Abstract:
According to one aspect, the subject matter described herein includes a tunable duplexer. The tunable duplexer can include a common node (N) for communicating signals comprising a plurality of frequencies. Further, the tunable duplexer can include first and second band nodes (BN1,BN2) for communicating first and second predetermined frequency bands, respectively, of the plurality of frequencies. The tunable duplexer can also include a filter coupled between the common node and the first and second band nodes. The filter can include pole-zero elements (100,200,300,400) adapted to pass signals of the first and second predetermined frequency bands to the first and second band nodes, respectively. Further, the filter can be adapted to block signals of the first and second predetermined frequency band to the second and first band nodes, respectively.
Abstract:
The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.
Abstract:
Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.