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    用于控制ExBWien过滤器中磁场分布的方法和结构
    2.
    发明公开
    用于控制ExBWien过滤器中磁场分布的方法和结构 失效

    公开(公告)号：CN102789948A

    公开(公告)日：2012-11-21

    申请号：CN201210155278.7

    申请日：2012-05-18

    Applicant: FEI公司

    Inventor： J.B.麦金

    IPC: H01J37/141 ,  H01J37/244

    CPC classification number: H01J37/05 ,  H01J37/15 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: 本发明涉及用于控制ExB Wien过滤器中磁场分布的方法和结构。一种ExB Wien滤质器提供用于机械调整在滤质器入口和出口端帽的磁场分布的方法和结构。可以通过在入口和出口端帽的外径的缝隙内配置多个磁垫片并且也通过在包围入口和出口孔的圆形通量坝内配置多个磁塞垫片来修改通量返回路径的磁阻。本发明的用于磁场的纯机械调整与现有技术的电磁体调整方法比较的优点包括更大可靠性、简单性、更低成本和无功率耗散。本发明可以将永磁体或者电磁体用于生成质量分离磁场。

    用于控制ExB Wien过滤器中磁场分布的方法和结构
    3.
    发明授权
    用于控制ExB Wien过滤器中磁场分布的方法和结构 失效

    公开(公告)号：CN102789948B

    公开(公告)日：2017-03-01

    申请号：CN201210155278.7

    申请日：2012-05-18

    Applicant: FEI ,  公司

    Inventor： J.B.麦金

    IPC: H01J37/141 ,  H01J37/244

    CPC classification number: H01J37/05 ,  H01J37/15 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: 本发明涉及用于控制ExB Wien过滤器中磁场分布的方法和结构。一种ExB Wien滤质器提供用于机械调整在滤质器入口和出口端帽的磁场分布的方法和结构。可以通过在入口和出口端帽的外径的缝隙内配置多个磁垫片并且也通过在包围入口和出口孔的圆形通量坝内配置多个磁塞垫片来修改通量返回路径的磁阻。本发明的用于磁场的纯机械调整与现有技术的电磁体调整方法比较的优点包括更大可靠性、简单性、更低成本和无功率耗散。本发明可以将永磁体或者电磁体用于生成质量分离磁场。

    MASS SPECTROMETER INCLUDING MULTIPLE MASS ANALYSIS STAGES AND METHOD OF OPERATION, TO GIVE IMPROVED RESOLUTION
    6.
    发明申请
    MASS SPECTROMETER INCLUDING MULTIPLE MASS ANALYSIS STAGES AND METHOD OF OPERATION, TO GIVE IMPROVED RESOLUTION 审中-公开
    质谱仪包括多个质量分析阶段和操作方法，以提供改进的分辨率

    公开(公告)号：WO0028574A2

    公开(公告)日：2000-05-18

    申请号：PCT/CA9901062

    申请日：1999-11-09

    Applicant: UNIV BRITISH COLUMBIA ,  DOUGLAS DONALD J ,  ZHAOHUI DU ,  COLLINGS BRUCE A

    Inventor： DOUGLAS DONALD J ,  DU ZHAOHUI ,  COLLINGS BRUCE A

    IPC: H01J49/42

    CPC classification number: H01J49/421 ,  H01J49/004 ,  H01J49/288 ,  H01J49/429

    Abstract: A method is provided of operating a mass spectrometer apparatus comprising a pair of quadrupole rod sets. Each quadrupole rod set is operated in a mass resolving mode. They may be operated in the same or different stability regions. The rod sets are operated to select essentially ions of the same mass to charge ratio, and are operated such that the combined resolution of the two rod sets is greater than the resolution of either rod set. The rod sets can be operated at relatively low resolution, with the combined peak shape from the two rod sets showing high resolution. This can make up for mechanical imperfections in the rod sets, losses due to high gas pressures, etc. A mass shift can be provided to give the desired resolution. The rod sets can be close coupled, and for this purpose neutralizing capacitors can be provided to prevent electrical interference between adjacent rod sets. The rod sets can be provided with the same frequency signal, which preferably is a phase locked and shifted, to give enhanced sensitivity.

