公开(公告)号：CN107271057A

公开(公告)日：2017-10-20

申请号：CN201710040480.8

申请日：2017-01-19

Applicant: 松下知识产权经营株式会社

Inventor： 西胁青儿 ,  鸣海建治 ,  盐野照弘

IPC: G01J9/02

CPC classification number: G01B9/02041 ,  G01B9/02087 ,  G01B2290/30 ,  G01J1/0407 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0422 ,  G01J1/0437 ,  G01J5/024 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0809 ,  H01L31/00 ,  G01J9/02 ,  G01J2009/0211

Abstract: 本申请提供一种光检测装置以及光检测系统。本公开的一形态所涉及的光检测装置具备：光检测器，包含沿着主面配置的多个第1检测器以及多个第2检测器；光耦合层，配置在所述光检测器上或者上方；以及遮光膜，配置在所述光耦合层上。所述光耦合层包含：第1低折射率层；第1高折射率层，配置在所述第1低折射率层上，包含第1光栅；以及第2低折射率层，配置在所述第1高折射率层上。所述遮光膜包含：透光区域、以及与所述透光区域相邻的遮光区域。所述透光区域与所述多个第1检测器中包含的两个以上的第1检测器对置，所述遮光区域与所述多个第2检测器中包含的两个以上的第2检测器对置。

公开(公告)号：CN107255525A

公开(公告)日：2017-10-17

申请号：CN201710473501.5

申请日：2017-06-21

Applicant: 苏州大学

Inventor： 赵承良 ,  曾军 ,  卢兴园 ,  朱新蕾 ,  刘磊鑫 ,  蔡阳健

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0211 ,  G01J2009/0249

Abstract: 本发明涉及一种测量部分相干光空间关联结构的方法及系统，所述方法包括：待测光源引入扰动、经过多孔阵列结构输出后进行傅里叶变换，记录光源传输至傅里叶平面处的光强；待测光源不引入扰动、经过多孔阵列结构输出后进行傅里叶变换，记录光源传输至傅里叶平面处的光强；将有扰动、无扰动两种情况下记录的光强，分别进行反傅里叶变换和筛选阵列的过滤，将过滤后的结果相减，并反传输至光源平面，即可得到光源平面的交叉谱密度函数，此时，根据关联结构函数、交叉谱密度函数和源场光强的关系，即可得到光源的关联结构。本发明本发明可以同时得到待测光源空间关联结构完整的实部和虚部信息。

公开(公告)号：US20120160993A1

公开(公告)日：2012-06-28

申请号：US13338386

申请日：2011-12-28

Applicant: Amir Nevet ,  Alex Hayat ,  Meir Orenstein

Inventor： Amir Nevet ,  Alex Hayat ,  Meir Orenstein

IPC: H01L31/0232

CPC classification number: G01J11/00 ,  G01J1/42 ,  G01J9/02 ,  G01J2001/442 ,  G01J2001/4466 ,  G01J2009/0211

Abstract: A system for measuring one or more characteristics of light of a photon energy Eph from a light source, that can be determined from measuring three-photon absorption events, the system comprising: a) a detector having a band gap material characterized by gap energy between 2.1 and 3 times Eph; b) an optical element configured to concentrate a beam of light from the light source on the detector; c) a signal amplifier that amplifies an output signal indicative of when three photons produced by the light source undergo a three-photon absorption event in the band gap material; and d) an analyzer that analyzes the output signal to count or measure a rate of the three-photon absorption events, and determines the one or more characteristics of the light from the light source.

Abstract translation: 一种用于测量来自光源的光子能量Eph的光的一个或多个特性的系统，其可以通过测量三光子吸收事件来确定，所述系统包括：a）具有带隙材料的检测器，其特征在于， 2.1倍和3倍Eph; b）光学元件，被配置为将来自光源的光束聚集在检测器上; c）信号放大器，其放大指示由所述光源产生的三个光子何时在所述带隙材料中经历三光子吸收事件的输出信号; 以及d）分析器，其分析输出信号以计数或测量三光子吸收事件的速率，并且确定来自光源的光的一个或多个特性。

公开(公告)号：EP0256300A2

公开(公告)日：1988-02-24

申请号：EP87110016.0

申请日：1987-07-10

Applicant: Hughes Danbury Optical Systems, Inc.

Inventor： Crane, Robert, Jr. ,  Dunavan. David S.

IPC: G01J9/04

CPC classification number: G01J9/02 ,  G01J3/26 ,  G01J9/0246 ,  G01J2009/0211 ,  G01J2009/0249 ,  G01S3/782

Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam. Detecting means are provided to detect the interference of the first and second beams across the entire wavefront of the recombined beam, and over the entire image of the scene being viewed. Processing means detect and determine the location and wavelength of coherent radiation or coherent lack of radiation in the scene being viewed by the apparatus. This information can then be visually displayed. Additional processing means to respond to specific coherent wavelengths or wavelength sets.

