-
公开(公告)号:US20050073380A1
公开(公告)日:2005-04-07
申请号:US10363243
申请日:2001-09-12
Applicant: Larry Howell , Scott Lyon , Brent Weight , Deanne Clements
Inventor: Larry Howell , Scott Lyon , Brent Weight , Deanne Clements
CPC classification number: B81B3/0062 , B81B3/0054 , B81B2201/037 , B81B2203/051 , B81B2203/053 , H01F2007/068 , H01H1/0036 , H01H61/04 , H01H2001/0042 , H01H2001/0047 , H01H2001/0078 , H01H2061/006
Abstract: An apparatus (1) that is capable of a first stable configuration and a second stable configuration is disclosed. The bistable mechanism (10) has a leg (30, 32) that is coupled on one end by a base member (22, 24) and on the other end by a shuttle (20). The leg (30, 32) stores potential energy as it is deflected. The potential energy stored in the leg (30, 32) has a maximum potential energy position with a low potential energy position on either side of the maximum. An apparatus and method are also disclosed for a latching mechanism (910) and the associated method. The latching mechanism (910) is comprised of a grasping member (932), a lock slider (928), and a detent slider (916). These three members (916, 928, 932) operate together to induce a locked configuration and an unlocked configuration by actuating the lock slider (928) in a single direction.
Abstract translation: 公开了能够实现第一稳定配置和第二稳定配置的设备(1)。 双稳态机构(10)具有腿部(30,32),其一端由基部构件(22,24)联接,另一端由梭子(20)联接。 腿部(30,32)在其偏转时存储势能。 存储在腿部(30,32)中的势能具有在最大值两侧具有低势能位置的最大势能位置。 还公开了一种用于锁定机构(910)和相关方法的装置和方法。 锁定机构(910)包括把持件(932),锁定滑块(928)和制动滑块(916)。 这三个构件(916,928,932)通过一致地驱动锁定滑块(928)而一起操作以引起锁定构型和解锁构造。
-
公开(公告)号:EP0518112B1
公开(公告)日:1997-04-02
申请号:EP92108797.9
申请日:1992-05-25
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor: Ueda, Minoru, c/o Osaka Works of Sumitomo , Iiyama, Michitomo, c/o Osaka Works of Sumitomo
CPC classification number: B81C1/00198 , B81B2201/034 , B81B2201/035 , B81B2201/037 , B81B2203/056 , C04B41/009 , C04B41/53 , C04B41/91 , C23C16/408 , G03F7/00 , Y10S505/785 , C04B35/45 , C04B35/584
-
公开(公告)号:EP0592094A3
公开(公告)日:1994-10-12
申请号:EP93306702.7
申请日:1993-08-24
Applicant: International Business Machines Corporation
Inventor: Fan, Long-Shen , Zappe, Hans Helmut
CPC classification number: G03F7/11 , B81B2201/035 , B81B2201/037 , B81C99/0085 , G03F7/00 , H02N1/008
Abstract: In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 µm thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer 58 of material and patterning the sacrificial layer to define a shape. A photoresist layer 62 of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mould. Upon the mould there is plated a metallic layer 68 of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mould and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 µm thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.
-
公开(公告)号:US09156674B2
公开(公告)日:2015-10-13
申请号:US11757341
申请日:2007-06-01
Applicant: Harold Stalford
Inventor: Harold Stalford
CPC classification number: B81B3/0024 , B81B2201/032 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02N1/008
Abstract: A micro transport machine may include a substrate and a movable device comprising a drive component responsive to a wireless power source. The movable device is operable to move between a plurality of disparate areas on the substrate.
Abstract translation: 微型运输机器可以包括基板和可移动装置,其包括响应于无线电源的驱动部件。 可移动装置可操作以在基板上的多个不同区域之间移动。
-
公开(公告)号:US08939645B2
公开(公告)日:2015-01-27
申请号:US13647218
申请日:2012-10-08
Applicant: Harold L. Stalford
Inventor: Harold L. Stalford
CPC classification number: B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49647 , Y10T29/49696
Abstract: A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain.
