公开(公告)号：EP3201123A4

公开(公告)日：2018-05-23

申请号：EP15846735

申请日：2015-10-05

Applicant: WISPRY INC

Inventor： DEREUS DANA ,  MORRIS ARTHUR S ,  MOLINERO-GILES DAVID

IPC: B81B7/02 ,  B81B5/00 ,  B81C1/00

CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

Abstract: The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

公开(公告)号：EP3127133A4

公开(公告)日：2017-11-29

申请号：EP15773541

申请日：2015-04-01

Applicant: WISPRY INC

Inventor： MOLINERO-GILES DAVID ,  CUNNINGHAM SHAWN J ,  DEREUS DANA

IPC: H01H59/00 ,  B81B3/00

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B2203/04 ,  H01H49/00 ,  H01H2059/0018 ,  H01H2059/0072

Abstract: The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.