Abstract:
PROBLEM TO BE SOLVED: To provide a spectroscopic camera in which the ideal central axes of incident angle limitation means, a spectral element, and an imaging element are matched, and to provide an alignment adjustment method.SOLUTION: A spectroscopic camera includes: a light incident part 121 provided with incident angle limitation means and a first alignment mark 121M; a wavelength variable interference filter 5 provided with a second alignment mark 5M; and a circuit board 124 provided with an imaging element 123 and a third alignment mark 124M. Deviation amount of the mechanical central axis and an ideal central axis, and the rotation angle in each configuration are measured, a relative position of the first alignment mark 121M and the second alignment mark 5M is adjusted so that respective ideal central axes are matched, and a relative position of the second alignment mark 5M and the third alignment mark 124M is adjusted.
Abstract:
PROBLEM TO BE SOLVED: To overcome any difficulty in attainment of a tunable diode laser absorption spectroscopy (TDLAS).SOLUTION: A multiplexer 16 optically-connected with outputs of two or more diode lasers 12 having selected laser oscillating frequencies is optically-connected with an optical fiber on pitch side. A multiplexed laser beam is transmitted to a pitch optical component 20 associated with a process chamber 22 through the pitch side optical fiber. The pitch optical component 20 is oriented so as to radiate a multiplexed laser output through inside the process chamber. A catch optical component 24 receives the radiated multiplexed laser output. The catch optical component 24 is optically-connected with an optical fiber transmitting the multiplexed laser output to a demultiplexer 28. The demultiplexer 28 demultiplexes a laser beam to optically-connect the selected laser oscillating frequency of the laser beam with a detector 25. This detector has sensitivity to one of the selected laser oscillating frequencies.
Abstract:
PROBLEM TO BE SOLVED: To provide a light measuring device measuring light by efficiently taking the light from each part of a surface light source. SOLUTION: The light measuring device 1 for measuring light from the surface light source 101 comprises: a space division device 3 performing operation for subsequently taking the light from each part of the surface light source 101; an optical light collecting device 5 collecting the light from each part of the surface light source 101 taken by operation of the space division device 3; and a detector 7 receiving the light collected by the optical light collecting device 5 and outputting the signals according to the received light. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a light receiving optical system capable of controlling an amount of light in response to a viewing angle change by being hardly influenced on reproduction errors due to optical system movement for changing a viewing angle. SOLUTION: An objective optical system, a viewing angle restricting opening body, and a relay optical system for condensing light to be measured condensed on an imaging face of the objective optical system in a viewing angle restricting aperture to be incident on the viewing angle restricting aperture are provided. The light receiving optical system has: the relay optical system composed to selectively arrange a relay lens at any one position of first and second conjugate positions; a first light flux restricting aperture body having a first light flux restricting aperture arranged proximally on the relay lens at the first conjugate position; and a second light flux restricting aperture body having a second light flux restricting aperture arranged proximally on the relay lens at the second conjugate position. The light receiving optical system restricts an incident light flux to the viewing angle restricting aperture at the first and second conjugate positions by the first and second light flux restricting apertures by forming a magnified image of the viewing angle restricting aperture when arranging the relay lens at the first conjugate position, and forming a reduced image of the viewing angle restricting aperture on the imaging face of the objective optical system when arranging the relay lens at the second conjugate position. COPYRIGHT: (C)2009,JPO&INPIT