Abstract translation: 微驱动组件可以包括基板,与基板成平面定向的微轴和至少一个微轴承以支撑微轴的旋转。 微轴和微型轴承可以在微米范围内或更小。
-
公开(公告)号:US08933596B2
公开(公告)日:2015-01-13
申请号:US13448039
申请日:2012-04-16
Applicant: Harold Stalford
Inventor: Harold Stalford
CPC classification number: H02N10/00 , B81B3/0024 , B81B2201/031 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02K7/00 , H02N1/002 , H02N11/006
Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴,并且可由微型致动器旋转。 微型工具联接到微型轴,并且可操作以响应于微型轴的运动而执行工作。
-
公开(公告)号:US20080087478A1
公开(公告)日:2008-04-17
申请号:US11757341
申请日:2007-06-01
Applicant: Harold Stalford
Inventor: Harold Stalford
IPC: B60K1/00
CPC classification number: B81B3/0024 , B81B2201/032 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02N1/008
Abstract: A micro transport machine may include a substrate and a movable device comprising a drive component responsive to a wireless power source. The movable device is operable to move between a plurality of disparate areas on the substrate.
Abstract translation: 微型运输机器可以包括基板和可移动装置,其包括响应于无线电源的驱动部件。 可移动装置可操作以在基板上的多个不同区域之间移动。
-
18.
公开(公告)号:US5364742A
公开(公告)日:1994-11-15
申请号:US948189
申请日:1992-09-21
Applicant: Long-Shen Fan , Hans H. Zappe
Inventor: Long-Shen Fan , Hans H. Zappe
IPC: C23C28/00 , B81B5/00 , B81C99/00 , G03F7/00 , G03F7/11 , G03F7/26 , H01L21/306 , H02N1/00 , G03C5/00 , B44C1/22
CPC classification number: G03F7/11 , B81C99/0085 , G03F7/00 , H02N1/008 , B81B2201/035 , B81B2201/037
Abstract: In the fabrication of a free-standing miniaturized structure in a range of about 10 to 20 .mu.m thick, a method based on a sacrificial system includes the steps of selecting a substrate material, depositing on the substrate material a sacrificial layer of material and patterning the sacrificial layer to define a shape. A photoresist layer of material is deposited on the sacrificial layer and patterned by contrast-enhanced photolithography to form a photoresist mold. Upon the mold there is plated a metallic layer of material. The electroplated structure conforms to the resist profile and can have a thickness many times that of conventional polysilicon microstructures. The photoresist mold and the sacrificial layer are thereafter dissolved using etchants to form a free standing metallic structure in a range of about 10 to 20 .mu.m thick, with vertical to lateral aspect ratios of 9:1 to 10:1 or more.
Abstract translation: 在制造大约10至20μm厚的独立小型化结构的过程中,基于牺牲系统的方法包括以下步骤:选择衬底材料,在衬底材料上沉积材料的牺牲层和图案化 牺牲层来定义一个形状。 材料的光致抗蚀剂层沉积在牺牲层上并通过对比度增强的光刻法形成光致抗蚀剂模具。 在模具上镀有金属层材料。 电镀结构符合抗蚀剂轮廓,并且其厚度可以是常规多晶硅微结构的厚度。 然后,使用蚀刻剂溶解光致抗蚀剂模具和牺牲层,以形成约10至20μm厚的独立金属结构,垂直与横向纵横比为9:1至10:1或更高。
-
公开(公告)号:US20180031602A1
公开(公告)日:2018-02-01
申请号:US15221566
申请日:2016-07-27
Applicant: Lumedyne Technologies Incorporated
Inventor: Xiaojun Huang , Ozan Anac , Richard Lee Waters
IPC: G01P15/13 , G01C19/5719
CPC classification number: G01P15/13 , B81B3/0051 , B81B2201/0235 , B81B2201/0242 , B81B2201/037 , B81B2203/056 , B81C1/00246 , G01C19/5712 , G01C19/5719 , G01C19/5726 , G01P15/097 , G01P15/125 , G01P2015/0817 , G01P2015/082 , G01P2015/0837
Abstract: System and methods are disclosed herein for converting rotational motion to linear motion. A system comprising a rotational drive can be connected to a proof mass by a first structure comprising a coupling spring. An anchor can be connected to the proof mass by a second structure comprising a drive spring. The coupling spring and the drive spring can be configured to cause the proof mass to move substantially along a first axis when the rotational drive rotates about a second axis.
-
公开(公告)号:US20130044969A1
公开(公告)日:2013-02-21
申请号:US13647218
申请日:2012-10-08
Applicant: Harold L. Stalford
Inventor: Harold L. Stalford
IPC: F16C32/00
CPC classification number: B81B3/0059 , B81B2201/037 , B81B2203/06 , Y10T29/49647 , Y10T29/49696
Abstract: A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain.
Abstract translation: 微驱动组件可以包括基板,与基板成平面定向的微轴和至少一个微轴承以支撑微轴的旋转。 微轴和微型轴承可以在微米范围内或更小。
-
-
-
-
-
-
-
-
-