公开(公告)号：US5459571A

公开(公告)日：1995-10-17

申请号：US189931

申请日：1994-02-01

Applicant: Ehrhard Dammann ,  Juergen Bauer

Inventor： Ehrhard Dammann ,  Juergen Bauer

IPC: G01B9/02 ,  G01J1/44 ,  G01J9/02 ,  G01J9/04

CPC classification number: G01B9/02051 ,  G01B9/0201 ,  G01B9/02028 ,  G01B9/02083 ,  G01J9/02 ,  G01B2290/45 ,  G01J2001/4242 ,  G01J2009/0249 ,  G01J9/04

Abstract: A phase-modulated interferometer has improved control and signal processing. Superimposition signals capable of evaluation in a phase-modulated interferometer without a complicated sawtooth control of the phase modulator are attained, in that two sinusoidal control signals which have modulation frequencies (.omega..sub.1, .omega..sub.2) and are rigidly coupled with respect to phase and frequency are applied to the known phase modulator and a cosine signal which is used in a conventional manner for evaluating the phase displacement is filtered of the superimposition signal generated in the interferometer by an electronic bandpass filter. At the filter frequency (.omega..sub.F) of the bandpass filter, an odd-number harmonic and an even-number harmonic of the two modulation frequencies (.omega..sub.1, .omega..sub.2) have the same frequency, when the amplitudes (.phi..sub.1, .phi..sub.2) of the control signals satisfy the condition for the suitable operating point of the phase modulator. The improvement has application to phase-modulated interferometers, in particular, for precision distance measuring devices, preferably by the heterodyne evaluating method.

Abstract translation: 相位调制干涉仪具有改进的控制和信号处理。 获得能够在相位调制干涉仪中进行评估的叠加信号，无需对相位调制器进行复杂的锯齿控制，因为具有调制频率（ω1，ω2）并相对于相位和频率刚性耦合的两个正弦控制信号 应用于已知的相位调制器，并且以传统方式用于评估相位位移的余弦信号通过电子带通滤波器对在干涉仪中产生的叠加信号进行滤波。 在带通滤波器的滤波器频率（ω-F）下，两个调制频率（ω1，ω2）的奇数谐波和偶数谐波具有相同的频率，当幅度（phi 1，phi 2 ）的控制信号满足相位调制器的合适工作点的条件。 该改进适用于相位调制干涉仪，特别是用于精密距离测量装置，优选地通过外差评估方法。

公开(公告)号：US5361312A

公开(公告)日：1994-11-01

申请号：US44105

申请日：1993-04-08

Applicant: Michael Kuchel

Inventor： Michael Kuchel

IPC: G01J9/02 ,  H03D13/00 ,  G06K9/00

CPC classification number: G01J9/02 ,  G01J2009/0249

Abstract: The invention relates to measuring a phase-modulated signal 5. The signal is measured along at least five different steps (P1-P5) corresponding to preselected phase angles of the carrier wave 4. From the associated sets of measured values, at least three sets of measured values are formulated in a manner that from each of the sets a phase value [.phi..sub.i =arctan (Z.sub.i /N.sub.i) where i is equal to or greater than 3] can be calculated. The same correct phase value is computed based upon these three sets for a signal with the frequency of the carrier wave. The essence of the invention is finding that linear combinations of a.sub.i Z.sub.i and a.sub.i N.sub.i can be used for the computation of an accurate phase measurement where the factors a.sub.i are selected so that the phase error, as a function of the preselected phase steps, has at least three zero positions among the measured phase steps (P1-P5). As a result, the systemic errors that normally accompany phase measuring are significantly reduced. The invention is particularly suitable for the evaluation of bar pattern images and multiple-bar pattern images.

