中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

94 records (took 0.021 seconds)

    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
    11.
    发明申请
    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE 有权
    用于光谱成像的光学计量系统

    公开(公告)号：US20160290927A1

    公开(公告)日：2016-10-06

    申请号：US15178484

    申请日：2016-06-09

    Applicant: Nanometrics Incorporated

    Inventor： Andrzej Buczkowski ,  Mikhail Sluch

    IPC: G01N21/64 ,  G01J3/28

    CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/1053 ,  H04N3/155

    Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.

    Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器收集沿着照明线发射的光致发光。 此外，宽带照明源可以用于在样本上产生第二照明线，其中检测器收集沿着第二照明线反射的宽带照明。 信号收集光学器件可以收集光致发光光和宽带光并将其聚焦成由光导管接收的线。 光导管的输出端具有与检测器的入口相匹配的形状。

    Optical illumination apparatus and method having a reflective arrangement with moveable components for adjusting incident light
    12.
    发明授权
    Optical illumination apparatus and method having a reflective arrangement with moveable components for adjusting incident light 有权
    具有反射布置的光学照明装置和方法，其具有用于调节入射光的可移动部件

    公开(公告)号：US08742384B2

    公开(公告)日：2014-06-03

    申请号：US12992608

    申请日：2009-05-18

    Applicant: Erik Martinus Hubertus Petrus Van Dijk ,  Cornelius Antonius Hezemans

    Inventor： Erik Martinus Hubertus Petrus Van Dijk ,  Cornelius Antonius Hezemans

    IPC: G01N21/86

    CPC classification number: G01N21/6452 ,  G01N2021/6463 ,  G01N2201/1053 ,  G02B21/0032

    Abstract: An optical system for detecting light from a 2D area of a sample (36) comprises a collection lens (34) for collecting light from a collection region of the sample. A light detector (44) is positionally fixed with respect to the sample, and a reflector arrangement (61) directs collected light to the detector. The reflector arrangement comprises movable components and the collection lens (34) is movable relative to the sample. The collection lens and the movable components are configurable to define different collection regions, and the movement of the components effects a direction of the light from the collection region to a substantially unchanged area of the light detector (44). This arrangement avoids the need for a bulky detector in order to detect signals from a 2D sample area formed by scanning across the sample.

    Abstract translation: 用于检测来自样品（36）的2D区域的光的光学系统包括用于收集来自样品的收集区域的光的收集透镜（34）。 光检测器（44）相对于样品位置固定，反射器装置（61）将收集的光引导到检测器。 反射器装置包括可移动部件，并且收集透镜（34）可相对于样品移动。 收集透镜和可移动部件可配置为限定不同的收集区域，并且部件的移动影响来自光收集区域的光的方向到光检测器（44）的基本上不变的区域。 这种布置避免了对庞大检测器的需要，以便检测来自通过扫描样品形成的2D样品区域的信号。

    Mapping-measurement apparatus
    14.
    发明授权
    Mapping-measurement apparatus 有权
    测绘仪

    公开(公告)号：US07224460B2

    公开(公告)日：2007-05-29

    申请号：US10970518

    申请日：2004-10-21

    Applicant: Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

    Inventor： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

    IPC: G01N21/00 ,  G01N21/55

    CPC classification number: G01N21/3563 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/1053 ,  G01N2201/117

    Abstract: A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each mirror having two independent rotational axes about which they can be independently rotated by a controller. The aperture restricts light incident on the photodetector from a predetermined portion of the sample surface.

