位于平面P之中或之下的一个屏蔽电极（111），该平面P包括导电 位于发射器（105）的脚下方的表面，·设置在真空室外部的SCCO（120）的输入端子（132）连接到HV电源和屏蔽电极（111），·输出端子 （SCCO）的基极（131）连接到发射器（105）和基板之间的基极。 ·高电压电源（103）提供产生用于引发来自发射器（105）的传输的阳极场的电势，·输出电势（131）大于或等于输入电势（132），筛选 电极（111）能够减小由发射器（105）上的阳极（106）感应的电场，使得由发射器发射的电流等于由SCCO发射的电流。