Abstract translation: 本发明涉及测量相位调制信号5.该信号沿对应于载波4的预选相位角的至少五个不同步骤（P1-P5）被测量。从相关联的测量值集合，至少三组 测量值的配置方式是从每个组中可以计算出其中i等于或大于3的相位值[phi = arctan（Zi / Ni）]。 对于具有载波频率的信号，基于这三组来计算相同的正确相位值。 本发明的实质是发现aiZi和aiNi的线性组合可用于计算精确相位测量，其中选择因子ai，使得作为预选相位步长的函数的相位误差具有至少三个 测量相位步长之间的零位置（P1-P5）。 因此，通常伴随相位测量的系统误差显着降低。 本发明特别适合于条形图案和多条图案图像的评估。

公开(公告)号：US4935614A

公开(公告)日：1990-06-19

申请号：US333637

申请日：1989-04-05

Applicant: James E. Hubbard, Jr. ,  James L. Petivan, III

Inventor： James E. Hubbard, Jr. ,  James L. Petivan, III

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0249

Abstract: The present invention is a two beam, double pass, phase shifting interferometric system for characterizing the phase profile of a radiation path. In the preferred form of the invention, a monochromatic beam is split into a reference beam and a test path beam. The test path beam is directed toward a fixed reflector which in turn directs that beam to the image sensor with a fixed length in the direction of propagation. The reference beam is directed to a movable reflector which directs that beam also to the image sensor, while introducing phase modulation. The system provides a measure of phase offset introduced into the reference beam at times of minimum or maximum intensity as measured by each photo detector in the image sensor, as the phase modulation of the reference beam is stepped over one complete wavelength. The phase profile of the test path is constructed using the accurate representation of the modulating refelector's position at the measured minimum or maximum intensity and the number of discontinuities in the phase offset data at each element's location.

Abstract translation: 本发明是用于表征辐射路径的相位分布的双光束双通相移干涉仪系统。 在本发明的优选形式中，单色光束被分成参考光束和测试光束光束。 测试路径光束指向固定反射器，固定的反射器又将该光束以传播方向上的固定长度引导到图像传感器。 在引入相位调制的同时，参考光束被引导到可移动反射器，其将该光束引导到图像传感器。 该系统提供在由图像传感器中的每个光电检测器测量的最小或最大强度的时候引入到参考光束中的相位偏移的量度，因为参考光束的相位调制是跨越一个完整的波长。 使用测量的最小或最大强度处的调制反馈器位置的精确表示和每个元件位置处的相位偏移数据中的不连续数量构建测试路径的相位曲线。

公开(公告)号：US4735507A

公开(公告)日：1988-04-05

申请号：US884694

申请日：1986-07-11

Applicant: Robert Crane, Jr. ,  David S. Dunavan

Inventor： Robert Crane, Jr. ,  David S. Dunavan

IPC: G01J3/26 ,  G01J9/02 ,  G01S3/782 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01S3/782 ,  G01J2009/0211 ,  G01J2009/0249 ,  G01J3/26 ,  G01J9/0246

Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam. Detecting means are provided to detect the interference of the first and second beams across the entire wavefront of the recombined beam, and over the entire image of the scene being viewed. Processing means detect and determine the location and wavelength of coherent radiation or coherent lack of radiation in the scene being viewed by the apparatus. This information can then be visually displayed. Additional processing means to respond to specific coherent wavelengths or wavelength sets.

Abstract translation: 一种成像相干辐射计，用于在存在非相干环境辐射的情况下检测和确定相干辐射的位置和波长或相干缺乏辐射。 该装置包括不等径干涉仪，其将包含相干和非相干辐射的入射辐射分成第一光束路径和第二光束路径，第一光束和第二光束分别通过第二光束路径行进。 第一光束路径和第二光束路径之间的光程长度差大于非相干辐射的相干长度，但是基本上小于相干辐射的相干长度或相干缺乏辐射。 提供调制装置以使得与调制信号成比例的第一光束和第二光束之间的光学频率的预定差异。 然后将第一和第二光束重新组合成重组光束。 提供检测装置以检测第一和第二光束在重组光束的整个波前的干涉，以及在正在观看的场景的整个图像上。 处理装置检测并确定由装置观察到的场景中相干辐射的位置和波长或相干的辐射干扰。 然后可以直观地显示该信息。 对特定相干波长或波长集合进行响应的附加处理装置。