    Abstract translation: 映射测量装置包括光照射单元，用于通过孔径检测来自样品的反射光或透射光的光电检测器，以及在样品的照射和检测侧上的可调扫描反射镜，每个反射镜具有两个独立的旋转轴 它们可以由控制器独立旋转。 孔径从样品表面的预定部分限制入射在光电检测器上的光。

    Foreign particle detecting method and apparatus
    15.
    再颁专利
    Foreign particle detecting method and apparatus 失效

    公开(公告)号：USRE33991E

    公开(公告)日：1992-07-14

    申请号：US360971

    申请日：1989-06-02

    Applicant: Masataka Shiba ,  Sachio Uto ,  Mitsuyoshi Koizumi

    Inventor： Masataka Shiba ,  Sachio Uto ,  Mitsuyoshi Koizumi

    IPC: G01N15/02 ,  G01N21/94

    CPC classification number: G01N21/94 ,  G01N2015/0238 ,  G01N2021/4792 ,  G01N2201/1053

    Abstract: The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate surface from a direction approximately 90.degree. with respect to the laser light irradiating direction; and the laser light reflected from a foreign particle on the substrate surface is detected by a polarized light analyzer and a photoelectric conversion device from a direction set approximately equal to said scanning direction and inclined with respect to the direction perpendicular to the substrate surface.

    顕微鏡
    16.
    发明申请
    顕微鏡 审中-公开
    显微镜

    公开(公告)号：WO2008026435A1

    公开(公告)日：2008-03-06

    申请号：PCT/JP2007/065539

    申请日：2007-08-08

    Applicant: オリンパス株式会社 ,  池滝 慶記

    Inventor： 池滝 慶記

    IPC: G01N21/64 ,  G02B21/00

    CPC classification number: G02B21/16 ,  G01N21/6458 ,  G01N2021/6415 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1053 ,  G02B5/20 ,  G02B5/3083 ,  G02B21/002 ,  G02B26/06 ,  G02B2207/113

    Abstract: 　ポンプ光を出射するポンプ光用光源21と、イレース光を出射するイレース光用光源22と、ポンプ光およびイレース光を同軸に合成する光合成部(23～26)と、合成光を集光する集光部62と、合成光により試料を走査する走査部(44,45)と、試料から発生する光応答信号を検出する検出部50と、合成光の光路中に配置され、イレース光に対して高い波長選択特性を有するイレース光選択領域およびポンプ光に対して高い波長選択特性を有するポンプ光選択領域を備える波長選択素子42と、合成光の光路中に配置され、波長選択素子のイレース光選択領域に対応するイレース光を空間変調する空間変調素子43と、を有する。

    Abstract translation: 显微镜设置有用于发射泵浦光束的泵浦光束光源（21）; 擦除光束光源（22），用于发射擦除光束; 用于同轴合成泵浦光束和擦除光束的光合成部分（23-26）; 用于收集合成光束的光收集部分（62）; 用于用合成光束扫描样品的扫描部分（44,45）; 检测部分，用于检测从样本产生的光响应信号; 布置在合成光的光路中并具有对擦除光束具有高波长选择特性的擦除光束选择区域的波长选择元件（42）以及具有高波长选择的泵浦光束选择区域 泵梁特性; 以及空间调制元件（43），其布置在合成光束的光路中，并且对与波长选择元件的擦除光选择区域相对应的擦除光束进行空间调制。

    3D PROFILE ANALYSIS FOR SURFACE CONTOUR INSPECTION
    17.
    发明申请
    3D PROFILE ANALYSIS FOR SURFACE CONTOUR INSPECTION 审中-公开
    用于表面轮廓检查的3D剖面分析

    公开(公告)号：WO01027864A1

    公开(公告)日：2001-04-19

    申请号：PCT/US2000/028505

    申请日：2000-10-13

    IPC: G06T7/00 ,  G06K9/00

    CPC classification number: G06T7/0006 ,  G01N21/95607 ,  G01N21/95684 ,  G01N2021/95615 ,  G01N2021/95661 ,  G01N2201/06113 ,  G01N2201/1053 ,  G06T2207/30148

    Abstract: A system for inspecting a component (104) is provided. The system includes an imaging system (204), such as a digital camera. A controller (202) is connected to the digital camera. The controller receives the digital image data of a device that is generated by the camera. The controller processes the digital image data to generate control commands. A variable grid generation system (106) is also connected to the controller. The variable grid generation system can receive commands from the controller, and can generate a grid (102) in response to the commands that matches the component and that allows the component to be inspected.