    Abstract translation: 提供了一种操作包括一对四极杆组的质谱仪装置的方法。 每个四极杆组以质量分辨模式运行。 它们可以在相同或不同的稳定性区域中操作。 操作杆组以选择基本上具有相同质荷比的离子，并且操作使得两个杆组的组合分辨率大于任一杆组的分辨率。 杆组可以相对较低的分辨率操作，两个组合的组合峰形显示高分辨率。 这可以弥补棒组中的机械缺陷，由于气体压力高导致的损失等。可以提供质量偏移以给出所需的分辨率。 杆组可以紧密连接，为此，可以提供中和电容器以防止相邻杆组之间的电气干扰。 杆组可以设置有相同的频率信号，其优选地是锁相和偏移的，以提供增强的灵敏度。

    MICROMACHINED MASS SPECTROMETER
    7.
    发明申请
    MICROMACHINED MASS SPECTROMETER 审中-公开
    MICROMACHINED质谱仪

    公开(公告)号：WO9512894A3

    公开(公告)日：1995-06-22

    申请号：PCT/US9410385

    申请日：1994-09-14

    Applicant: ROSEMOUNT ANALYTICAL INC

    Inventor： SITTLER FRED C

    IPC: H01J27/26 ,  H01J49/16 ,  H01J49/28

    CPC classification number: H01J49/168 ,  H01J27/26 ,  H01J49/0018 ,  H01J49/288

    Abstract: A micromachined mass spectrometer (10) includes an ionizer (30), a separation region (32) and a detector (34). The ionizer (30) is formed from an upper electrode (36), a center electrode (38) and a lower electrode (40). Ionization (30) of a sample gas takes place around an edge (48) of the center electrode (38). Accelerating electrodes (54, 56) extract ionized particles from the ionizer (30). Ionized particles are accelerated through the separation region (32). A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region (32) causing the trajectory of the ionized particles to bend. The mass spectrometer (10) is formed using micromachined techniques and is carried on a single substrate (24).

    A MEMS MASS SPECTROMETER
    8.
    发明申请
    A MEMS MASS SPECTROMETER 审中-公开
    MEMS质谱仪

    公开(公告)号：WO2007055756A2

    公开(公告)日：2007-05-18

    申请号：PCT/US2006028695

    申请日：2006-07-24

    Applicant: NORTHROP GRUMMAN CORP ,  FREIDHOFF CARL B

    Inventor： FREIDHOFF CARL B

    CPC classification number: H01J49/288 ,  H01J49/0018

    Abstract: A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.

    Abstract translation: 一种MEMS质谱仪，其具有连接在盖和底座之间的金属壁，其中壁限定了包括样本气体输入室，离子发生器室，多个离子光学腔室和离子分离室的多个内部腔室。 在离子分离室的末端处的检测器阵列包括沿着两条平行线定位的多个V形检测器元件，并且布置成拦截在质谱仪中产生的所有电离束。

    FIELD IONIZING ELEMENTS AND APPLICATIONS THEREOF
    9.
    发明申请
    FIELD IONIZING ELEMENTS AND APPLICATIONS THEREOF 审中-公开
    现场电离元件及其应用

    公开(公告)号：WO2003001219A2

    公开(公告)日：2003-01-03

    申请号：PCT/US2002/020322

    申请日：2002-06-25

    Applicant: IONFINITY LLC ,  HARTLEY, Frank, T.

    Inventor： HARTLEY, Frank, T.

    IPC: G01R

    CPC classification number: G01N27/68 ,  H01J49/168 ,  H01J49/288

    Abstract: A field ionizing element formed of a membrane that houses electrodes therein that are located closer to one another than the mean free path of the gas being ionized. The membrane includes a supporting portion, and a non supporting portion where the ions are formed. The membrane may be used as the front end for a number of different applications including a mass spectrometer, a rotating field mass spectrometer, a thruster, an ion mobility element, or an electrochemical device such as a fuel cell.

    Abstract translation: 由容纳电极的膜形成的场离子化元件比离子化的气体的平均自由路径更靠近彼此。 膜包括支撑部分和形成离子的非支撑部分。 该膜可用作许多不同应用的前端，包括质谱仪，旋转场质谱仪，推进器，离子迁移元件或诸如燃料电池的电化学装置。

    SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR
    10.
    发明申请
    SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR 审中-公开
    固态微机械质谱仪通用气体检测传感器

    公开(公告)号：WO1996016430A1

    公开(公告)日：1996-05-30

    申请号：PCT/US1994013509

    申请日：1994-11-22

    Applicant: NORTHROP GRUMMAN CORPORATION

    Inventor： NORTHROP GRUMMAN CORPORATION ,  FRIEDHOFF, Carl, B. ,  YOUNG, Robert, M. ,  SRIRAM, Saptharishi

    IPC: H01J49/00

    CPC classification number: H01J49/288 ,  H01J49/0018

    Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

    Abstract translation: 固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。 气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。 质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。 维恩滤波器的电场由形成在空腔的壁上的电极提供。 检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔 。

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