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    FLOWMETER
    13.
    发明专利
    FLOWMETER 失效

    公开(公告)号：JPS61280576A

    公开(公告)日：1986-12-11

    申请号：JP12053785

    申请日：1985-06-05

    Applicant: TORAY INDUSTRIES

    Inventor： YAMAZAKI CHIKAYASU ,  NAKAYAMA TAKAO ,  MAEDA YOSHIICHI

    IPC: G01P5/10 ,  G01P13/00

    Abstract: PURPOSE:To measure the speed of a fluid with high accuracy, by determining not only a flow speed by the energy taken from a heat generating element by a fluid but also a flow direction on the basis of the output difference of the temp. detection elements at symmetric positions to the heat generating element. CONSTITUTION:The temp. of the fluid flowing through a sensor part 9 is detected by a thermocouple 7 and power supplied to the heat generating element 2 on a silicon substrate 1 is controlled through a signal processing circuit 8 and a temp. control circuit 5 so that the detected temp. comes to constant temp. higher than that of the fluid and, from the energy taken by the fluid, the circuit 8 calculates the flow speed having correlation with said energy. The detection temps. of temp. detection elements 3, 4 such as transistors provided at symmetric positions to the element 2 on the substrate 1 are compared by a comparators 6 and the circuit 8 determines the flow direction of the fluid corresponding to the polarity of the compared result. By the constitution such that the flow speed is not determined from the detection outputs of the elements 3, 4 having the irregularity in characteristics but determined from the energy supplied to the single element 2, therefore, the highly accurate speed of the fluid reduced in an error is detected along with the accurate direction thereof.

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