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公开(公告)号：US07057170B2
公开(公告)日：2006-06-06
申请号：US10798376
申请日：2004-03-12
Applicant: Carl B. Freidhoff
Inventor： Carl B. Freidhoff
CPC classification number: H01J41/10 , H01J49/0013 , H01J49/288
Abstract: A solid state compact ion gauge includes an electron source, a gate electrode, an electron collector, a gas ionizer, an ion anode, and a detector all formed within a cavity of a semiconductor substrate formed of two halves bonded together and having open sides for receiving a gase sample. A sample of gas having multiple gas constituents flows into the cavity from the side where gas molecules collide with electrons flowing from the source to the collector forming ions. The ions are forced under an electric field to the detector which includes a set of detectors for sensing the constituent ions.
Abstract translation: 固态紧凑型离子计包括电子源，栅电极，电子收集器，气体离子发生器，离子阳极和检测器，它们全部形成在半导体衬底的空腔内，该半导体衬底由两半结合在一起并具有开放侧面 接收气体样品。 具有多个气体成分的气体样品从气体分子与从源极流到集电器形成离子的电子碰撞的一侧流入空腔。 离子被强制在检测器的电场下，其包括用于感测组成离子的一组检测器。
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公开(公告)号：US5834770A
公开(公告)日：1998-11-10
申请号：US891694
申请日：1997-07-11
Applicant: David H. Holkeboer , Louis C. Frees
Inventor： David H. Holkeboer , Louis C. Frees
Abstract: A mass spectrometer gas analyzer includes an ion source for producing ions of a sample gas in a defined ion volume. An ion analyzer collects and analyzes a first portion of the produced ions to determine a partial pressure for a selected gas species within the sample gas. An oppositely disposed ion collector collects a second portion of the ions to determine a total pressure of the contained gas sample. A collecting surface of the ion collector is positioned relative to the incoming ion beam to allow collection of ion current but the surface is configured such that a substantial portion of a plurality of secondary electrons produced by ion bombardment with the ion collector are deflected away from the ionization volume. The partial pressure is thus determined by the ion analyzer without secondary electrons entering the ion analyzer.
Abstract translation: 质谱仪气体分析仪包括用于产生在限定离子体积中的样品气体的离子的离子源。 离子分析仪收集并分析所产生的离子的第一部分以确定样品气体中选定气体种类的分压。 相对设置的离子收集器收集第二部分离子以确定所含气体样品的总压力。 离子收集器的收集表面相对于入射离子束定位以允许离子电流的收集，但是表面被配置为使得通过与离子收集器的离子轰击产生的多个二次电子的大部分偏离 电离体积。 分压因此由离子分析仪确定，而没有二次电子进入离子分析仪。
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公开(公告)号：US20100213363A1
公开(公告)日：2010-08-26
申请号：US12599301
申请日：2008-04-14
Applicant: Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
Inventor： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
IPC: H01J49/26
CPC classification number: G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
Abstract translation: 本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。 所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与 由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。
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公开(公告)号：US07332714B2
公开(公告)日：2008-02-19
申请号：US11375063
申请日：2006-03-15
Applicant: Fumio Watanabe , Reiki Watanabe
Inventor： Fumio Watanabe , Reiki Watanabe
CPC classification number: H01J49/147 , H01J41/10 , H01J49/4215
Abstract: In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.
Abstract translation: 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且，仅具有四极质谱仪的真空系统，其根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。
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15.再颁专利公开(公告)号：USRE38138E1
公开(公告)日：2003-06-10
申请号：US09686194
申请日：2000-10-06
Applicant: David H. Holkeboer , Robert E. Ellefson
Inventor： David H. Holkeboer , Robert E. Ellefson
IPC: H01J4940
CPC classification number: H01J49/0027 , G01L21/30 , H01J41/10 , H01J49/02 , H01J49/42
Abstract: A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.
