公开(公告)号：US20250046589A1

公开(公告)日：2025-02-06

申请号：US18926803

申请日：2024-10-25

Applicant: INFICON AG

Inventor： Urs WÄLCHLI ,  Stefan KAISER ,  Bernhard ANDREAUS ,  Martin WÜEST ,  Astrid WALDNER ,  Michael TREFZER

IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

Abstract: A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.

公开(公告)号：JPH0415577B2

公开(公告)日：1992-03-18

申请号：JP19605385

申请日：1985-09-06

Applicant: ULVAC CORP

Inventor： NAKAZATO MEGUMI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/10 ,  H01J49/24 ,  H01J49/26

公开(公告)号：JPS637424B2

公开(公告)日：1988-02-16

申请号：JP12232179

申请日：1979-09-21

Applicant: MATSUSHITA ELECTRIC IND CO LTD

Inventor： NAKAO FUSAFUMI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/14

公开(公告)号：JPWO2016002045A1

公开(公告)日：2017-04-27

申请号：JP2016530762

申请日：2014-07-03

Applicant: 株式会社島津製作所

Inventor： 真一 山口 ,  真一 山口

IPC: H01J41/10

CPC classification number: H01J49/0009 ,  G01N30/724 ,  G01N2030/626 ,  H01J49/0422 ,  H01J49/0431 ,  H01J49/0445 ,  H01J49/145 ,  H01J49/165

Abstract: 本発明の質量分析装置(1)のイオン化室(11)は、測定試料を噴霧するための測定試料流路(155)を有するプローブ(15)と、前記イオン化室内部にマススペクトルの質量電荷比の校正に用いられる標準試料を噴霧するための標準試料流路(255)を備える。前記標準試料はパルスバルブ(216)を介して、前記イオン化室に間欠的に導入される。これにより、測定試料と標準試料との混在を防止しつつ、標準試料の導入タイミングを適切に制御することができる。また、短時間に複数種類の測定試料が次々にイオン化室に導入されるような場合でも、各測定試料の正確なマススペクトルの取得が可能となる。

公开(公告)号：JPS6258559A

公开(公告)日：1987-03-14

申请号：JP19605385

申请日：1985-09-06

Applicant: ULVAC CORP

Inventor： NAKAZATO MEGUMI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/10 ,  H01J49/24 ,  H01J49/26

Abstract: PURPOSE:To make it possible to acquire a strong ion current intensity and to measure the whole voltage and partial voltages at a time, by measuring the ion current flowing to a voltage source applied with an ion energy voltage which presses out generated ions to a mass analyzer electrode. CONSTITUTION:Thermions from a filament 1 form a current loop returning through an ionization power source Ee to the filament 1. Ions generated at an ion source are pressed out to an electrode of a mass analyzer by an ion energy voltage from an ion energy power source Ei, and a part thereof enters a detector to be measured as a mass spectrum, while some parts enter a focus electrode 3 and some are caught in the mass analyzer electrode. These ion currents form a current loop passing through the earth side of the ion energy voltage source Ei and returning to a grid electrode 2 of the ion source with no exception. Since the whole ion current can be measured in such a way, a strong ion current intensity is acquired, and, the whole voltage and partial voltages can be measured at a time.

公开(公告)号：US12154771B2

公开(公告)日：2024-11-26

申请号：US18431091

申请日：2024-02-02

Applicant: INFICON AG

Inventor： Urs Wälchli ,  Stefan Kaiser ,  Bernhard Andreaus ,  Martin Wüest ,  Astrid Waldner ,  Michael Trefzer

IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

公开(公告)号：JP2005062176A

公开(公告)日：2005-03-10

申请号：JP2004226004

申请日：2004-08-02

Applicant: Varian Spa ,  ヴァリアン ソシエタ ペル アジオーニ

Inventor： CORREALE RAFFAELE

IPC: G01L21/34 ,  H01J41/06 ,  H01J41/10

CPC classification number: B82Y10/00 ,  H01J41/06

Abstract: PROBLEM TO BE SOLVED: To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure. SOLUTION: An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 especially after operating a vacuum pump. The vacuum gauge comprises an electron emission cathode 31 created by utilizing a nano tube technique, a grid 13 for accelerating electrons emitted by the cathode, and a plate 15 for capturing gas ions and/or positive ionized molecules. A residual value in the container can be determined by measuring a plate current by a galvanometer. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有高灵敏度并且不会对影响测量压力产生任何干扰的小型化真空计。 解决方案：电离真空计测量残留在容器10中的气态物质的残留压力，特别是在操作真空泵之后。 真空计包括通过利用纳米管技术产生的电子发射阴极31，用于加速由阴极发射的电子的栅极13和用于捕获气体离子和/或阳离子分子的板15。 通过用电流计测量板电流可以确定容器中的残留值。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JPS5645562A

