公开(公告)号：JPWO2012039352A1

公开(公告)日：2014-02-03

申请号：JP2012535020

申请日：2011-09-16

Applicant: オリンパス株式会社

Inventor： 田邊　哲也 ,  哲也 田邊

IPC: G01N21/64

CPC classification number: G01N21/85 ,  G01N15/1434 ,  G01N21/6452 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/1087 ,  G02B21/0052 ,  G02B21/0076 ,  G02B21/008

Abstract: 共焦点顕微鏡又は多光子顕微鏡による光計測を用いた走査分子計数法に於いて、光検出領域内に複数の発光粒子が一時に包含されることにより起因して、発光粒子の検出数の精度が悪化することを回避する方法が提供される。本発明の光分析技術では、共焦点顕微鏡又は多光子顕微鏡の光学系の光路を変更することにより試料溶液内に於いて光検出領域の位置を移動させながら光の強度を測定して生成された光強度データに於いて、閾値を超える強度を有する信号を発光粒子の光を表す信号として選択的に検出する態様にて発光粒子の光を表す信号を個別に検出する際に、閾値が光検出領域内の該光検出領域よりも狭い領域に包含された発光粒子からの光を表す信号が選択的に検出されるよう設定される。

公开(公告)号：US20180045570A1

公开(公告)日：2018-02-15

申请号：US15552752

申请日：2016-03-08

Applicant: RENISHAW PLC

Inventor： Timothy SMITH ,  Richard John BLACKWELL-WHITEHEAD

IPC: G01J3/44 ,  G01J3/06 ,  G01N21/65

CPC classification number: G01J3/44 ,  G01J3/06 ,  G01J2003/064 ,  G01N21/65 ,  G01N2201/103 ,  G01N2201/1045 ,  G01N2201/1087 ,  G02B21/002

Abstract: A transmission Raman spectroscopy apparatus has a light source for generating a light profile on a sample, a photodetector having at least one photodetector element, collection optics arranged to collect Raman scattered light transmitted through the sample and direct the Raman light onto the at least one photodetector element and a support for supporting the sample. The support and light source are arranged such that the light profile can be moved relative to the sample in order that the at least one photodetector element receives Raman scattered light generated for different locations of the light profile on the sample.

公开(公告)号：US09488519B2

公开(公告)日：2016-11-08

申请号：US14730762

申请日：2015-06-04

Applicant: SAMCO INC.

Inventor： Kiyoshi Hasegawa ,  Hiroshi Kawamura ,  Peter Wood

IPC: G01N21/55 ,  G01J1/02 ,  G01J1/42 ,  G01N21/84

CPC classification number: G01J1/0238 ,  G01J1/4257 ,  G01N21/55 ,  G01N2021/8427 ,  G01N2201/025 ,  G01N2201/1087

Abstract: The present invention provides a light beam measuring instrument that can securely receive light reflected by a sample. The light beam measuring instrument 1 includes an optical axis tilting mechanism 13 that includes a first tilting mechanism 131 and a second tilting mechanism 132. From the optical axis A1 of irradiation light beam emitted from a light beam source 112, the first tilting mechanism 131 tilts the optical axis A1 about the first tilting axis T1. The second tilting mechanism 132 tilts the optical axis A1 about the second tilting axis T2. The light beam measuring instrument 1 can receive the light reflected by the semiconductor chip C by means of operation of the optical axis tilting mechanism 13 even if the light reflected by the semiconductor chip C is tilted. Accordingly, this apparatus can securely perform measurement or inspection using the light beam.

