公开(公告)号：US20070171409A1

公开(公告)日：2007-07-26

申请号：US11649293

申请日：2007-01-04

Applicant: Xinghua Wang ,  Thomas Voigt

Inventor： Xinghua Wang ,  Thomas Voigt

IPC: G01J3/40

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/024 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0294 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/2846 ,  G01J3/44 ,  G01N21/253 ,  G01N21/6452 ,  G01N2021/6417

Abstract: In one embodiment, the disclosure relates to a method including: collecting photons from the sample having a plurality of regions to form a sample optical data set; selectively transmitting a first portion of the optical data set through a first of a plurality of apertures of an electro-optical shutter, each of the plurality of apertures optically communicating a portion of the optical data set; geometrically conforming the first portion of the optical data set for communication with a spectrometer opening; processing the conformed first portion of the optical data set at the spectrometer to obtain a spectrum for a first of the plurality of sample regions.

公开(公告)号：US20070147726A1

公开(公告)日：2007-06-28

申请号：US11316241

申请日：2005-12-22

Applicant: Peter Kiesel ,  Oliver Schmidt

Inventor： Peter Kiesel ,  Oliver Schmidt

IPC: G02B6/26

CPC classification number: G02B6/4215 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  G02B6/29358 ,  G02B6/4298

Abstract: In detection and sensing, light is transmitted through layers or structures that vary laterally, such as with a constant gradient or a step-like gradient. After transmission, a position of a transmitted portion of the light or of output photons can be used to determine wavelength change or to obtain other photon energy information. The light can be received, for example, from a stimulus-wavelength converter such as an optical fiber sensor or another optical sensor. A component that propagates the light from the converter to a transmission structure can spread the light across the transmission structure's entry surface. At the exit surface of the transmission structure, photosensor components can sense or detect transmitted light or output photons, such as with a photosensor array or a position sensor. A photosensed quantity can be compared, such as with another photosensed quantity or with a calibration quantity. A differential quantity can be obtained using photosensed quantities.

Abstract translation: 在检测和感测中，光通过横向变化的层或结构透射，例如以恒定的梯度或阶梯状梯度。 在传输之后，可以使用光或输出光子的透射部分的位置来确定波长变化或获得其它光子能量信息。 光可以例如从诸如光纤传感器或另一光学传感器的刺激 - 波长转换器接收。 将来自转换器的光传播到透射结构的部件可以将光传播穿过透射结构的入射表面。 在透射结构的出射表面处，光电传感器部件可以感测或检测透射光或输出光子，例如用光电传感器阵列或位置传感器。 可以比较光照数量，例如与另一张照片数量或校准数量。 使用光照量可以获得差分量。

公开(公告)号：US07158231B1

公开(公告)日：2007-01-02

申请号：US10699540

申请日：2003-11-01

Applicant: John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

Inventor： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC: G01J4/00

CPC classification number: G01J3/447 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/10 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

Abstract: A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.

Abstract translation: 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统存在于环境控制室中。

公开(公告)号：US07080912B2

公开(公告)日：2006-07-25

申请号：US11034412

申请日：2005-01-12

Applicant: Lacy G. Cook

Inventor： Lacy G. Cook

IPC: G02B5/10

CPC classification number: G01J3/024 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/2823 ,  G02B17/0663

Abstract: An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero. The collimating-and-imaging module may be optimized to minimize spectral smile.

Abstract translation: 成像光谱仪包括全反射目标模块，其接收图像输入并在出射狭缝处产生目标模块输出，以及全反射准直和成像模块，其将目标模块输出接收为目标端输入， 产生准直结束输出，其中准直和成像模块包括反射三联体。 色散元件接收准直端输出，并产生通过准直和成像模块反射的准直和成像模块中的色散端输入，以产生光谱图像端输出。 成像检测器接收准直和成像模块的光谱图像端输出。 目标模块可以是其中具有整体校正器镜的三镜式反射镜，或全反射中继光学系统，其包括一组五个电源镜，其功率基本为零。 可以优化准直和成像模块以最小化光谱微笑。

公开(公告)号：US20060109571A1

公开(公告)日：2006-05-25

申请号：US10530608

申请日：2003-10-07

Applicant: Jean-Charles Hubinois ,  Vincent Lavoine ,  Herve Chollet

Inventor： Jean-Charles Hubinois ,  Vincent Lavoine ,  Herve Chollet

IPC: G02B5/08

CPC classification number: G01J3/28 ,  G01J3/0208 ,  G01J3/024

Abstract: This system collects light emitted by at least one light source (52) and focuses it onto at least one light detection device (54). Preferably, it comprises a first mirror (58) that collects light emitted by the source and focuses it on a second mirror (60) that focuses it in turn onto the device. The system is provided with a chamber that is opaque to all light, particularly ultraviolet radiation, and in which the light source, the light detection device and the mirrors are placed, and means of creating a vacuum in this chamber and filling it with a gas that is transparent to ultraviolet radiation.

