公开(公告)号：US20150362373A1

公开(公告)日：2015-12-17

申请号：US14302934

申请日：2014-06-12

Applicant: International Business Machines Corporation

Inventor： Nicholas G. Clore ,  Kendra A. Lyons ,  Andrew H. Norfleet ,  Jared P. Yanofsky

IPC: G01J5/08 ,  G01J5/02 ,  H01L33/06

CPC classification number: G01J5/0878 ,  G01J5/0007 ,  G01J5/025 ,  G01J2005/0085 ,  G01J2005/283 ,  H01L22/12 ,  H01L22/20 ,  H01L22/34

Abstract: According to embodiments of the present invention, a semiconductor substrate is formed on at least a portion of a surface of a semiconductor substrate. The emitting layer is excited for a first predetermined time period. A first luminescent intensity value of the emitting layer is determined. In response to exposing the semiconductor substrate and the emitting layer to a condition for a second predetermined time period, a second luminescent intensity value of the emitting layer is determined. A thermal profile of at least the portion of the surface of the semiconductor substrate is determined utilizing the first luminescent intensity value and the second luminescent intensity value of the emitting layer. The thermal profile at least reflects information about one or more of the condition and the semiconductor substrate subsequent to exposure to the condition.

Abstract translation: 根据本发明的实施例，在半导体衬底的表面的至少一部分上形成半导体衬底。 发光层被激发第一预定时间段。 确定发光层的第一发光强度值。 响应于将半导体衬底和发光层暴露于第二预定时间段的条件，确定发光层的第二发光强度值。 使用发光层的第一发光强度值和第二发光强度值来确定至少半导体衬底的表面部分的热分布。 热分布至少反映在暴露于该条件之后关于条件和半导体衬底中的一个或多个的信息。

公开(公告)号：US5298752A

公开(公告)日：1994-03-29

申请号：US953058

申请日：1992-09-30

Applicant: Ralph H. Wight

Inventor： Ralph H. Wight

IPC: G01J5/06 ,  G01J5/28

CPC classification number: G01J5/06 ,  G01J2005/065 ,  G01J2005/283

Abstract: A thermal or infrared imaging system having an optical barrel, an external stop formed by a mirror, a dewar, a cold shield, a focal plane array, and multiple retroreflectors. The cold shield and focal plane array are located inside the dewar. The mirror directs desired light bundles at the focal plane array. The retroreflectors are attached to the inside of the optical barrel. The retroreflectors are arranged such that the retroreflectors exist in all lines of sight of the focal plane array, except those lines of sight associated with the external stop. Consequently, the retroreflectors do not interfere with the desired light bundles which are focused onto the focal plane array. However, all light outside of that which is focused is prevented from reaching the focal plane array by the retroreflectors. The retroreflectors are infrared retroreflectors arranged in a matrix. Each of the retroreflectors is a "concave" corner cube having low emissivity reflecting facets. The corner cubes reflect incoming rays by 180 degrees relative to input angles of the incoming rays. Thus, the focal plane array sees only cold outside of the desired light bundles.

Abstract translation: 具有光学镜筒，由镜子形成的外部止挡件，杜瓦瓶，冷屏蔽罩，焦平面阵列和多个后向反射器的热或红外成像系统。 冷屏和焦平面阵列位于杜瓦内。 镜子在焦平面阵列处引导所需的光束。 后向反射器附着在光学镜筒的内部。 后向反射器被布置成使得后向反射器存在于焦平面阵列的所有视线中，除了与外部停止相关联的视线外。 因此，后向反射器不会干扰聚焦在焦平面阵列上的期望的光束。 然而，被聚焦的所有光都被防反射器抵达焦平面阵列。 后向反射器是布置在矩阵中的红外后向反射器。 每个后向反射器是具有低发射率反射面的“凹”角立方体。 角落立方体将入射光线相对于入射光线的输入角反射180度。 因此，焦平面阵列仅在期望的光束外部看到冷。