Abstract translation: 本发明提供了一种可以安全地接收由样品反射的光的光束测量仪器。 光束测量仪1包括光轴倾斜机构13，其包括第一倾斜机构131和第二倾斜机构132.从光束源112发射的照射光束的光轴A1，第一倾斜机构131倾斜 围绕第一倾斜轴线T1的光轴A1。 第二倾斜机构132围绕第二倾斜轴T2倾斜光轴A1。 即使由半导体芯片C反射的光倾斜，光束测量仪器1也可以通过光轴倾斜机构13的操作来接收由半导体芯片C反射的光。 因此，该装置可以可靠地执行使用光束的测量或检查。

公开(公告)号：US08680485B2

公开(公告)日：2014-03-25

申请号：US13840122

申请日：2013-03-15

Applicant: Olympus Corporation

Inventor： Tetsuya Tanabe

IPC: G01N21/64 ,  G01J1/58

CPC classification number: G01N21/85 ,  G01N15/1434 ,  G01N21/6452 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/1087 ,  G02B21/0052 ,  G02B21/0076 ,  G02B21/008

Abstract: There is provided a method of avoiding deterioration of the accuracy in the number of detected light-emitting particles due to that two or more light-emitting particles are encompassed at a time in the light detection region in the scanning molecule counting method using an optical measurement with a confocal microscope or a multiphoton microscope. In the inventive optical analysis technique, in the detection of an individual signal indicating light of a light-emitting particle by selectively detecting a signal having an intensity beyond a threshold value as a signal indicating light of a light-emitting particle in light intensity data produced through measuring light intensity during moving the position of a light detection region in a sample solution, the threshold value is set so that a signal indicating light from a light-emitting particle encompassed in a region narrower than the light detection region will be detected selectively.

Abstract translation: 提供了一种避免由于在使用光学测量的扫描分子计数方法中在光检测区域中一次包围两个或更多个发光粒子而使检测到的发光粒子数量的精度降低的方法 用共焦显微镜或多光子显微镜。 在本发明的光学分析技术中，在通过选择性地检测具有超过阈值的强度的信号来检测指示发光粒子的光的单个信号作为产生光强度数据中的发光粒子的光的信号 通过在移动样品溶液中的光检测区域的位置时测量光强度，设定阈值，以便选择性地检测到包含在比光检测区域窄的区域中的发光粒子的光的信号。

公开(公告)号：USRE34782E

公开(公告)日：1994-11-08

申请号：US969794

申请日：1992-10-12

Applicant: Walter B. Dandliker ,  Howard S. Barr ,  Henry S. Katzenstein ,  Keith R. Watson

Inventor： Walter B. Dandliker ,  Howard S. Barr ,  Henry S. Katzenstein ,  Keith R. Watson

IPC: G01N21/64 ,  G02B21/16

CPC classification number: G01N21/6408 ,  G02B21/16 ,  G01N21/6456 ,  G01N21/6458 ,  G01N2201/1087

Abstract: A fluorometer for measuring a particular fluorescence emanating from a specimen and operating in accordance with the following method. Producing a burst of concentrated light energy and directing the concentrated light energy toward the specimen to produce a fluorescence from the specimen including the particular fluorescence. Preferably producing an image of the fluorescence. Detecting the fluorescence and producing a signal in accordance with the fluorescence. Controlling the passage of the image of the fluorescence for detecting within a particular time period so as to optimize the detection of the particular fluorescence. Timing the operation to sequence the detection of the fluorescence within the particular time period after the production of the burst of concentrated light energy. Scanning the fluorescence from the specimen for forming signals representative of the fluorescence from the specimen. Analyzing the signals to enhance the portion of the signal representing the particular fluorescence relative to the portion of the signal.