    Abstract translation: 提供了一种用于检查部件（104）的系统。 该系统包括诸如数字照相机的成像系统（204）。 控制器（202）连接到数字照相机。 控制器接收由相机生成的设备的数字图像数据。 控制器处理数字图像数据以产生控制命令。 可变网格生成系统（106）也连接到控制器。 可变网格生成系统可以从控制器接收命令，并且可以响应于与组件匹配的命令并且允许检查组件来生成网格（102）。

    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
    18.
    发明申请
    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE 审中-公开
    用于光谱成像的光学计量系统

    公开(公告)号：WO2015080827A1

    公开(公告)日：2015-06-04

    申请号：PCT/US2014/062980

    申请日：2014-10-29

    Applicant: NANOMETRICS INCORPORATED

    Inventor： BUCZKOWSKI, Andrzej

    IPC: G01N21/55 ,  G01N21/64 ,  G01N21/88 ,  G01N21/47 ,  G01N21/95 ,  G01B11/06

    CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2201/06113 ,  G01N2201/1042 ,  G01N2201/1053 ,  H04N3/155

    Abstract: An optical metrology device capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample is disclosed. The metrology device includes a first light source (110) that produces a first illumination line (122) on the sample (101). A scanning system (116) may be used to scan an illumination spot across the sample to form the illumination line. A detector (130) spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source (140) may be used to produce a second illumination line (142) on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.

    Abstract translation: 公开了一种能够检测光致发光光，宽带光的镜面反射和穿过样品宽度的线的散射光的任何组合的光学测量装置。 测量装置包括在样品（101）上产生第一照明线（122）的第一光源（110）。 扫描系统（116）可用于扫描样品上的照明点以形成照明线。 检测器（130）对沿着照明线发射的光致发光进行光谱成像。 另外，宽带照明源（140）可以用于在样本上产生第二照明线（142），其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。

    Optoelectronic sensor and method for the transmission monitoring of a front screen
    20.
    发明授权
    Optoelectronic sensor and method for the transmission monitoring of a front screen 有权

    公开(公告)号：US09810626B2

    公开(公告)日：2017-11-07

    申请号：US15092991

    申请日：2016-04-07

    Applicant: SICK AG

    Inventor： Joachim Kramer ,  Michael Engler ,  Markus Hammes ,  Christof J. Meyer

    IPC: G01N21/59 ,  G01S17/42 ,  G01S7/481 ,  G01S7/497 ,  G01D5/30 ,  G01M11/00

    CPC classification number: G01N21/59 ,  G01D5/30 ,  G01M11/00 ,  G01N2201/06113 ,  G01N2201/1053 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/42 ,  G01S2007/4975

    Abstract: An optoelectronic sensor (10) for detecting objects in a monitored zone (20) is provided which has the following: a front screen (38); a light transmitter (12) for transmitting a light beam (16); a movable deflection unit (18) for the periodic sampling of the monitored zone (20) by the light beam (16); a light receiver (26) for generating a received signal from the light beam (22) remitted by the objects; at least one test light transmitter (42); at least one test light transmitter (42), at least one test light receiver (44) and at least one test light reflector (48) which span a test light path (46a-b) through the front screen (38); and an evaluation unit (32) which is configured to acquire pieces of information on the objects in the monitored zone (20) from the received signal and to recognize an impaired light permeability of the front screen (38) from a test light signal which the test light receiver (44) generates from test light which is transmitted from the test light transmitter (42) and which is reflected at the test light reflector (48). In this respect, the test light reflector (48) is arranged such that it moves along with the deflection unit (18).

Patent Agency Ranking