公开(公告)号：EP1890124A1

公开(公告)日：2008-02-20

申请号：EP06746359.6

申请日：2006-05-08

Applicant: Vaclab Inc.

Inventor： WATANABE, Fumio ,  WATANABE, Reiki

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel(4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.

Abstract translation: 在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）中的至少三个电极的电离真空计振荡从 在电网（2）内部和外部的电子源（3）使通过振荡电子飞入栅格（2）的气体分子电离，通过离子收集器（1）补充离子化离子以转换成电流信号， 根据获得的电流强度确定真空设备中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

公开(公告)号：EP0899774A2

公开(公告)日：1999-03-03

申请号：EP98102090.2

申请日：1998-02-06

Applicant: Granville-Phillips Company

Inventor： Bills, Daniel Granville

IPC: H01J41/04

CPC classification number: H01J41/04

Abstract: An ionization gauge comprises a source of electrons which is disposed outside an anode volume defined by an open anode. A plurality of ion collector electrodes is disposed within said anode volume. A plurality of axially extending anode support posts support the open anode, said anode support posts being electrically connected to the open anode. The plurality of ion collector electrodes are respectively located sufficiently close to said plurality of axially extending anode support posts so as to substantially repel said electrons from said anode support posts.

Abstract translation: 电离计包括设置在由开放阳极限定的阳极体积之外的电子源。 多个离子收集器电极设置在所述阳极体积内。 多个轴向延伸的阳极支撑柱支撑敞开的阳极，所述阳极支撑柱电连接到敞开的阳极。 多个离子收集器电极分别位于足够靠近所述多个轴向延伸的阳极支撑柱的位置，以便基本上排斥来自所述阳极支撑柱的所述电子。

公开(公告)号：EP0537770A2

公开(公告)日：1993-04-21

申请号：EP92117733.3

申请日：1992-10-16

Applicant: Granville-Phillips Company

Inventor： Bills, Daniel Granville ,  Borenstein, Michael Dale ,  Arnold, Paul Clarke

IPC: H01J41/04 ,  G01L21/32

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25 % of the radius of the anode but not more than 75 % of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit the anode volume. A controller circuitry and method for controlling the operation of the ionization gauge has a source of electrons, an anode, and an ion collector electrode, including storing a plurality of calibration data sets for at least collector electrode currents and gauge sensitivities obtained with at least one reference gauge at representative values of known pressures; and calculating the gauge sensitivity corresponding to an unknown pressure in response to at least one of the data sets together with a measured value of the ion collector current. The data sets may also include representative values of the heating powers of the electron source so that the calculated sensitivity may also be compensated for variations in the electron source heating power.

Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体内，从而稳定仪表的感觉。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内，并且电子源基本上仅与前述区域相邻; （e）阳极在电子进入阳极体积并且它们离开阳极体积的区域中具有基本均匀的透明网格结构。 用于控制电离计的操作的控制器电路和方法具有电子源，阳极和离子集电极，包括存储多个校准数据集，用于至少采集电极电流和用至少一个 参考仪表已知压力的代表值; 以及响应于数据集中的至少一个以及离子集电极电流的测量值，计算对应于未知压力的量度灵敏度。 数据集还可以包括电子源的加热功率的代表值，使得计算的灵敏度也可以补偿电子源加热功率的变化。

公开(公告)号：WO2017007532A1

公开(公告)日：2017-01-12

申请号：PCT/US2016/032079

申请日：2016-05-12

Applicant: MKS INSTRUMENTS, INC.

Inventor： BLOUCH, Stephen, C. ,  ARNOLD, Paul, C. ,  BRUCKER, Gerardo, C. ,  GRABA, Wesley, J. ,  HANSEN, Douglas, C.

IPC: H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.

Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。

公开(公告)号：WO2008051603A2

公开(公告)日：2008-05-02

申请号：PCT/US2007/022663

申请日：2007-10-26

Applicant: BROOKS AUTOMATION INC. ,  KNOTT, Richard

Inventor： KNOTT, Richard

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅出的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：WO2005091330A2

公开(公告)日：2005-09-29

申请号：PCT/US2002/011321

申请日：2002-05-28

Applicant: INFICON, INC.

Inventor： ELLEFSON, Robert, E. ,  FREES, Louis, C.

IPC: H01J41/00

CPC classification number: H01J41/04

Abstract: In an ionization gauge, the effect of X-rays emitted when a collimated electron beam strikes grid surfaces in the gauge structure is reduced by a louvered beam stop. The louvered beam stop creates shadow regions having no X-rays, thus minimizing the amount of X-rays striking the collector plate and reducing the X-ray effect portion of the residual current.

Abstract translation: 在电离规中，当准直电子束撞击规格结构中的栅格表面时发射的X射线的效应通过百叶窗光束阻挡而减小。 百叶窗光束光阑产生没有X射线的阴影区域，从而最小化撞击集电板的X射线量并减少剩余电流的X射线效应部分。

公开(公告)号：WO2013119851A1

公开(公告)日：2013-08-15

申请号：PCT/US2013/025198

申请日：2013-02-07

Applicant: BROOKS AUTOMATION, INC.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L21/32

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

公开(公告)号：WO2008051603A3

公开(公告)日：2009-04-23

申请号：PCT/US2007022663

申请日：2007-10-26

Applicant: BROOKS AUTOMATION INC ,  KNOTT RICHARD

Inventor： KNOTT RICHARD

IPC: H01J41/14 ,  H01J5/46

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅射的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：WO98048445A1

公开(公告)日：1998-10-29

申请号：PCT/EP1998/001111

申请日：1998-02-27

IPC: G01L21/34 ,  H01J41/04 ,  H01J41/06

CPC classification number: H01J41/04 ,  G01L21/34

Abstract: The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.

Abstract translation: 本发明涉及一种真空潘宁计（1）与阴极和阳极; 为了避免阴极的雾化的不利影响，它建议在阴极（11）至少主要由钛组成。

公开(公告)号：WO2008010887A3

公开(公告)日：2008-10-09

申请号：PCT/US2007014130

申请日：2007-06-18

Applicant: BROOKS AUTOMATION INC ,  CARMICHAEL LARRY K ,  BORENSTEIN MICHAEL D ,  ARNOLD PAUL C ,  BLOUCH STEPHEN C ,  KNOTT RICHARD A

Inventor： CARMICHAEL LARRY K ,  BORENSTEIN MICHAEL D ,  ARNOLD PAUL C ,  BLOUCH STEPHEN C ,  KNOTT RICHARD A

IPC: H01J41/04

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。