Abstract translation: 一种荧光计，用于测量从样品发出的特定荧光并根据以下方法进行操作。 产生集中的光能的突发，并将集中的光能引导到样品以从包括特定荧光的样品产生荧光。 优选地产生荧光图像。 根据荧光检测荧光并产生信号。 控制在特定时间段内用于检测的荧光图像的通过，以便优化特定荧光的检测。 计算在产生聚集的光能的突发之后的特定时间段内对荧光的检测进行排序的操作。 扫描来自样品的荧光，以形成代表来自样品荧光的信号。 分析信号以增强表示相对于信号部分的特定荧光的信号部分。

公开(公告)号：US4679946A

公开(公告)日：1987-07-14

申请号：US612077

申请日：1984-05-21

Applicant: Allan Rosencwaig ,  Jon Opsal

Inventor： Allan Rosencwaig ,  Jon Opsal

IPC: G01N25/00 ,  G01B11/06 ,  G01N21/17 ,  G01N21/21 ,  G01N21/55 ,  G01N25/18 ,  G01N25/72 ,  G01N29/00 ,  G01N21/41

CPC classification number: G01N21/1702 ,  G01B11/0658 ,  G01N21/55 ,  G01N25/72 ,  G01N21/21 ,  G01N2201/1087

Abstract: The subject invention discloses a method and apparatus for evaluating both the thickness and compositional variables in a layered or thin film sample. Two independent detection systems are provided for measuring thermal waves generated in a sample by a periodic, localized heating. One detection system is of the type that generates output signals that are primarily a function of the surface temperature of the sample. The other detection system generates signals that are primarily a function of the integral of the temperature beneath the sample surface. The two independent thermal wave measurements permit analysis of both thickness and compositional variables. An apparatus is disclosed wherein both detection systems can be implemented efficiently within one apparatus.

Abstract translation: 本发明公开了一种用于评估层状或薄膜样品中的厚度和组成变量的方法和装置。 提供了两个独立的检测系统，用于通过周期性的局部加热来测量样品中产生的热波。 一种检测系统是产生主要是样品表面温度的函数的输出信号的类型。 另一个检测系统产生主要是样品表面下方温度积分函数的信号。 两个独立的热波测量允许分析厚度和组成变量。 公开了一种在一个装置内可以有效地实现两个检测系统的装置。

公开(公告)号：US4631581A

公开(公告)日：1986-12-23

申请号：US703842

申请日：1985-02-21

Applicant: Kjell S. Carlsson

Inventor： Kjell S. Carlsson

IPC: H01J37/22 ,  G01N21/59 ,  G02B21/00 ,  G02B21/36 ,  G02B27/40 ,  G03B15/00 ,  G03B17/48 ,  H04N7/18

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G02B21/0096 ,  G01N21/474 ,  G01N21/6456 ,  G01N2201/1087

Abstract: A method for microphotometering individual volume elements of a microscope specimen 10, comprising generating a luminous dot or cursor and progressively illuminating a plurality of part elements in the focal plane 11 of the microscope through the specimen. The mutual position between the specimen and the focal plane is then changed and a plurality of part elements in the focal plane are illuminated. Reflected and/or fluorescent light and transmitted light respectively created by the illumination is collected, detected and stored for generating a three-dimensional image of that part of the specimen composed of the volume elements. Illumination of multiples of part elements is implemented by deflecting the cursor and/or by moving the specimen. The change in the relative mutual position between the specimen and the focal plane of the microscope is effected either by displacing the specimen or the objective. Apparatus for carrying out the method include a specimen table 301, a microscope objective and light source 31-32-33. The table or the objective are arranged for stepwise movement along the main axis of the microscope synchronously with punctilinear light scanning of the specimen. The table is arranged for stepwise movement at right angles to the main axis and/or the light source is arranged for deflection over the focal plane 21 through the specimen.

