公开(公告)号：EP2891173A4

公开(公告)日：2016-03-30

申请号：EP13832999

申请日：2013-09-02

Applicant: SEMICONDUCTOR TECH & INSTR INC

Inventor： JIN JIAN PING ,  LEE LENG KHEAM

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J11/0095 ,  B25J15/0616 ,  B25J15/0658 ,  B25J15/0666 ,  G01B11/27 ,  G01N21/9501 ,  G01N2201/025 ,  H01L21/67144 ,  H01L21/67706 ,  H01L21/6838 ,  H01L21/68757 ,  Y10T29/49826

Abstract: A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface.

公开(公告)号：EP2891175A4

公开(公告)日：2016-03-02

申请号：EP13833045

申请日：2013-09-02

Applicant: SEMICONDUCTOR TECH & INSTR INC

Inventor： JIN JIAN PING ,  LEE LENG KHEAM

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J11/0095 ,  B25J15/0616 ,  B25J15/0658 ,  B25J15/0666 ,  G01B11/27 ,  G01N21/9501 ,  G01N2201/025 ,  H01L21/67144 ,  H01L21/67706 ,  H01L21/6838 ,  H01L21/68757 ,  Y10T29/49826

Abstract: A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface.

公开(公告)号：EP2795294A4

公开(公告)日：2015-12-09

申请号：EP12857516

申请日：2012-12-14

Applicant: SIEMENS HEALTHCARE DIAGNOSTICS

Inventor： MILESKY LAWRENCE ,  ZANTOS GEORGE

IPC: G01N21/01 ,  G01B11/14 ,  G01N21/25 ,  G01N21/27 ,  G01N21/84 ,  G01N35/00

CPC classification number: G01N21/8483 ,  G01B11/14 ,  G01N21/253 ,  G01N21/27 ,  G01N35/00069 ,  G01N35/04 ,  G01N2035/00148 ,  G01N2035/0491 ,  G01N2201/025 ,  G01N2201/0438 ,  G01N2201/06113

Abstract: A reagent card analyzer comprises an optical signal source configured to transmit an optical signal and an optical signal detector spaced a distance from the optical signal source to define an optical signal path into which the optical signal is transmitted, the optical signal detector configured to detect the optical signal and to output an electrical signal indicative of the optical signal. A reader is configured to read a reagent pad of a reagent card. A reagent card moving mechanism is configured to move the reagent card having the reagent pad including a leading and trailing end through the optical signal path. An optical detector interface is electrically coupled with the optical signal detector and configured to receive electrical signals and to output a pad detect signal indicative of at least one of the leading and the trailing end as the reagent card is moved through the optical signal path.

公开(公告)号：EP2909597A1

公开(公告)日：2015-08-26

申请号：EP13846762.6

申请日：2013-10-18

Applicant: Picarro, Inc.

Inventor： RELLA, Chris, W. ,  CROSSON, Eric, R. ,  WOELK, Michael, R. ,  TAN, Sze, Meng

IPC: G01M3/04 ,  F17D5/02

CPC classification number: G01M3/20 ,  G01M3/38 ,  G01N21/01 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/0314 ,  G01N2201/025

Abstract: Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

公开(公告)号：EP2891173A1

公开(公告)日：2015-07-08

申请号：EP13832999.0

申请日：2013-09-02

Applicant: Semiconductor Technologies & Instruments Pte Ltd.

Inventor： JIN, Jian Ping ,  LEE, Leng Kheam

IPC: H01L21/677 ,  H01L21/68 ,  H01L21/683

CPC classification number: H01L21/681 ,  B25J11/0095 ,  B25J15/0616 ,  B25J15/0658 ,  B25J15/0666 ,  G01B11/27 ,  G01N21/9501 ,  G01N2201/025 ,  H01L21/67144 ,  H01L21/67706 ,  H01L21/6838 ,  H01L21/68757 ,  Y10T29/49826

Abstract: A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface.

公开(公告)号：EP1882189A2

公开(公告)日：2008-01-30

申请号：EP06784370.6

申请日：2006-04-20

Applicant: Fluidigm Corporation

Inventor： SUN, Gang ,  HARRIS, Greg ,  MAY, Andrew ,  SELF, Kyle ,  FARRELL, Kevin ,  WYATT, Paul

IPC: G01N35/00

CPC classification number: G01N35/00029 ,  B01L3/5027 ,  B01L3/502715 ,  B01L2200/10 ,  B01L2300/06 ,  B01L2300/0654 ,  B01L2300/0829 ,  C12Q1/686 ,  G01N15/1475 ,  G01N21/6428 ,  G01N35/00732 ,  G01N35/00871 ,  G01N35/0092 ,  G01N35/0099 ,  G01N35/1065 ,  G01N2035/00148 ,  G01N2035/00237 ,  G01N2035/00752 ,  G01N2035/0091 ,  G01N2035/1034 ,  G01N2201/025 ,  G01N2201/0446 ,  Y10S901/01 ,  Y10T436/11

Abstract: Systems for managing workflows to perform chemical or biological reactions using microfluidic devices.