公开(公告)号：US20230175893A1

公开(公告)日：2023-06-08

申请号：US17544877

申请日：2021-12-08

Applicant: David Mort Pepper

Inventor： David Mort Pepper

IPC: G01J9/04 ,  G01J9/02

CPC classification number: G01J9/04 ,  G01J9/02 ,  G01J2009/0249 ,  G01J2009/0269

Abstract: Conformal imaging vibrometer using adaptive optics with scene-based wave front sensing. An extended object is located at the first end of a link, and a reference-free, adaptive optical, conformal imaging vibrometer using scene-based wave front sensing is located at the second end of the link. An aberrated, free space or guided-wave path exists between the ends of the link. The adaptive optical system compensates for path distortions. Using a single interrogation beam, whole-body vibrations of opaque and reflective objects can be probed, as well as transparent and translucent objects, the latter pair employing a Zernike heterodyne interferometer.

公开(公告)号：US20170331550A1

公开(公告)日：2017-11-16

申请号：US15151797

申请日：2016-05-11

Applicant: Coriant Advanced Technology, LLC

Inventor： Yang Liu ,  Yangjin Ma ,  Michael J. Hochberg

IPC: H04B10/079 ,  G01J3/45 ,  H04B10/516 ,  H04B10/572

CPC classification number: H04B10/07957 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/32 ,  G01J3/4531 ,  G01J9/0246 ,  G01J2003/1213 ,  G01J2003/1269 ,  G01J2009/0249 ,  G01J2009/0288

Abstract: An optical spectrum analyzer (OSA) for measuring an optical spectrum of an input optical signal in a measurement wavelength range is provided. The OSA comprises a modulator, an integrated optical filter, and a photodetector. The modulator modulates the input optical signal by applying a dither modulation to facilitate detection and noise rejection. The integrated optical filter, which may include a ring resonator system, is sequentially tunable to selectively transmit each wavelength of the modulated optical signal in the measurement wavelength range. The photodetector sequentially detects each wavelength of the modulated optical signal in the measurement wavelength range to provide a representative output electrical signal.

公开(公告)号：US20120162657A1

公开(公告)日：2012-06-28

申请号：US13411600

申请日：2012-03-04

Applicant: Robert J. Rafac ,  Scot T. Smith

Inventor： Robert J. Rafac ,  Scot T. Smith

IPC: G01J3/45

CPC classification number: G01J3/02 ,  G01J1/4257 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/0297 ,  G01J3/1256 ,  G01J3/26 ,  G01J9/02 ,  G01J2009/0249 ,  G01J2009/0257 ,  G02B5/04 ,  G02B5/284 ,  G02B27/48 ,  G03F7/70025 ,  G03F7/70583 ,  H01S3/005

Abstract: A method includes directing a portion of a laser beam output from a laser along a secondary beam path toward a detector, the secondary beam path being distinct from a main beam path of the laser beam; generating a bandwidth selective interference pattern of the laser beam on the detector; detecting, at the detector, a width of a fringe within the interference pattern to thereby measure measuring a bandwidth of the laser beam; and homogenizing the laser beam traveling along the secondary beam path prior to generation of the bandwidth selective interference pattern. The homogenizing includes diffusing the laser beam; and introducing a time dependent, position dependent, or both time and position dependent random modulation to the wavefront of the laser beam to reduce fluctuations in the detected fringe width and to reduce the influence of spatial coherence of the laser beam on the detected interference pattern.

