公开(公告)号：US09363610B2

公开(公告)日：2016-06-07

申请号：US14452067

申请日：2014-08-05

Applicant: Wolfson Microelectronics plc

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

IPC: H01L29/84 ,  H04R23/00 ,  B81B3/00 ,  H04R19/04 ,  H01L27/00 ,  H04R19/00 ,  H04R31/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二背部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

公开(公告)号：US20150137502A1

公开(公告)日：2015-05-21

申请号：US14404117

申请日：2013-05-31

Applicant: President and Fellows of Harvard College

Inventor： Joanna Aizenberg ,  Tak Sing Wong ,  Sung Hoon Kang ,  Ximin He

IPC: B42D25/351 ,  B42D25/29 ,  B42D25/23 ,  B81B3/00

CPC classification number: B42D25/351 ,  B32B27/08 ,  B42D25/00 ,  B42D25/23 ,  B42D25/24 ,  B42D25/29 ,  B42D25/324 ,  B42D25/342 ,  B42D2033/30 ,  B42D2035/20 ,  B42D2035/24 ,  B42D2035/34 ,  B81B3/0083 ,  B81B2201/00 ,  G02B5/1828 ,  G07D7/003

Abstract: A document and an Anti-counterfeiting method for use in such documents are described. Said document and Anti-counterfeiting method include introducing a plurality of raised nanoscopic to microscopic structures, here referred to as reconfigurable structures, formed over a polymer substrate to induce optical changes, such as structural color and/or optical fuzziness. Dynamic changes using liquids provide the anti-counterfeiting measures.

Abstract translation: 描述了用于这些文件的文件和防伪方法。 所述文件和防伪方法包括将多个凸起的纳米尺寸引入到在聚合物基底上形成的微结构（这里称为可重构结构）以引起光学变化，例如结构颜色​​和/或光学模糊性。 使用液体的动态变化提供防伪措施。

公开(公告)号：US20130256816A1

公开(公告)日：2013-10-03

申请号：US13902344

申请日：2013-05-24

Applicant: Wolfson Microelectronics plc

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

IPC: B81B3/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二背部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

公开(公告)号：US09432090B2

公开(公告)日：2016-08-30

申请号：US13888301

申请日：2013-05-06

Applicant: Lockheed Martin Corporation

Inventor： Li Leah Wang

IPC: H01F27/42 ,  H04B5/00 ,  B81B7/00

CPC classification number: H04B5/0037 ,  B81B7/00 ,  B81B2201/00 ,  H04B5/0087

Abstract: Various aspects of the subject technology include a wireless power transmission design based on extended range near-field resonance coupling induction, where magnetic near-field range may be extended by several orders of magnitude. One element that may help to accomplish the near-field extension, in one aspect, is the addition of a transformational magnetic lens to the transmitter. The magnetic lens may be made of metamaterials with refractive index of for example, −1. It may recover and collimate the near-field evanescent, magnetic flux, effectively extending the near-field coupling distance by several orders of magnitude.

Abstract translation: 主题技术的各个方面包括基于扩展范围近场共振耦合感应的无线电力传输设计，其中磁场近场范围可以扩展几个数量级。 在一个方面，可以帮助实现近场延伸的一个元件是向变送器添加变换磁性透镜。 磁性透镜可以由折射率为例如-1的超材料制成。 它可以恢复和准直近场ev逝，磁通量，有效地将近场耦合距离延伸几个数量级。

公开(公告)号：US20140341402A1

公开(公告)日：2014-11-20

申请号：US14452067

申请日：2014-08-05

Applicant: Wolfson Microelectronics plc

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

IPC: H04R23/00 ,  B81B3/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二背部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

公开(公告)号：US20140305777A1

公开(公告)日：2014-10-16

申请号：US14314344

申请日：2014-06-25

Applicant: General Electric Company

Inventor： Marco Francesco Aimi ,  Dan Kenrick Spence

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B7/008 ,  B81B2201/00 ,  H01H2059/0018

Abstract: A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.

Abstract translation: 一种系统包括多个彼此耦合的包括多个门的微机电开关。 每个微机电开关包括设置在基板上的束电极。 梁包括联接到梁电极的锚固部分。 梁包括从锚固部分沿着第一方向延伸的第一梁部分; 以及从所述锚固部分沿着与所述第一方向相反的第二方向延伸的第二梁部分。 第一控制电极和第一接触电极设置在基板上，面对第​​一光束部分。 第二控制电极和第二接触电极设置在基板上，面对第​​二光束部分。 第一控制电极和第二控制电极被耦合以在多个栅极之间形成栅极。 多个微电子机械开关被布置成串联布置，平行布置中的至少一个。

公开(公告)号：US08546170B2

公开(公告)日：2013-10-01

申请号：US12673925

申请日：2008-08-15

Applicant: Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

IPC: H01L21/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底（3）上形成膜（5），并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分（7a）和第二后部体积部分（7b）的步骤，第一后部体积部分（7a）与第二后部体积部分 后体积部分（7b）通过后体积的侧壁中的台阶。 第二后部容积部分（7b）的横截面面积可以大于膜（5）的横截面面积，从而能够增加后部体积而不受横截面积的约束 的膜（5）。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

公开(公告)号：EP2972417A4

公开(公告)日：2016-08-10

申请号：EP14768229

申请日：2014-03-13

Applicant: INVENSENSE INC

Inventor： SEEGER JOSEPH ,  QIU JIN ,  THOMPSON MATTHEW JULIAN

IPC: G01P15/08

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.

Abstract translation: 一种MEMS装置，包括第一检测质量体，部分地设置在第一检验质量块的表面上的第一磁化磁性材料，锚固到基板以支撑第一检测质量块的第一弹簧，以及耦合到第一检测质量块的第一感测元件 并且可操作以感测由环境加速度引起的第一检验质量块的运动。 MEMS器件还包括耦合到第一检测质量块的第二感测元件，并可操作以感测由环境磁场引起的第一检验质量块的运动。

公开(公告)号：EP2972417A1

公开(公告)日：2016-01-20

申请号：EP14768229.8

申请日：2014-03-13

Applicant: InvenSense, Inc.

Inventor： SEEGER, Joseph ,  QIU, Jin ,  THOMPSON, Matthew, Julian

IPC: G01P15/08

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.

Abstract translation: 一种MEMS装置，包括第一检测质量，部分地设置在第一检测质量的表面上的第一磁化磁性材料，锚定到基板以支撑第一检测质量的第一弹簧以及联接到第一检测质量的第一检测元件 并且可操作以感测由环境加速引起的第一检测质量的运动。 该MEMS设备还包括第二传感元件，该第二传感元件联接到第一检测质量块并且可操作以检测由环境磁场引起的第一检测质量块的运动

公开(公告)号：EP2972417B1

公开(公告)日：2018-05-02

申请号：EP14768229.8

申请日：2014-03-13

Applicant: InvenSense, Inc.

Inventor： SEEGER, Joseph ,  QIU, Jin ,  THOMPSON, Matthew, Julian

IPC: G01P15/08

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.