Abstract translation: 该系统收集由至少一个光源（52）发射的光并将其聚焦到至少一个光检测装置（54）上。 优选地，其包括第一反射镜（58），其收集由源发射的光并将其聚焦在第二反射镜（60）上，所述第二反射镜将其依次聚焦到所述装置上。 该系统设置有对所有光，特别是紫外线辐射是不透明的室，其中放置有光源，光检测装置和反射镜，以及在该室中产生真空并用气体填充的装置 对紫外线辐射是透明的。

公开(公告)号：US06844931B2

公开(公告)日：2005-01-18

申请号：US10303335

申请日：2002-11-25

Applicant: Peter Ehbets

Inventor： Peter Ehbets

IPC: G01J3/10 ,  G01N21/25 ,  G01J3/42

CPC classification number: G01J3/50 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/501 ,  G01N21/251 ,  G01N21/255 ,  G01N2021/4757 ,  G01N2201/062

Abstract: A spectrophotometer including an optical measurement head, a spectrometer and a control electronic. The measurement head is equipped with a multi-channel illumination arrangement having exclusively light emitting diodes as spectrally continuous light source. Each illumination channel includes a light emitting diode, whereby each light emitting diode is separately controllable. In combination with the control electronic, an illumination with electronically adjustable spectral characteristics is hereby realized.

Abstract translation: 一种分光光度计，包括光学测量头，光谱仪和控制电子。 测量头配备有专用发光二极管作为光谱连续光源的多通道照明装置。 每个照明通道包括发光二极管，由此每个发光二极管是可分开控制的。 结合控制电子，由此实现了具有电子可调光谱特性的照明。

公开(公告)号：US06750972B2

公开(公告)日：2004-06-15

申请号：US10173190

申请日：2002-06-14

Applicant: Richard L. Sandstrom ,  John T. Melchior ,  Rajasekhar Rao

Inventor： Richard L. Sandstrom ,  John T. Melchior ,  Rajasekhar Rao

IPC: G01B902

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J1/429 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/024 ,  G01J3/027 ,  G01J9/02 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: The present invention provides a wavemeter for an ultraviolet laser capable of long life beam quality monitoring in a pulsed ultraviolet laser system at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater. In a preferred embodiment an enhanced illumination configuration reduces per pulse illumination of an etalon by a factor of 28 compared to a popular prior art configuration. Optics are provided in this embodiment which reduce light entering the etalon to only that amount needed to illuminate a linear photo diode array positioned to measure interference patterns produced by the etalon. In this preferred embodiment two sample beams produced by reflections from two surfaces of a beam splitter are diffused by a defractive diffuser and the output of the defractive diffuser is focused on two separate secondary diffusers effectively combining both beams in two separate spectrally equivalent diffuse beams. One beam is used for wavelength and bandwidth measurement and the other beam is used for calibration. In preferred embodiments an etalon chamber contains nitrogen with an oxygen concentration of between 1.6 and 2.4 percent.

Abstract translation: 本发明提供了一种用于紫外激光器的波长计，其能够在脉冲能量为5mJ以上的脉冲紫外激光系统中以大于2000Hz的脉冲速率进行长寿命光束质量监测。 在一个优选实施例中，与常用的现有技术配置相比，增强的照明配置将标准具的每脉冲照明降低了28倍。 在该实施例中提供光学器件，其将进入标准具的光仅仅照射照亮定位成测量由标准具产生的干涉图案的线性光电二极管阵列所需的量。 在该优选实施例中，通过来自分束器的两个表面的反射产生的两个采样光束被减光扩散器扩散，并且消光扩散器的输出聚焦在两个分开的二次扩散器上，两个分离的二次扩散器在两个分开的光谱等效漫射光束中有效地组合两个光束。 一个波束用于波长和带宽测量，另一个波束用于校准。 在优选实施例中，标准具室含有氧浓度在1.6和2.4％之间的氮。

公开(公告)号：US20030227628A1

公开(公告)日：2003-12-11

申请号：US09939887

申请日：2001-08-27

Inventor： David I. Kreimer ,  Oleg A. Yevin ,  Robert Weber

IPC: G01N021/25

CPC classification number: G01N21/6452 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/32 ,  G01J3/36 ,  G01J3/44 ,  G01J2003/1213 ,  G01N21/31 ,  G01N21/6428 ,  G01N21/658 ,  G01N2021/3137 ,  G01N2021/3177 ,  G01N2021/6484 ,  G01N2021/656

