A METHOD AND APPARATUS FOR VIEWING
    11.
    发明申请
    A METHOD AND APPARATUS FOR VIEWING 审中-公开
    一种用于查看的方法和装置

    公开(公告)号:WO1996015429A1

    公开(公告)日:1996-05-23

    申请号:PCT/US1995014768

    申请日:1995-11-09

    CPC classification number: G01J4/00

    Abstract: An apparatus (10) comprises an optical filter (12), which resolves electromagnetic radiation into a sequence of resolved polarization components, an imaging device (14), having a storage device (16), and a driver (18). The imaging device (14) receives the sequence of resolved polarization components from the optical filter (12) and stores them in the storage device (16). The driver (18), which receives the video synchronization signal, produces a filter synchronization signal which is provided to the optical filter (12) to cause the optical filter (12) to produce the sequence of resolved polarization components so the optical filter (12) is in synchronization with the imaging device (14). This apparatus (10) is used to view the polarization properties of a scene.

    Abstract translation: 一种装置(10)包括滤光器(12),其将电磁辐射分解成一系列分辨的偏振分量,成像装置(14),具有存储装置(16)和驱动器(18)。 成像装置(14)从光学滤波器(12)接收分离的偏振分量序列,并将其存储在存储装置(16)中。 接收视频同步信号的驱动器(18)产生滤波器同步信号,滤波器同步信号被提供给滤光器(12),以使滤光器(12)产生分辨的偏振分量序列,使得滤光器(12) )与成像装置(14)同步。 该装置(10)用于观看场景的偏振特性。

    METHOD AND APPARATUS FOR USE OF POLARIZED LIGHT VECTORS IN EVALUATING CONSTITUENT COMPOUNDS IN A SPECIMEN
    12.
    发明申请
    METHOD AND APPARATUS FOR USE OF POLARIZED LIGHT VECTORS IN EVALUATING CONSTITUENT COMPOUNDS IN A SPECIMEN 审中-公开
    在样本中评估组分化合物中使用偏振光矢量的方法和装置

    公开(公告)号:WO1994005984A1

    公开(公告)日:1994-03-17

    申请号:PCT/US1993008319

    申请日:1993-09-03

    CPC classification number: G01N21/21

    Abstract: A device and method for determining the identity and concentration of constituent compounds of a test specimen (14) based on polarization effect when the specimen (14) is subjected to randomly or partially polarized light (12). The polarization effect will cause the intensity of light passing through the specimen (14) at one angle of polarization to be different than the intensity of light exiting the specimen (14) at a second angle at a specific wavelength and will result in an elliptically polarized light. The intensity of light exiting the specimen (14) in various planes of polarization is measured by irradiating the specimen (14) with randomly or partially polarized light and then polarizing the light reflected from or passing through the specimen (14) in different planes of polarization angles and measuring (24) the intensity of light in each of the these polarization planes at one or more wavelenghts of light (Fig. 3).

    Abstract translation: 一种用于当试样(14)受到无规或部分偏振光(12)时,基于极化效应来确定试样(14)的构成化合物的特性和浓度的装置和方法。 极化效应将使得以一个偏振角穿过试样(14)的光的强度不同于在特定波长处以第二角度离开试样(14)的光的强度,并且将导致椭圆极化 光。 通过用不规则的偏振光照射样本(14),然后将不同的偏振面反射或穿过样本(14)的光偏振,来测量在各个偏振平面中离开样本(14)的光强度 角度并测量(24)在一个或多个光束波长处的这些偏振面中的每一个中的光的强度(图3)。

    DETERMINATION OF INDUCED CHANGE OF POLARIZATION STATE OF LIGHT
    13.
    发明申请
    DETERMINATION OF INDUCED CHANGE OF POLARIZATION STATE OF LIGHT 审中-公开
    诱导光的偏振态变化的确定

    公开(公告)号:WO1992021949A1

    公开(公告)日:1992-12-10

    申请号:PCT/DK1992000177

    申请日:1992-06-04

    Abstract: A method of determining induced change of polarization state of light in a polarization element comprising transmitting unpolarized light from a light source at the one end of an optical transmitter waveguide means (21) to polarizer means (31) at the other end; polarizing the unpolarized light by the polarizer means (31); transmitting the polarized light through the polarization element (41, 41A, 41B) using at least one reflective optical element; analyzing the transmitted polarized light from the polarization element by an analyzer means (32); and transmitting the analysed polarized light from the one end of optical receiver waveguide means (22) to a light detector at the other end; wherein the unpolarized light polarized by the polarizer means (31), the polarized light analysed by the analyzer means (32), or both, are non-collimated; and the polarized light in the light path between the polarizer means (31) and the analyzer means (32) is collected and reflected by at least one reflective imaging optical element (51) so that the analyzed light exits the analyzer means (32) from the same side as the unpolarized light enters the polarizer (31). Further, fiber optic sensor devices for determining induced change of polarization state of light in a polarization element, particularly linear birefringence induced by electric voltage, electric field, and mechanical force, and circular birefringence induced by electric current and magnetic field.

