公开(公告)号：EP3343205A1

公开(公告)日：2018-07-04

申请号：EP16382678.7

申请日：2016-12-30

Applicant: Lenz Instruments S.L.

Inventor： Philippet, Laurent ,  Romero López, David ,  Williams, Mark ,  Rodríguez Ventura, Juan Manuel ,  Álvarez García, Jacobo

IPC: G01N21/71 ,  B07C5/342 ,  G01J3/443 ,  G01J3/02 ,  G01J3/20 ,  G01N21/84

CPC classification number: G01N21/718 ,  B07C5/342 ,  G01J3/021 ,  G01J3/443 ,  G01N2021/8455 ,  G01N2201/1042 ,  G01N2201/1047

Abstract: 1.- A system (1) for analysing the chemical composition of a target material (100) comprising: [a] a laser system (2) [b] at least one scanner assembly for directing said laser beam (4) onto said target material (100) to produce luminous plasma on said target material (100) and to collect the light emitted thereafter, and [c] a spectral analyser (10). The scanner assembly further comprises at least [d] first light redirecting means (12) being configured such as to let the light pass therethrough when the light falls on one first side (14) of said first light redirecting means (12) and to redirect at least part of the light when the light falls on a second opposite side (16) opposite. Said first light redirecting means (12) are arranged in the system (1) to gather said light emitted by said plasma, collinearly with the laser beam directed onto said target material (100) and to redirect said light emitted by said plasma onto said first focusing means (6).

公开(公告)号：EP0894262A1

公开(公告)日：1999-02-03

申请号：EP97940305.0

申请日：1997-09-29

Applicant: Koninklijke Philips Electronics N.V.

Inventor： GREVE, Peter, Ferdinand

IPC: G01N21 ,  G03F7

CPC classification number: G03F7/70483 ,  G01N21/8806 ,  G01N2021/95676 ,  G01N2201/0636 ,  G01N2201/1047

Abstract: A description is given of an optical inspection device for inspecting two oppositely located surfaces (3, 4) of a transparent object (1), for example a lithographic mask. The device is constructed in such a manner that for each inspection beam (a, c) the radiation path to the surface to be inspected (3, 4) is substantially equal to the radiation path from the surface to be inspected to a detector (29, 40), so that these paths comprise the same scanning element (10), preferably a mirror polygon. By virtue thereof, the radiation spots formed on the detectors are stationary and an inspection signal having a good signal-to-noise ratio is obtained.

公开(公告)号：KR1020160083765A

公开(公告)日：2016-07-12

申请号：KR1020150000302

申请日：2015-01-02

Applicant: 안성룡

Inventor： 안성룡

IPC: G01N21/958 ,  G01N21/952 ,  G01N21/88

CPC classification number: G01N21/958 ,  G01N21/952 ,  G01N2201/0635 ,  G01N2201/102 ,  G01N2201/1042 ,  G01N2201/1047

Abstract: 본발명은곡면형상을가지는소재에대하여평면부분과곡면부분을모두정확하게검사할수 있는곡면소재검사장치에관한것으로서, 본발명에따른곡면소재검사장치는, 피검사대상곡면소재(1)를장착하는장착지그(110); 상기장착지그(110)를회동및 상하구동시키는지그구동부(120); 상기장착지그(110)의상측에설치되며, 상기장착지그(110)에장착된피검사대상곡면소재(1)를검사하는검사카메라(130); 상기장착지그(130)의주변에설치되며, 상기곡면소재(1)에조명을조사하는조명부(150); 상기장착지그(110)를상기곡면소재(1)의검사위치에따라상하구동및 회동시키면서상기검사카메라(130)를이용하여검사하는제어부(도면에미도시);를포함한다.

Abstract translation: 本发明涉及一种能够精确检查具有弯曲表面的材料的平坦部分和弯曲部分的弯曲表面材料的装置。 根据本发明的实施例的检查曲面材料的装置包括：保持检查对象弯曲材料（1）的安装夹具（110）; 夹具驱动单元，用于使安装夹具旋转或升高; 安装在安装夹具（110）的上侧的检查照相机（130），用于检查安装在安装夹具（110）中的检查对象弯曲材料（1）。 安装在所述安装夹具（130）附近以照射所述弯曲表面材料（1）的照明单元（150）; 以及控制单元（未示出），以通过根据检查位置升高或旋转安装夹具（110）来检查使用检查照相机（130）的弯曲表面材料（1）。

公开(公告)号：TW382738B

公开(公告)日：2000-02-21

申请号：TW086115512

申请日：1997-12-21

Applicant: 皇家飛利浦電子股份有限公司

Inventor： 彼德佛狄那德葛瑞夫

IPC: H01L

CPC classification number: G03F7/70483 ,  G01N21/8806 ,  G01N2021/95676 ,  G01N2201/0636 ,  G01N2201/1047

Abstract: 提出一用以檢查一透明物體(l)，例如一微影蝕刻光罩，的位於二側之表面(3，4)的光檢查裝置的揭示。此裝置之構成方式係為對於每一檢查光束(a，c)而言，至此被檢查的表面(3，4)的輻射路徑實際上等於從被檢查表面至一偵測器(29，40)的輻射路徑;因此，這些路徑包含相同的掃描元件(10)，較佳的是一反射多面鏡。藉此，形成在偵測器上的輻射光點是固定的，且獲得一具有好的信號雜訊比的檢查信號。

Abstract in simplified Chinese: 提出一用以检查一透明物体(l)，例如一微影蚀刻光罩，的位于二侧之表面(3，4)的光检查设备的揭示。此设备之构成方式系为对于每一检查光束(a，c)而言，至此被检查的表面(3，4)的辐射路径实际上等于从被检查表面至一侦测器(29，40)的辐射路径;因此，这些路径包含相同的扫描组件(10)，较佳的是一反射多面镜。借此，形成在侦测器上的辐射光点是固定的，且获得一具有好的信号噪声比的检查信号。