SYSTEMS, DEVICES, AND METHODS FOR REDUCING SURFACE DIELECTRIC CHARGING IN A RF MEMS ACTUATOR ELEMENT

    公开(公告)号:EP3127133A4

    公开(公告)日:2017-11-29

    申请号:EP15773541

    申请日:2015-04-01

    Applicant: WISPRY INC

    Abstract: The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.

    METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS
    13.
    发明公开
    METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS 有权
    VERFAHREN UND EINRICHTUNGEN ZUR HERSTELLUNG VON DREISCHICHT-STRAHLEN

    公开(公告)号:EP2183782A4

    公开(公告)日:2014-08-06

    申请号:EP08782281

    申请日:2008-07-23

    Applicant: WISPRY INC

    Abstract: Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.

    Abstract translation: 提供了用于制造三层梁的方法和装置。 特别地,公开了可以通过至少绝缘层,第一金属层,光束氧化物层,第二金属层和绝缘平衡层的沉积和图案化来用于制造多层结构的方法和结构。

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