    Abstract translation: 一种确定偏振元件中的光的偏振状态的诱导变化的方法,包括将光发射器波导装置(21)的一端的光源的非偏振光传输到另一端的偏振器装置(31) 通过偏振器装置(31)偏振非偏振光; 使用至少一个反射光学元件透射偏振光(41,41A,41B); 通过分析器装置(32)分析来自偏振元件的透射偏振光; 并将分析的偏振光从光接收器波导装置(22)的一端传输到另一端的光检测器; 其中由偏振器装置(31)偏振的非偏振光,由分析装置(32)分析的偏振光或两者都是非准直的; 并且偏振器装置(31)和分析装置(32)之间的光路中的偏振光被至少一个反射成像光学元件(51)收集并反射,使得分析的光从分析器装置(32)离开 与非偏振光相同的一侧进入偏振器(31)。 此外,用于确定偏振元件中的光的偏振态的诱导变化的光纤传感器装置,特别是由电压,电场和机械力引起的线性双折射,以及由电流和磁场引起的圆形双折射。

    METHOD AND INSTRUMENT FOR POLARIZATION MEASUREMENT
    14.
    发明申请
    METHOD AND INSTRUMENT FOR POLARIZATION MEASUREMENT 审中-公开
    用于偏振测量的方法和仪器

    公开(公告)号:WO1998013676A1

    公开(公告)日:1998-04-02

    申请号:PCT/JP1997003391

    申请日:1997-09-24

    CPC classification number: G01N21/6445 G01J3/4406 G01J3/447 G01J4/00 G01N21/65

    Abstract: The polarization of fluorescent light or Raman scattering light which is emitted from a sample when light is applied to the sample is measured with high accuracy. Excitation light which is emitted from a pulse excitation light source (1) and is p-polarized by a polarizer (2) and a half-wave plate (3) is applied to a sample (7) and the p-polarization component intensity Ipp and s-polarization component intensity Ips of the emitted fluorescent light are measured by photodetectors (13 and 14). In the same way, s-polarized excitation light is applied to the sample (7) and the p-polarization component intensity Isp and s-polarization component intensity Iss of emitted fluorescent light are measured. The G-factor is obtained from those measured values by a following formula: G = [(Ipp.Isp)/(Ips.Iss)] . Polarization responsiveness correction is performed in accordance with the G-factor to obtain the polarization of the fluorescent light.

    Abstract translation: 以高精度测量向样品施加光时从样品发出的荧光或拉曼散射光的极化。 从脉冲激励光源(1)发射并由偏振器(2)和半波片(3)p极化的激发光施加到样品(7)上,并且p偏振分量强度Ipp 并且通过光电检测器(13和14)测量发射的荧光的s偏振分量强度Ips。 以相同的方式,对样品(7)施加s偏振激发光,并测量发射荧光的p偏振分量强度Isp和s偏振分量强度Iss。 G因子通过下式由这些测量值获得:G = [(Ipp.Isp)/(Ips.Iss)] 1/2。 根据G因子执行极化响应性校正,以获得荧光的偏振。

    METHOD AND APPARATUS FOR MONITORING THE STATE OF A LIQUID-CRYSTAL POLARIZATION MODULATOR
    15.
    发明申请
    METHOD AND APPARATUS FOR MONITORING THE STATE OF A LIQUID-CRYSTAL POLARIZATION MODULATOR 审中-公开
    用于监测液晶极化调制器状态的方法和装置

    公开(公告)号:WO1997045711A1

    公开(公告)日:1997-12-04

    申请号:PCT/US1997008820

    申请日:1997-05-27

    CPC classification number: G02F1/31 G01J4/04

    Abstract: A liquid crystal (LC) polarization modulator segment (216, 218) includes a monitoring device (220). The monitoring device (220) includes a polarized reference light source (222), located at an LC polarization monitor input, and polarized light detector (224), located at an LC polarization monitor output. If the reference light having the correct polarization is received at the detector (224), an indication of the switch state is provided. Alternatively, if the polarized detector (224) includes orthogonal polarizers (230A, 230B) provided for two separate light detectors (232A, 232B) both the desired polarization, and the opposite polarization, may be monitored to determine whether a failure exists in the segment. If the reference light is detected having the opposite polarization (instead of or in addition to the correct polarization) or no light is detected, the segment (or the monitor) is not operating correctly.