Abstract translation: 一种用于在存在非相干环境辐射（R）的情况下检测和确定相干辐射或相干缺乏辐射的位置和波长的成像相干辐射计。 该装置包括不等径干涉仪（3），其将包含相干和非相干辐射的入射辐射（CR）分成第一光束路径和第二光束路径，第一光束和第二光束通过该第二光束路径行进。 第一光束路径和第二光束路径之间的光程长度差大于非相干辐射的相干长度，但是基本上小于相干辐射的相干长度或相干的辐射缺失。 提供调制装置（10,13）以使得与调制信号成比例的第一光束和第二光束之间的光学频率的预定差异。 然后将第一和第二光束重新组合成重组光束。 提供检测装置（4）以检测第一和第二光束在重组光束的整个波前的干涉，以及在正在观看的场景的整个图像上。 处理装置检测并确定由装置观察到的场景中相干辐射的位置和波长或相干的辐射干扰。 然后可以直观地显示该信息。 用于响应特定相干波长或波长集合的附加处理装置。

公开(公告)号：WO1989001644A1

公开(公告)日：1989-02-23

申请号：PCT/US1988002247

申请日：1988-07-05

Applicant: HUGHES AIRCRAFT COMPANY

Inventor： HUGHES AIRCRAFT COMPANY ,  O'MEARA, Thomas, R.

IPC: G02B26/06

CPC classification number: G01J9/02 ,  G01J2009/0211 ,  G02F1/11

Abstract: A self-tuning optical notch filter is employed to separate coherent from noncoherent radiation in an overall beam. The presence of coherent radiation is detected, preferably with an interferometer, and the frequency of the detected coherent radiation is determined. An electrical control signal is generated with a frequency corresponding to that of the coherent radiation, and causes an optical filter to filter out the coherent radiation from the beam. In the preferred embodiment the optical filter is a Bragg cell, and the electrical control signal is applied to an electro-acoustic transducer which furnishes an acoustic control signal to the Bragg cell.

Abstract translation: 采用自调谐光陷波滤波器将整个波束中的相干辐射与非相干辐射分离。 检测到相干辐射的存在，优选地用干涉仪，并且确定检测到的相干辐射的频率。 产生具有对应于相干辐射的频率的电气控制信号，并且使得滤光器滤出来自光束的相干辐射。 在优选实施例中，滤光器是布拉格单元，并且电控信号被施加到向布拉格单元提供声控信号的电声换能器。

公开(公告)号：WO2014057136A2

公开(公告)日：2014-04-17

申请号：PCT/EP2013071419

申请日：2013-10-14

Applicant: FRAUNHOFER GES ZUR FÖRDERUNG DER ANGEW FORSCHUNG E V

Inventor： ANSTETT GREGOR ,  EBERT REINHARD

IPC: G01J1/42 ,  G01J1/04 ,  G01J4/04 ,  G01J9/00 ,  G01J9/02 ,  G01N21/21 ,  G01S7/48 ,  G01S7/499 ,  G01S17/02 ,  H01S3/00

CPC classification number: G01J1/0266 ,  G01J1/0429 ,  G01J1/4257 ,  G01J9/02 ,  G01J2009/0211 ,  G01S7/4804

Abstract: The invention relates to a device (1) for detecting laser radiation (45), comprising at least one light inlet (51) and at least one photoelectric transducer (5), which is designed to convert electromagnetic radiation (46) entering through the light inlet (51) into an electrical signal, wherein a modulator (4) is arranged in the beam path between the light inlet (51) and the photoelectric transducer (5), which modulator is designed to modulate laser radiation at a specifiable modulation frequency. The invention further relates to a corresponding method.

Abstract translation: 本发明涉及一种用于检测激光辐射（45）的装置（1）与在至少一个光入口（51）和至少一个光电转换元件（5），其通过光入口适于（51）入射的电磁辐射（46） 转换的电信号，调制器（4）被布置在光入射（51）和光电变换部（5），其被配置为调制具有预定调制频率的激光辐射之间的光路。 本发明还涉及一种相应的方法。

公开(公告)号：US20240004176A1

公开(公告)日：2024-01-04

申请号：US18368621

申请日：2023-09-15

Applicant: NIKON CORPORATION

Inventor： Shota TSUCHIDA ,  Satoshi IKEDA

IPC: G02B21/00 ,  G01J9/00 ,  G01J9/02

CPC classification number: G02B21/0056 ,  G01J9/00 ,  G01J9/0246 ,  G01J2009/0211 ,  G01J2009/0269

Abstract: A quantitative phase image generating method for a microscope, includes: irradiating an object with illumination light; disposing a focal point of an objective lens at each of a plurality of positions that are mutually separated by gaps Δz along an optical axis of the objective lens, and detecting light from the object; generating sets of light intensity distribution data corresponding to each of the plurality of positions based upon the detected light; and generating a quantitative phase image based upon the light intensity distribution data; wherein the gap Δz is set based upon setting information of the microscope.