Abstract translation: 一种显微镜样品10的各个体积元件的显微照相测量方法，包括产生发光点或光标，并通过样本逐渐照射显微镜焦平面11中的多个部分元素。 然后改变样品和焦平面之间的相互位置，并且焦平面中的多个部分元件被照亮。 分别由照明产生的反射和/或荧光和透射光被收集，检测和存储，以产生由体积元素组成的该部分的三维图像。 通过偏转光标和/或移动样本来实现部件元件的倍数的照明。 样品与显微镜焦平面之间的相对相对位置的变化通过移动样品或物镜来实现。 用于执行该方法的装置包括样本台301，显微镜物镜和光源31-32-33。 表格或物镜被布置为与样本的点状光扫描同步地沿着显微镜的主轴逐步移动。 该台被布置成与主轴成直角地逐步运动，和/或将光源布置成通过样本在焦平面21上偏转。

公开(公告)号：US20240096667A1

公开(公告)日：2024-03-21

申请号：US18272859

申请日：2021-01-29

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Hiromichi YAMAKAWA ,  Toshifumi HONDA ,  Yuta URANO ,  Shunichi MATSUMOTO ,  Masaya YAMAMOTO ,  Eiji ARIMA

IPC: H01L21/67 ,  G01N21/95 ,  G06T7/60 ,  G06T7/70

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G06T7/60 ,  G06T7/70 ,  G01N2201/103 ,  G01N2201/1087 ,  G01N2201/121 ,  H04N23/67

Abstract: A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

公开(公告)号：US20150004684A1

公开(公告)日：2015-01-01

申请号：US13872778

申请日：2013-04-29

Applicant: The Regents of the University of California ,  The Board of Trustees of the Leland Stanford Junior University

Inventor： Carl D. Meinhart ,  Brian Piorek ,  Seung Joon Lee ,  Martin Moskovits ,  Sanjoy Banerjee ,  Juan Santiago

IPC: G01N21/65 ,  G01N33/00

CPC classification number: G01N21/658 ,  G01N21/0332 ,  G01N21/05 ,  G01N33/0057 ,  G01N2021/0346 ,  G01N2201/06113 ,  G01N2201/1087 ,  Y10S977/902

Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.

Abstract translation: 提供了利用自由表面流体学和SERS用于具有高灵敏度和特异性的分析物检测的方法，装置和系统。 分子可以是空气传播剂，包括但不限于爆炸物，麻醉剂，危险化学品或其他化学物质。 自由表面流体结构使用开放的微通道产生，并且表现出大的表面与体积比。 自由表面流体界面可以过滤干扰分子，同时浓缩空气中的分析物。 微通道流动使SERS活性探针颗粒在流动中受控聚集，从而提高检测器的灵敏度。

公开(公告)号：US20130207007A1

公开(公告)日：2013-08-15

申请号：US13840122

申请日：2013-03-15

Applicant: OLYMPUS CORPORATION

Inventor： Tetsuya Tanabe

IPC: G01N21/85

CPC classification number: G01N21/85 ,  G01N15/1434 ,  G01N21/6452 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/1087 ,  G02B21/0052 ,  G02B21/0076 ,  G02B21/008

Abstract: There is provided a method of avoiding deterioration of the accuracy in the number of detected light-emitting particles due to that two or more light-emitting particles are encompassed at a time in the light detection region in the scanning molecule counting method using an optical measurement with a confocal microscope or a multiphoton microscope. In the inventive optical analysis technique, in the detection of an individual signal indicating light of a light-emitting particle by selectively detecting a signal having an intensity beyond a threshold value as a signal indicating light of a light-emitting particle in light intensity data produced through measuring light intensity during moving the position of a light detection region in a sample solution, the threshold value is set so that a signal indicating light from a light-emitting particle encompassed in a region narrower than the light detection region will be detected selectively.

Abstract translation: 提供了一种避免由于在使用光学测量的扫描分子计数方法中在光检测区域中一次包围两个或更多个发光粒子而使检测到的发光粒子数量的精度降低的方法 用共焦显微镜或多光子显微镜。 在本发明的光学分析技术中，在通过选择性地检测具有超过阈值的强度的信号来检测指示发光粒子的光的单个信号作为产生光强度数据中的发光粒子的光的信号 通过在移动样品溶液中的光检测区域的位置时测量光强度，设定阈值，以便选择性地检测表示来自比光检测区域窄的区域中的发光粒子的光的信号。