    Abstract translation: 液晶(LC)偏振调制器段(216,218)包括监视装置(220)。 监视装置(220)包括位于LC偏振监视器输入处的偏振参考光源(222)和位于LC偏振监视器输出处的偏振光检测器(224)。 如果在检测器(224)处接收到具有正确极化的参考光,则提供开关状态的指示。 或者,如果偏振检测器(224)包括为两个单独的光检测器(232A,232B)提供的正交偏振器(230A,230B),则可以监视期望的极化和相反极化,以确定是否存在该段中的故障 。 如果检测到参考光具有相反的偏振(代替或除正确的偏振之外)或没有检测到光,则该段(或监视器)不能正确地操作。

    METHOD FOR IMPROVING OPTICAL MEASUREMENT OF ROUGH SAMPLES IN ELLIPSOMETRY AND REFLECTOMETRY
    16.
    发明申请
    METHOD FOR IMPROVING OPTICAL MEASUREMENT OF ROUGH SAMPLES IN ELLIPSOMETRY AND REFLECTOMETRY 审中-公开
    改进光学测量法和反射光谱法中粗糙样品的光学测量方法

    公开(公告)号:WO1996024034A1

    公开(公告)日:1996-08-08

    申请号:PCT/US1996001495

    申请日:1996-02-01

    CPC classification number: G01N21/211

    Abstract: A method and apparatus for optical measurements of rough samples (2) in ellipsometry and reflectometry wherein optical probe beams (A-D) are reflected from the sample (2). The method includes directing an optical probe beam (A-D) so that it is reflected from a sample (2), and directing the optical probe beam reflected (A'-D') from the sample, and wherein at least one of the sample (2) and the probe beam (A-D) is moved during the directing of the probe beam (A-D) so that a relative movement of the sample (2) and the probe beam (A-D) with respect to one another at the surface of the sample (2) from which the probe beam (A-D) is reflected exceeds an amount of roughness scale of the sample (2) so as to produce independent speckle patterns in the reflected beam (A'-D') during the directing. The reflected probe beam (A'-D') is detected with a photodetector (6) which responds to intensity of the reflected optical probe beam (A'-D') averaged over a predetermined time period.

    Abstract translation: 用于椭圆测量和反射测量的粗糙样品(2)的光学测量的方法和装置,其中光学探针光束(A-D)从样品(2)反射。 该方法包括引导光学探针光束(AD)使得其从样品(2)反射,并引导来自样品的光学探针光束反射(A'-D'),并且其中至少一个样品 在探测光束(AD)的引导期间,探测光束(AD)被移动,使得样品(2)和探针光束(AD)在样品表面处相对于彼此的相对运动 探测光束(AD)反射的光束(2)超过样品(2)的粗糙度的量,以便在引导期间在反射光束(A'-D')中产生独立的散斑图案。 反射的探测光束(A'-D')用一个光电探测器(6)进行检测,光电探测器(6)响应在预定的时间周期内平均的反射光探针光束(A'-D')的强度。

    APPARATUS AND PROCESS FOR PERFORMING ELLIPSOMETRIC MEASUREMENTS OF SURFACES
    17.
    发明申请
    APPARATUS AND PROCESS FOR PERFORMING ELLIPSOMETRIC MEASUREMENTS OF SURFACES 审中-公开
    表面表面光亮度测量的装置和方法

    公开(公告)号:WO1990010852A1

    公开(公告)日:1990-09-20

    申请号:PCT/US1990001307

    申请日:1990-03-16

    Abstract: A compact ellipsometric apparatus (70) is constructed using as a building block a tri-beam ellipsometric sensor having a monichromatic source (30) of polarized light with a diverging beam of sufficient divergence that three analyzers (52) and associated light detectors (54) may be placed into the beam side by side so that they each receive light reflected from a surface (24) under study at the same angle of reflection. Pairs of these sensors (72, 74) are used together, with one of each pair having in the optical path a quarter plate (40) matched to the monochromatic light wavelength and the other of the pair having no quarter wave plate, but with the light wavelength and angle of incidence being the same for each pair. A variety of measurements are made by constructing apparatus (80) using one or more pairs of these basic sensors, the pairs of sensors varying from each other in the light wavelength of the source and the angle of incidence of the polarized beam of light to the surface (24). Various apparatus having from one to six pairs of sensors have been designed, with higher numbers of sensors providing greater generality in respect to the properties that can be measured.

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