公开(公告)日：1981-04-25

申请号：JP12232179

申请日：1979-09-21

Applicant: MATSUSHITA ELECTRIC IND CO LTD

Inventor： NAKAO FUSAFUMI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/14

Abstract: PURPOSE:To enable an ion collector to be suitably used for monitoring the process of vapor flow during the production of vapor-deposition film by installing the ion collector in an ionization box, and shielding an electron generator from the introduction holes of a screening cylinder. CONSTITUTION:A shield electrode 9 and 9' are installed at the opposite sides of an ionization box 8. The shield electrode 9 is provided with an ion-drawing hole 17 penetrating the center of that, and ions produced by electronic impact which is caused in the ionization box 8 are injected toward a mass spectrograph. A needlelike whole-pressure-measuring ion-collector 10 is an electrode for measuring the amount of ions produced in the ionization box 8, and works as an ion-thrusting electrode during the measurement of a partial pressure. A screening cylinder 13 surrounds the ionization box 8, a filament 7 and 7', and it is provided with a vapor- introducing hole 14 and 14'. The holes 14 and 14' introduce a vapor flow 15, which serves as an analysis sample, into the ionization box 8.

公开(公告)号：US6025723A

公开(公告)日：2000-02-15

申请号：US917932

申请日：1997-08-27

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32 ,  H05B31/26 ,  H05H15/00

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

公开(公告)号：DE112011100568B4

公开(公告)日：2017-01-19

申请号：DE112011100568

申请日：2011-02-15

Applicant: ULVAC INC

Inventor： NAKAJIMA TOYOAKI ,  KUROKAWA YUUJIROU ,  YURI TSUTOMU ,  TANAKA RYOTA

IPC: H01J49/42 ,  G01N27/62 ,  H01J41/10

Abstract: Vierpol-Massenspektrometer, das in der Lage ist, Gaskomponenten eines Gases in einem Prüfkörper (TP) zu analysieren, wobei das Vierpol-Massenspektrometer einen Sensorteil (M1) und einen rohrförmigen Körper (P) umfasst, der den Sensorteil (M1) umgibt, wobei der Körper (P) eingerichtet ist, abnehmbar an dem Prüfkörper (TP) angebracht zu werden, wobei der Körper (P) ein erstes mit dem Prüfkörper (TP) zu verbindendes Ende (P1) und ein zweites Ende (P2) umfasst; wobei der Sensorteil (M1) umfasst: eine vorgegebene Form eines Trägerkörpers (1), der an das zweite Ende (P2) des Körpers (P) montiert ist; Anschlussklemmen (23a, 23b, 24a, 24b) , die den Trägerkörper (1) durchdringen, eine Ionenquelle (2), die innerhalb des Körpers (P) am Trägerkörper (1) angeordnet ist und einen Glühfaden (22) und ein Gitter (21) zum Ionisieren des Gases aufweist; einen Vierpol-Teil (3), der innerhalb des Körpers (P) und zwischen der Ionenquelle (2) und dem ersten Ende (P1) des Körpers (P) angeordnet ist und in dem vier säulenförmige Elektroden (31) in einem vorgegebenen Umfangs-Abstand voneinander angeordnet sind; und einen Ionennachweisteil (4), der innerhalb des Körpers (P) zwischen dem Vierpol-Teil (3) und dem ersten Ende (P1) des Körpers (P) angeordnet ist, um vorgegebene Ionen zu sammeln, die durch Anlegen von Gleich- und Wechselspannungen zwischen gegenüberstehenden Elektroden (31) durch den Vierpol-Teil (3) strömen, wobei freie Enden des Glühfadens (22) und des Gitters (21) direkt an die Anschlussklemmen (23a, 23b, 24a, 24b) angeschlossen sind.