Apparatus for steering the arc in a cathodic arc coater

    公开(公告)号:SG67547A1

    公开(公告)日:1999-09-21

    申请号:SG1998003318

    申请日:1998-08-27

    Abstract: An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, a disk-shaped cathode, a platter for supporting the substrate, apparatus for maintaining a vacuum in the vessel, and apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode. The disk-shaped cathode has a first end surface, a second end surface, and an evaporative surface extending between the first and second end surfaces, and the cathode is mounted on a pedestal positioned inside the vessel. The platter has a slot for receiving the pedestal, thereby enabling the platter to be movable into and out of the vessel.

    Cathodic arc vapor deposition apparatus (annular cathode)

    公开(公告)号:SG67548A1

    公开(公告)日:1999-09-21

    申请号:SG1998003324

    申请日:1998-08-27

    Abstract: According to the present invention, an apparatus (10) for applying material by cathodic arc vapor deposition to a substrate (12) is provided which includes a vessel (14), apparatus (16) for maintaining a vacuum in the vessel, an annular cathode (18) having a bore (46) and an evaporative surface (44) extending between first (40) and second (42) end surfaces, apparatus (24) for selectively sustaining an arc of electrical energy between the cathode and a anode, and apparatus for driving the arc around the evaporative surface. The apparatus for driving the arc is positioned within the cathode bore, and produces a magnetic field that runs substantially parallel to the evaporative surface. The annular cathode is disposed radially inside of, and aligned with, the substrates inside the vessel.

    16.
    发明专利
    未知

    公开(公告)号:DE69103203T2

    公开(公告)日:1995-05-04

    申请号:DE69103203

    申请日:1991-05-14

    Abstract: A shield (2) restricts the circulation of a metal bearing gas around the platform surface (8) of a turbine blade (1) so that the gas deposits a thinner coating on the platform surface (8) than on the airfoil surface (6), whereby the coating is thick enough to provide desired corrosion and oxidation resistant properties for the airfoil surface (6), but is thin enough to prevent the platform surface (8), where stress forces are greatest, from becoming too brittle. The shield (12) may be modified to cover only the high pressure side of the platform surface (8).

    17.
    发明专利
    未知

    公开(公告)号:DE69103203D1

    公开(公告)日:1994-09-08

    申请号:DE69103203

    申请日:1991-05-14

    Abstract: A shield (2) restricts the circulation of a metal bearing gas around the platform surface (8) of a turbine blade (1) so that the gas deposits a thinner coating on the platform surface (8) than on the airfoil surface (6), whereby the coating is thick enough to provide desired corrosion and oxidation resistant properties for the airfoil surface (6), but is thin enough to prevent the platform surface (8), where stress forces are greatest, from becoming too brittle. The shield (12) may be modified to cover only the high pressure side of the platform surface (8).

    20.
    发明专利
    未知

    公开(公告)号:DE69832016T2

    公开(公告)日:2006-07-13

    申请号:DE69832016

    申请日:1998-08-28

    Abstract: A vapor deposition production system (10) for coating substrates (12) is provided which includes a plurality of vapor deposition coaters (14), a plurality of platters (16), a platter docking station (18), a shuttle track (20), and apparatus for transporting the platters between the coaters and the platter docking station. The shuttle track connects the platter docking station and the coaters. Platters selectively removed from the coaters are transported along the shuttle track to the platter docking station where processed substrates are unloaded from the platters and unprocessed substrates loaded on to the platters.

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