公开(公告)号：US11686951B2

公开(公告)日：2023-06-27

申请号：US17240050

申请日：2021-04-26

Applicant: Cymer, LLC ,  ASML Netherlands B.V.

Inventor： Wilhelmus Patrick Elisabeth Maria op 't Root ,  Thomas Patrick Duffey ,  Herman Philip Godfried ,  Frank Everts ,  Joshua Jon Thornes ,  Brian Edward King

IPC: G02B27/48 ,  G01J3/26 ,  G01J9/02 ,  G01J3/02 ,  G03F7/00 ,  H01S3/225 ,  H01S3/00 ,  G01J11/00 ,  G02F1/01 ,  H01S4/00 ,  G02B19/00

CPC classification number: G02B27/48 ,  G01J3/027 ,  G01J3/26 ,  G01J9/02 ,  G01J11/00 ,  G02F1/0121 ,  G03F7/70008 ,  G03F7/70041 ,  G03F7/7055 ,  H01S3/0085 ,  H01S3/225 ,  H01S4/00 ,  G01J2009/0211 ,  G02B19/0095 ,  G02F2203/18 ,  G03F7/70025 ,  G03F7/70583 ,  H01S3/0057

Abstract: A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

公开(公告)号：US20160252392A1

公开(公告)日：2016-09-01

申请号：US14634584

申请日：2015-02-27

Applicant: MOHAMMAD TAGHI TAVASSOLY ,  SEYED ROOHOLLAH HOSSEINI

Inventor： MOHAMMAD TAGHI TAVASSOLY ,  SEYED ROOHOLLAH HOSSEINI

IPC: G01J1/06 ,  G01J9/02 ,  G01B11/24 ,  G01J3/453

CPC classification number: G01J3/453 ,  G01J9/0246 ,  G01J2009/0211

Abstract: A phase step diffractometer is disclosed that utilizes Fresnel diffraction from a 1D step. The main part of the device is a step with two flat parallel mirrors on either side. The phase difference (PD) is changed by varying the light incident angle and the step height. The diffracted lights from the step are caught by a CCD connected to a PC. By varying PD, the visibility of the three central diffraction fringes changes. This permits low uncertainties in the measurements of wavelength, coherence length, coherence width, plate thickness, surface topography and fine displacement of objects. In addition, the device can be used in determination of broad spectral line shapes and optical constants of materials.

Abstract translation: 公开了使用来自1D步骤的菲涅耳衍射的相位衍射仪。 该装置的主要部分是两面平行的两个平行镜。 通过改变光入射角和台阶高度来改变相位差（PD）。 来自台阶的衍射光被连接到PC的CCD捕获。 通过改变PD，三个中心衍射条纹的可视性发生变化。 这允许在波长，相干长度，相干宽度，板厚度，表面形貌和物体的精细位移的测量中的低不确定性。 此外，该装置可用于确定材料的宽谱线形状和光学常数。

公开(公告)号：US5272332A

公开(公告)日：1993-12-21

申请号：US641650

申请日：1991-01-15

Applicant: Xiaohui Ning

Inventor： Xiaohui Ning

IPC: G01J1/42 ,  G01J3/12 ,  G01J9/00 ,  G01J9/02 ,  G02B5/28 ,  G02F1/21 ,  G02F1/03

CPC classification number: G02F1/21 ,  G01J9/00 ,  G02B5/288 ,  H01L41/083 ,  G01J1/0488 ,  G01J2003/1226 ,  G01J2009/0211

Abstract: A laser discrimination filter based on temporal coherence is presented. This filter comprises a multilayer device with "thick" layers such that the optical thickness of each layer is greater than the coherence length of the ambient light, but still much smaller than the coherence length of the laser light of interest. Thus, the spectral response of the device of this invention becomes dependent on the degree of temporal coherence of the incident light. If white light strikes the filter, multi-beam interference will not occur because of its short coherence length. The device acts like a stack of partially reflecting mirrors. If the laser light strikes the filter, multi-beam interference will still take place because of the long coherence length of the laser light. This causes the device to have different transmitting characteristics for laser light and white light. Therefore, this device functions as a laser discrimination device.

Abstract translation: 提出了一种基于时间相干性的激光识别滤波器。 该滤波器包括具有“厚”层的多层器件，使得每层的光学厚度大于环境光的相干长度，但仍远远小于感兴趣的激光的相干长度。 因此，本发明的装置的光谱响应取决于入射光的时间相干程度。 如果白光照射过滤器，则由于其短的相干长度而不会发生多光束干涉。 该装置像一堆部分反射镜一样起作用。 如果激光照射过滤器，则由于激光的长相干长度，仍然会发生多光束干涉。 这使得该装置对于激光和白光具有不同的透射特性。 因此，该装置用作激光识别装置。