公开(公告)号：US5091646A

公开(公告)日：1992-02-25

申请号：US529933

申请日：1990-05-29

Applicant: William H. Taylor

Inventor： William H. Taylor

IPC: G01J5/48 ,  G01J5/06 ,  G01J5/08 ,  G01J5/28 ,  H04N3/09 ,  H04N5/232 ,  H04N5/33

CPC classification number: G01J5/08 ,  G01J5/061 ,  G01J5/0806 ,  H04N3/09 ,  H04N5/33 ,  G01J2005/065 ,  G01J2005/283

Abstract: A totally integrated thermal imaging system has a dewar housing including imaging optics, a scanning mirror and a curved detector array. The imaging optics constitute a meniscus lens and a spherical focusing mirror. The scanning mirror scans the image, and the spherical mirror focuses the scanned image onto the detector array. The meniscus lens advantageously corrects aberrations. A detector support provides access for cryogenic cooling of the detector, and individual cold shielding of the detector elements is made possible by the telecentricity of the optics. Processing electronics, at least a portion of which may also be disposed on the detector support, process the detector signals to display an image. The integrated structure advantageously eliminates any need for separate scanner, imager, detector dewar and electronics modules.

公开(公告)号：US4862002A

公开(公告)日：1989-08-29

申请号：US200245

申请日：1988-05-31

Applicant: Samuel C. Wang ,  David N. Ludington

Inventor： Samuel C. Wang ,  David N. Ludington

IPC: G01J5/06 ,  G01J5/28 ,  H01L31/024 ,  H04N5/33

CPC classification number: G01J5/28 ,  H01L31/024 ,  H04N5/33 ,  G01J2005/283 ,  G01J5/061

Abstract: The invention relates to a multiple channel readout circuit optimized for a cryogenically operated IR sensor head. The circuit is applicable to the individual channel preamplifiers of a charge injection device (CID) IR sensor. Since the thermal leakage must be minimized, the voltages on the principal current supply path to the individual preamplifiers will vary when a strong signal is present on any channel. Crosstalk is avoided by using a four transistor cascode preamplifier circuit having a source follower output, in which the gate of the transistor, which acts as a load to the two cascoded transistors, is isolated from the drain of the load transistor, connected to a gate load node common to the other channels, and the node connected via a single connection of high thermal impedance to a terminal external to the cryogenic environment, at which filtering may be provided as needed.

Abstract translation: 本发明涉及针对低温操作的红外传感器头优化的多通道读出电路。 该电路适用于电荷注入装置（CID）IR传感器的各个通道前置放大器。 由于热泄漏必须最小化，当任何通道上存在强信号时，各个前置放大器的主电流供应通路上的电压将会发生变化。 通过使用具有源极跟随器输出的四晶体管共源共栅前置放大器电路来避免串扰，其中用作两个级联光电晶体管的负载的晶体管的栅极与连接到栅极的负载晶体管的漏极隔离 其他通道共用的负载节点，以及通过高热阻抗的单个连接连接到低温环境外部的终端的节点，根据需要可以提供过滤。

公开(公告)号：US4827130A

公开(公告)日：1989-05-02

申请号：US111832

申请日：1987-10-22

Applicant: Charles W. Reno

Inventor： Charles W. Reno

IPC: G01J5/08 ,  G01J5/28 ,  G02B13/14 ,  G02B23/12 ,  G01J1/42

CPC classification number: G02B13/22 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/28 ,  G02B13/14 ,  G02B23/12 ,  G01J2005/283

Abstract: An infrared imager includes an array of imager elements. Infrared radiation is focussed onto the array by a lens assembly including a plurality of lens elements. The imager array and the lens are within a cold box which includes an infrared-transparent window. For low noise, a spectrum-limiting filter is also located within the cold box, between the lens assembly and the window, at or within the pupil relief distance of the lens assembly. The pupil relief distance is extended by the use of at least one aspheric surface for one of the lens elements of the lens assembly. The mounting structure of the filter is the aperture stop for the infrared imager. The field of view may be reduced, if desired, without significant effect on the noise performance by use of a telescope including a second lens assembly optically identical to the first lens assembly, operated in conjunction with a confocal large-diameter lens assembly.

