公开(公告)号：JP2006512753A

公开(公告)日：2006-04-13

申请号：JP2004563030

申请日：2003-12-30

Applicant: シーイービーティー・カンパニー・リミティッドCebt Co., Ltd.

Inventor： アーン・セウンジョーン ,  キム・ダエウォーク ,  キム・ホセオブ

IPC: H01L21/027 ,  G03F9/00 ,  G21K1/00 ,  G21K5/04 ,  H01J3/02 ,  H01J3/10 ,  H01J37/04 ,  H01J37/06 ,  H01J37/067 ,  H01J37/15

CPC classification number: H01J3/028 ,  H01J3/10 ,  H01J37/067 ,  H01J37/15 ,  H01J2237/1205 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/24465 ,  H01J2237/24507

Abstract: 【課題】 電子放出源から放出される電子（電子ビーム）の位置をエクストラクタで直接感知することによって、マイクロカラムのエクストラクタ孔及び電子放出源の整列をより容易に且つ簡便に行うことができ、しかも自動整列を可能にすることによって、長時間電子カラムを使用しても、正確な整列補正を容易に且つ自動に行うことができるエクストラクタ及びこれらを整列する方法を提供する。
【解決手段】 本発明によるマイクロカラムに用いられるエクストラクタは、電子放出源から放出された電子ビームの電子を電気的に導通させる複数の感知領域と、電子の流れを遮断する絶縁体又は電子の流れを減少させる低濃度ドープ半導体よりなり、前記各々の感知領域を分割する絶縁部と、を備える。

公开(公告)号：JPH02112125A

公开(公告)日：1990-04-24

申请号：JP18549588

申请日：1988-07-27

Applicant: CANON KK

Inventor： SHIMIZU AKIRA ,  ONO HARUTO ,  NOMURA ICHIRO ,  SAKANO YOSHIKAZU ,  KANEKO TETSUYA ,  TAKEDA TOSHIHIKO ,  SUZUKI HIDETOSHI

IPC: H01J3/10 ,  H01J1/316 ,  H01J3/18 ,  H01J3/30

Abstract: PURPOSE:To reduce the flicker of a luminous part by electron beams by providing a high potential side electrode on a base surface, providing an electron emitting part in contact with the circumference of the exposed part of this high potential side electrode, and further providing a low potential side electrode in contact with the circumference of the electron emitting part. CONSTITUTION:When a voltage is applied to an accelerating power source 6, electrons tend to converge into the center as the whole. The reason is that as a high potential side electrode 1 has a high potential and a low potential side electrode 2 has a low potential, such a potential distribution that the electrons are converged to the high potential side of the center is generated. Hence, when the electrons are converged to a target electrode 9 by using the accelerating power source 6, a satisfactory convergence property can be obtained without providing an external convergence lens such as a lens electrode as in the past. Thus, as the conventional electrode and convergence lens are made into an integral combined structure of the high potential side electrode 1 and the low potential side electrode 2, the electron beams can be converged into a particular place, or the vertical direction of the center point of this element.

公开(公告)号：JPS55151300A

公开(公告)日：1980-11-25

申请号：JP5917279

申请日：1979-05-16

Applicant: KOGYO GIJUTSUIN

Inventor： TOMIMASU TAKIO

IPC: H01J37/141 ,  G21K1/00 ,  G21K1/093 ,  H01J3/10 ,  H01J37/10 ,  H05H7/00 ,  H05H7/04

公开(公告)号：JPS5194667U

公开(公告)日：1976-07-29

申请号：JP1214175

申请日：1975-01-27

IPC: H01J37/305 ,  H01J3/10 ,  H01J37/26 ,  H01L21/027

公开(公告)号：JPS54100555U

公开(公告)日：1979-07-16

申请号：JP17495477

申请日：1977-12-27

IPC: H01J3/10 ,  H01J29/48 ,  H01J29/54

公开(公告)号：JPS5394554U

公开(公告)日：1978-08-01

申请号：JP17726076

申请日：1976-12-29

IPC: H01J3/10 ,  H01J29/48 ,  H01J29/54 ,  H01J31/26

公开(公告)号：JPS534388B1

公开(公告)日：1978-02-16

申请号：JP6035371

申请日：1971-08-11

IPC: H01J3/10 ,  H01J37/063 ,  H01J37/065 ,  H01J29/48 ,  H01J3/02

Abstract: In an electron gun, an anode structure in which the electron beam aperture is defined by four mutually insulated anode segments which may be energized to provide beam centering. In a preferred embodiment, the anode segments are shaped to intercept the beam if it is off-center, and are returned to ground potential through respective resistors thereby being operative automatically to center the beam.

公开(公告)号：JPS50106648U

公开(公告)日：1975-09-02

申请号：JP11339773

申请日：1973-09-29

IPC: H01F21/06 ,  H01J3/10

公开(公告)号：JPS5021075B1

公开(公告)日：1975-07-19

申请号：JP3218473

申请日：1973-03-20

IPC: H01J3/10

公开(公告)号：US07368734B2

公开(公告)日：2008-05-06

申请号：US10574281

申请日：2004-12-28

Applicant: Sei Umisedo ,  Nariaki Hamamoto

Inventor： Sei Umisedo ,  Nariaki Hamamoto

IPC: H01J3/10

CPC classification number: H01J37/3171 ,  H01J37/244 ,  H01J2237/24405 ,  H01J2237/2446 ,  H01J2237/24507 ,  H01J2237/31703 ,  H01L21/26586

Abstract: A beam current density distribution in y direction of an ion beam 4 at a position of a forestage beam restricting shutter 32 is measured by measuring a change in a beam current of the ion beam 4 incident on a forestage multipoint Faraday 24 by passing an outer side of a side 34 of the shutter 32 while driving the forestage beam restricting shutter 32 in y direction by a forestage shutter driving apparatus 36. Further, a beam current density distribution in y direction of the ion beam 4 at a position of a poststage beam restricting shutter 42 is measured by measuring a change in the beam current of the ion beam 4 incident on a poststage multipoints Faraday 28 by passing an outer side of a side 44 of the shutter 42 while driving the poststage beam restricting shutter 42 in y direction by a poststage shutter driving apparatus 46. Further, at least one of an angle deviation, a diverging angle and abeam side in y direction of the ion beam 4 is measured by using a result of the measurement.

Abstract translation: 通过测量入射在森林多点法拉第24上的离子束4的射束电流的变化，测量离子束4在森林束限制闸门32的位置处的y方向上的束流密度分布，通过使外侧 同时通过森林快门驱动装置36在y方向上驱动森林光束限制快门32，同时快门32的侧面34。 此外，通过测量入射在后级多点法拉第28上的离子束4的射束电流的变化来测量离子束4在后级束限制闸门42的位置的y方向上的束流密度分布， 同时通过后级快门驱动装置46驱动后级束限制快门42在y方向上的快门42的侧面44的外侧。 此外，通过使用测量结果测量离子束4的y方向上的角度偏差，发散角度和光焦度中的至少一个。