Abstract translation: 一种方法包括将从激光器输出的激光束的一部分沿着次级光束路径引向检测器，次级光束路径与激光束的主光束路径不同; 在检测器上产生激光束的带宽选择性干涉图案; 在检测器处检测干涉图案内的边缘的宽度，从而测量测量激光束的带宽; 并且在产生带宽选择干涉图案之前均匀化沿着次级光束路径行进的激光束。 均质化包括扩散激光束; 并且将与时间有关的位置依赖性或时间和位置相关随机调制引入到激光束的波前以减少检测到的条纹宽度的波动并减少激光束的空间相干性对检测到的干涉图案的影响。

公开(公告)号：US5231468A

公开(公告)日：1993-07-27

申请号：US788395

申请日：1991-11-06

Applicant: Vance A. Deason ,  Gordon D. Lassahn

Inventor： Vance A. Deason ,  Gordon D. Lassahn

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01B9/0207 ,  G01J2009/0226 ,  G01J2009/0249

Abstract: A method and apparatus resulting in the simplification of phase shifting interferometry by eliminating the requirement to know the phase shift between interferograms or to keep the phase shift between interferograms constant. The present invention provides a simple, inexpensive means to shutter each independent beam of the interferometer in order to facilitate the data acquisition requirements for optical interferometry and phase shifting interferometry. By eliminating the requirement to know the phase shift between interferograms or to keep the phase shift constant, a simple, economical means and apparatus for performing the technique of phase shifting interferometry is provide which, by thermally expanding a fiber optical cable changes the optical path distance of one incident beam relative to another.

Abstract translation: 一种方法和装置，通过消除干涉图之间的相移的要求或者使干涉图之间的相移保持不变，从而简化了相移干涉测量。 本发明提供了一种简单，便宜的方式来对每个干涉仪的独立光束进行快门，以便于光学干涉测量和相移干涉测量的数据采集需求。 通过消除干涉图之间的相位偏移或保持相位偏移的要求，提供了一种用于执行相移干涉测量技术的简单，经济的手段和装置，其通过光纤光缆的热膨胀改变光路距离 相对于另一个入射光束。

公开(公告)号：EP0455218B1

公开(公告)日：1995-01-11

申请号：EP91107011.8

申请日：1991-04-30

Applicant: Firma Carl Zeiss ,  CARL ZEISS-STIFTUNG HANDELND ALS CARL ZEISS

Inventor： Küchel, Michael, Dr.

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0249

公开(公告)号：EP0256300A2

公开(公告)日：1988-02-24

申请号：EP87110016.0

申请日：1987-07-10

Applicant: Hughes Danbury Optical Systems, Inc.

Inventor： Crane, Robert, Jr. ,  Dunavan. David S.

IPC: G01J9/04

CPC classification number: G01J9/02 ,  G01J3/26 ,  G01J9/0246 ,  G01J2009/0211 ,  G01J2009/0249 ,  G01S3/782

Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam. Detecting means are provided to detect the interference of the first and second beams across the entire wavefront of the recombined beam, and over the entire image of the scene being viewed. Processing means detect and determine the location and wavelength of coherent radiation or coherent lack of radiation in the scene being viewed by the apparatus. This information can then be visually displayed. Additional processing means to respond to specific coherent wavelengths or wavelength sets.

Abstract translation: 一种用于在存在非相干环境辐射（R）的情况下检测和确定相干辐射或相干缺乏辐射的位置和波长的成像相干辐射计。 该装置包括不等径干涉仪（3），其将包含相干和非相干辐射的入射辐射（CR）分成第一光束路径和第二光束路径，第一光束和第二光束通过该第二光束路径行进。 第一光束路径和第二光束路径之间的光程长度差大于非相干辐射的相干长度，但是基本上小于相干辐射的相干长度或相干的辐射缺失。 提供调制装置（10,13）以使得与调制信号成比例的第一光束和第二光束之间的光学频率的预定差异。 然后将第一和第二光束重新组合成重组光束。 提供检测装置（4）以检测第一和第二光束在重组光束的整个波前的干涉，以及在正在观看的场景的整个图像上。 处理装置检测并确定由装置观察到的场景中相干辐射的位置和波长或相干的辐射干扰。 然后可以直观地显示该信息。 用于响应特定相干波长或波长集合的附加处理装置。