Abstract translation: 红外成像仪包括一组成像元件。 通过包括多个透镜元件的透镜组件将红外辐射聚焦到阵列上。 成像器阵列和透镜在包括红外透明窗的冷箱内。 对于低噪声，频谱限制滤波器也位于透镜组件和瞳孔释放距离之间或之内的冷盒中，在透镜组件和窗口之间。 通过使用透镜组件的透镜元件中的一个的至少一个非球面来延长光瞳释放距离。 过滤器的安装结构是红外成像仪的孔径光阑。 如果需要，可以通过使用包括与第一透镜组件光学相同的第二透镜组件的望远镜结合共焦大直径透镜组件来操作，可以减少视场，而不会对噪声性能产生显着影响。

公开(公告)号：JPS59186364A

公开(公告)日：1984-10-23

申请号：JP6175483

申请日：1983-04-07

Applicant: Fujitsu Ltd

Inventor： MIYAMOTO YOSHIHIRO

IPC: H01L27/14 ,  G01J1/04 ,  G01J1/06 ,  G01J5/02 ,  G01J5/06 ,  G01J5/28 ,  H01L31/02 ,  H01L31/0216 ,  H04N1/028 ,  H04N5/33

CPC classification number: G01J5/06 ,  G01J1/02 ,  G01J1/0252 ,  G01J1/0295 ,  G01J1/06 ,  G01J2005/283 ,  H01L31/02164

Abstract: PURPOSE:To contrive dissolution of a shading phenomenon by a method wherein a plurality of light shielding plates are arranged using a specific method of arrangement and intervals on the center line of the direction of arrangement of a light-receiving element array. CONSTITUTION:A cold shield 3 is positioned opposing in the prescribed height to the entire light-receiving element surface of an inflared ray light-receiving element array 1. On the visual field determining aperture part 5 of said shield 3, the X light-shielding partition plate 21 which is positioned vertical to the light- receiving surface of the array 1 and in line with the center line A in arrangement direction of the array 1 and a plurality of Y light-shielding partition plates 22 which are positioned vertical to the light-receiving surface and which is orthogonally intersecting with the partition plates 21 are arranged. By arranging partition plates 21 and 22 as above-mentioned, the angle of visual field of each light-receiving surface 24 of the array 1 can be prescribed uniformly, thereby enabling to lessen the generation of a shading phenomenon.

Abstract translation: 目的：通过一种方法来设计阴影现象的溶解，其中使用特定的布置方式和间隔在光接收元件阵列的排列方向的中心线上布置多个遮光板。 构成：冷屏蔽3与规定的高度相对地设置在充电射线受光元件阵列1的整个光接收元件表面上。在所述屏蔽3的视场确定孔部分5上，X光屏蔽 与阵列1的受光面垂直且与阵列1排列方向的中心线A一致的分隔板21和与该光线垂直的多个Y遮光隔​​板22 布置了与分隔板21正交的接收面。 通过如上所述设置隔板21和22，可以均匀地规定阵列1的每个受光面24的视场角度，从而能够减少阴影现象的产生。

公开(公告)号：US20240192059A1

公开(公告)日：2024-06-13

申请号：US18554076

申请日：2022-05-06

Applicant: trinamiX GmbH

Inventor： Tobias BAUMGARTNER ,  Sourabh KULKARNI ,  Celal Mohan OEGUEN

IPC: G01J5/28 ,  G01J5/06 ,  G01J5/52

CPC classification number: G01J5/28 ,  G01J5/06 ,  G01J5/52 ,  G01J2005/065 ,  G01J2005/283