Abstract: Systems and methods for filter based spectrographic analysis are provided that permit rapid analysis of bioanalytes. Systems include devices for illuminating a sample with electromagnetic radiation and capturing radiation emitted from the sample. Emitted radiation can be collected by a plurality of waveguides each associated with a filter for a particular wavelength of radiation. Focusing devices are associated with filters and waveguides in certain embodiments. Radiation captured by waveguides can then be transmitted to a remote detector, which can determine the intensity of radiation for each waveguide. The use of a plurality of filters having different, band pass characteristics can permits the simultaneous detection of a plurality of different wavelengths of radiation emitted by a sample, thereby providing spectrographic information about the sample under study. Systems can include computers for storing acquired spectrographic information, addressable arrays of samples, and information security measures. Spectrographic information of samples can be diagnostic tools for identifying and quantifying a variety of different materials, including bioanalytes.

Abstract translation: 提供了基于过滤器的光谱分析的系统和方法，可以快速分析生物分析物。 系统包括用于用电磁辐射照射样品并捕获从样品发射的辐射的装置。 发射的辐射可以被多个波导收集，每个波导与用于特定波长的辐射的滤波器相关联。 在某些实施例中，聚焦装置与滤波器和波导相关联。 然后可以将波导捕获的辐射传输到远程检测器，这可以确定每个波导的辐射强度。 使用具有不同带通特性的多个滤光器可以允许同时检测由样品发射的多个不同波长的辐射，从而提供关于正在研究的样品的光谱信息。 系统可以包括用于存储获取的光谱信息的计算机，可寻址的样本阵列和信息安全措施。 样品的光谱信息可以是用于识别和量化各种不同材料（包括生物分析物）的诊断工具。

公开(公告)号：US6100974A

公开(公告)日：2000-08-08

申请号：US153381

申请日：1998-09-15

Applicant: Francis M. Reininger

Inventor： Francis M. Reininger

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/00

CPC classification number: G01J3/02 ,  G01J3/024 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/2823

Abstract: An imaging spectrometer has fore-optics coupled to a spectral resolving system with an entrance slit extending in a first direction at an imaging location of the fore-optics for receiving the image, a convex diffraction grating for separating the image into a plurality of spectra of predetermined wavelength ranges; a spectrometer array for detecting the spectra; and at least one concave sperical mirror concentric with the diffraction grating for relaying the image from the entrance slit to the diffraction grating and from the diffraction grating to the spectrometer array. In one embodiment, the spectrometer is configured in a lateral mode in which the entrance slit and the spectrometer array are displaced laterally on opposite sides of the diffraction grating in a second direction substantially perpendicular to the first direction. In another embodiment, the spectrometer is combined with a polychromatic imaging camera array disposed adjacent said entrance slit for recording said image.

Abstract translation: 成像光谱仪具有耦合到光谱分辨系统的前光学，其具有在用于接收图像的前光学器件的成像位置处沿第一方向延伸的入射狭缝，用于将图像分离成多个光谱的凸衍射光栅 预定波长范围; 用于检测光谱的光谱仪阵列; 以及与衍射光栅同心的至少一个凹形精镜，用于将图像从入射狭缝中传播到衍射光栅，并且从衍射光栅到光谱仪阵列。 在一个实施例中，光谱仪被配置为横向模式，其中入射狭缝和光谱仪阵列在基本上垂直于第一方向的第二方向上在衍射光栅的相对侧横向移位。 在另一个实施例中，光谱仪与邻近所述入口狭缝设置的用于记录所述图像的多色成像相机阵列组合。

公开(公告)号：US4784487A

公开(公告)日：1988-11-15

申请号：US207037

申请日：1988-06-14

Applicant: George W. Hopkins, II ,  Barry G. Willis

Inventor： George W. Hopkins, II ,  Barry G. Willis

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/10

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/024

Abstract: An optical relay having a pair of simple lenses and an opaque barrier defining an aperture. In a spectrometer, the optical relay is positioned between a light source and an opaque barrier defining a slit to focus light of a reference wavelength w.sub.r onto the slit. The location of the aperture and the choice of w.sub.r are selected so that the flux of light through the slit is substantially flat as a function of wavelength.

Abstract translation: 具有一对简单透镜和限定孔径的不透明屏障的光学继电器。 在光谱仪中，光学继电器位于光源和限定狭缝的不透明屏障之间，以将参考波长wr的光聚焦到狭缝上。 选择孔的位置和选择wr，使得通过狭缝的光通量作为波长的函数基本上是平坦的。