Abstract translation: 用于线性化四极质谱系统的灵敏度的方法，以允许传感器更准确地报告高压区域中的气体的分压，其中通过多种损失机制实现所报告的数据。 根据本发明，校正因子可以经验地应用，或者在四极质谱仪系统中的软件可以配备校正软件来扩大质谱仪的有用范围。
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Patent Agency Ranking
公开(公告)号：WO2008139809A1
公开(公告)日：2008-11-20
申请号：PCT/JP2008/057249
申请日：2008-04-14
CPC classification number: G01N27/62 , G01L21/30 , H01J41/10 , H01J49/0027
Abstract: この質量分析ユニットは、被測定ガスの質量電荷比ごとのイオン電流値を検出して分圧を測定する質量分析部を備えた質量分析ユニットであって、この質量分析ユニットの特定部位の機能を低下させる特定ガスの質量電荷比の記録を予め保持する制御部をさらに備え；前記質量分析部により検出された前記特定ガスの質量電荷比のイオン電流値が所定値以上となった場合に、前記制御部が、前記特定部位の機能低下を示す警告信号を出力する。
Abstract translation: 包含用于通过检测待测气体的每个质荷比的离子电流值来测量分压的质谱分析单元还设置有控制部分，用于预先保存特定的气体的质量比的记录 导致在质谱分析单元的特定部分功能下降的气体。 当在质谱分析部分检测到的比气体的质量充电比的离子电流值达到预定值时，控制部分输出警告特定部分功能衰减的信号。
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">18.发明公开Improvements in operating quadrupole mass spectrometers in the broadband "RF only" mode 失效在宽带“射频”模式下操作QUADRUPOLE MASS SPECTROMETER的改进
公开(公告)号：EP0117717A3
公开(公告)日：1986-02-12
申请号：EP84301140
申请日：1984-02-22
Applicant: VG INSTRUMENTS GROUP LIMITED
Inventor： Batey, Jonathan Hugh
IPC: H01J49/42
CPC classification number: H01J41/10 , H01J49/4215
Abstract: This invention relates to a method of operating quadrupole mass spectrometers with only an RF potential applied to the filter rods so that the spectrometer operates to pass all ions above a particular value of m/e. In practice, spectrometers operated in this way usually show a marked loss in transmission efficiency for ions of high m/e when operated with an RF potential low enough to pass ions of m/e
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19.发明专利Quadrupole mass spectrometer with total pressure measuring electrode, and vacuum device using it 审中-公开具有总压力测量电极的QUADRUPOLE质谱仪和使用其的真空装置
公开(公告)号：JP2006266854A
公开(公告)日：2006-10-05
申请号：JP2005085044
申请日：2005-03-23
Applicant: Shinku Jikkenshitsu:Kk , 有限会社真空実験室
Inventor： WATANABE FUMIO , WATANABE REIKI
CPC classification number: H01J49/147 , H01J41/10 , H01J49/4215
Abstract: PROBLEM TO BE SOLVED: To provide a quadrupole mass spectrometer capable of performing highly accurate pressure measurement and highly accurate gas analysis simultaneously, and a means dispensing with an ionization vacuum gage by using only the quadrupole mass spectrometer for pressure measurement to be mounted on one vacuum device.
SOLUTION: Concerning a quadrupole mass spectrometer Q for measuring a partial pressure intensity classified by the kind of gas in the vacuum device 9 from an ion current intensity, this quadrupole mass spectrometer with a total pressure measuring electrode is provided with the total pressure measuring electrode 1 for surveying an ion density in a demarcated space A formed by a grid electrode 2 and an ion focusing electrode 4. This vacuum device has only the quadrupole mass spectrometer Q mounted thereon for measuring the partial pressure intensity classified by the kind of gas in the vacuum device 9 from the ion current intensity, and does not have the ionization vacuum gage except the quadrupole mass spectrometer.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供能够同时执行高精度的压力测量和高精度气体分析的四极质谱仪，以及仅使用用于测量的四极质谱仪来安装电离真空计的装置 在一个真空装置上。 解决方案：对于通过离子电流强度测量由真空装置9中的气体种类分类的分压强度的四极质谱仪Q，具有总压力测量电极的四极质谱仪具有总压力 测量电极1，用于测量由栅电极2和离子聚焦电极4形成的分界空间A中的离子密度。该真空装置仅具有安装在其上的四极质谱仪Q，用于测量由气体种类分类的分压强度 在离子电流强度的真空装置9中，除了四极质谱仪之外，不具有电离真空计。 版权所有（C）2007，JPO＆INPIT
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20.发明申请
公开(公告)号：WO2005089203A3
公开(公告)日：2006-04-20
申请号：PCT/US2005008095
申请日：2005-03-11
Applicant: NORTHROP GRUMMAN CORP , FREIDHOFF CARL B
Inventor： FREIDHOFF CARL B
IPC: H01J49/28
CPC classification number: H01J41/10 , H01J49/0013 , H01J49/288
Abstract: A solid state compact ion gauge includes an inlet, a gas ionizer, and a detector all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed in the cavity through which the cavity is evacuated by differential pumping. Preferably, the substrate is formed in two halves. The substrate halves are then bonded together after the components are provided therein.
Abstract translation: 固态紧凑型离子计包括入口，气体离子发生器和全部形成在半导体衬底中的空腔内的检测器。 气体离子发生器可以是固态电子发射器，其离子光学器件由形成在空腔中的电极提供，空腔通过差分泵浦而被抽空。 优选地，基板形成为两半。 然后在其中提供部件之后将基板半部结合在一起。
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