Abstract: The present invention refers to a device (112) for monitoring an emission temperature of at least one radiation emitting element (114), a heating system (110) for heating at the least one radiation emitting element (114) to emit thermal radiation at an emission temperature, a method for monitoring an emission temperature of at least one radiation emitting element (114) and method for heating the at least one radiation emitting element (114) to emit thermal radiation at an emission temperature. Herein, the device (112) for monitoring an emission temperature of at least one radiation emitting element (114) comprises—at least one light source (125), wherein the light source is configured to emit optical radiation at least partially towards the at least one radiation emitting element (114); —at least one radiation sensitive element (126), wherein the at least one radiation sensitive element (126) has at least one sensor region (128), wherein the at least one sensor region (128) comprises at least one photosensitive material selected from at least one photoconductive material, wherein the at least one sensor region (128) is designated for generating at least one sensor signal depending on an intensity of the thermal radiation emitted by the at least one radiation emitting element (114) and received by the sensor region (128) within at least one wavelength range, wherein the sensor region (128) is further designated for generating at least one further sensor signal depending on an intensity of the optical radiation emitted by the at least one light source (125) and received by the sensor region (128) within at least one further wavelength range, wherein the at least one radiation sensitive element (126) is arranged in a manner that the thermal radiation travels through at least one transition material (116) prior to being received by the at least one radiation sensitive element (126), wherein at least one of the at least one light source (125) and the at least one radiation sensitive element (126) is arranged in a manner that the optical radiation travels through the at least one transition material (116) and impinges the at least one radiation emitting element (114) prior to being received by the at least one radiation sensitive element (126); and—at least one evaluation unit (138), wherein the at least one evaluation unit (138) is configured to determine the emission temperature of the at least one radiation emitting element (114) by using values for the intensity of the thermal radiation and the optical radiation.

公开(公告)号：US20170131148A1

公开(公告)日：2017-05-11

申请号：US15156115

申请日：2016-05-16

Applicant: Massachusetts Institute of Technology ,  Trustees of Boston University

Inventor： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC: G01J5/28 ,  H01L27/146 ,  G01J5/20

CPC classification number: G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

Abstract: An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

公开(公告)号：US20150285687A1

公开(公告)日：2015-10-08

申请号：US14634307

申请日：2015-02-27

Applicant: Massachusetts Institute of Technology ,  Trustees of Boston University

Inventor： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC: G01J5/28 ,  G01J5/20

CPC classification number: G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

Abstract: An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

Abstract translation: 提供一种用于检测目标频率范围内的电磁辐射的装置。 该装置包括衬底和设置在衬底上的一个或多个谐振器结构。 衬底可以是电介质或半导体材料。 一个或多个谐振器结构中的每一个具有小于目标频率范围内的目标电磁辐射的波长的至少一个维度，并且每个谐振器结构都包括由间隔隔开的至少两个导电结构。 当谐振器结构暴露于目标电磁辐射时，电荷载流子在衬底附近被感应。 由于感应的电荷载体导致的衬底的电导率变化的测量提供了目标电磁辐射的存在的指示。

公开(公告)号：US09000376B2

公开(公告)日：2015-04-07

申请号：US13933557

申请日：2013-07-02

Applicant: Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

Inventor： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC: G01J5/02 ,  G01J5/28 ,  G01J5/20 ,  H01L31/09

CPC classification number: G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

Abstract: An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

Abstract translation: 提供一种用于检测目标频率范围内的电磁辐射的装置。 该装置包括衬底和设置在衬底上的一个或多个谐振器结构。 衬底可以是电介质或半导体材料。 一个或多个谐振器结构中的每一个具有小于目标频率范围内的目标电磁辐射的波长的至少一个维度，并且每个谐振器结构都包括由间隔隔开的至少两个导电结构。 当谐振器结构暴露于目标电磁辐射时，电荷载流子在衬底附近被感应。 由于感应的电荷载体导致的衬底的电导率变化的测量提供了目标电磁辐射的存在的指示。