公开(公告)号：EP1750129A3

公开(公告)日：2007-07-18

申请号：EP06022907.7

申请日：2002-02-06

Applicant: Massachusetts Institute of Technology

Inventor： Harper, James Douglas ,  Mathews, Richard Hart ,  Johnson, Bernadette ,  Petrovick, Martha Susan ,  Rundell, Ann ,  Nargi, Frances Ellen ,  Stephens, Timothy ,  Mendenhall, Linda Marie ,  Hollis, Mark Alexander ,  Young, Albert M. ,  Rider, Todd Holman ,  Schwoebel, Eric David ,  Vian, Trina Rae

IPC: C12Q1/04

CPC classification number: G01N33/554 ,  G01N15/0205 ,  G01N21/07 ,  G01N21/64 ,  G01N21/6428 ,  G01N21/75 ,  G01N21/76 ,  G01N33/54373 ,  G01N33/54393 ,  G01N33/56983 ,  G01N33/582 ,  G01N2021/6439 ,  G01N2201/025 ,  G01N2201/061 ,  Y10S435/808 ,  Y10S436/805

Abstract: The invention relates to optoelectronic systems for detecting one or more target particles, for example bacteria and antigens. The system includes a reaction chamber, a specimen collector, an optical detector, and a reservoir containing cells, each of the cells having receptors which are present on the surface of each cell and are specific for the target particle to be detected, where binding of the target particle to the receptors directly or indirectly activates a reporter molecule, for example aequorin or indo-1, thereby producing a measurable optical signal.

Abstract translation: 本发明涉及用于检测一种或多种目标颗粒（例如细菌和抗原）的光电子系统。 该系统包括反应室，样品收集器，光学检测器和含有细胞的储存器，每个细胞具有存在于每个细胞表面上的受体并且对待检测的目标颗粒具有特异性，其中结合 目标颗粒与受体直接或间接激活报道分子，例如水母发光蛋白或吲哚-1，由此产生可测量的光学信号。

公开(公告)号：EP1364070A4

公开(公告)日：2004-03-17

申请号：EP02726568

申请日：2002-02-06

Applicant: MASSACHUSETTS INST TECHNOLOGY

Inventor： HARPER JAMES DOUGLAS ,  MATHEWS RICHARD HART ,  JOHNSON BERNADETTE ,  PETROVICK MARTHA SUSAN ,  RUNDELL ANN ,  NARGI FRANCES ELLEN ,  STEPHENS TIMOTHY ,  MENDENHALL LINDA MARIE ,  HOLLIS MARK ALEXANDER ,  YOUNG ALBERT M ,  RIDER TODD HARRISON ,  SCHWOEBEL ERIC DAVID ,  VIAN TRINA RAE

IPC: G01N21/64 ,  C12M1/34 ,  C12Q1/04 ,  G01N1/36 ,  G01N21/77 ,  G01N21/78 ,  G01N33/53 ,  G01N33/543 ,  G01N33/569 ,  G01N33/58 ,  G01N33/50 ,  C12M1/28 ,  C12Q1/02 ,  C12Q1/24

CPC classification number: G01N33/554 ,  G01N15/0205 ,  G01N21/07 ,  G01N21/64 ,  G01N21/6428 ,  G01N21/75 ,  G01N21/76 ,  G01N33/54373 ,  G01N33/54393 ,  G01N33/56983 ,  G01N33/582 ,  G01N2021/6439 ,  G01N2201/025 ,  G01N2201/061 ,  Y10S435/808 ,  Y10S436/805

Abstract: The invention relates to optoelectronic systems for detecting one or more target particles (Figure 4). The system includes a reaction chamber, a specimen collector, an optical detector, and a reservoir containing cells, each of the cells having receptors which are present on the surface of each cell and are specific for the target particle to be detected, where binding of the target particle to the receptors directly or indirectly activates a reporter molecule, thereby producing a measurable optical signal.

公开(公告)号：EP1364070A2

公开(公告)日：2003-11-26

申请号：EP02726568.5

申请日：2002-02-06

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： HARPER, James, Douglas ,  MATHEWS, Richard, Hart ,  JOHNSON, Bernadette ,  PETROVICK, Martha, Susan ,  RUNDELL, Ann ,  NARGI, Frances, Ellen ,  STEPHENS, Timothy ,  MENDENHALL, Linda, Marie ,  HOLLIS, Mark, Alexander ,  YOUNG, Albert, M. ,  RIDER, Todd, Harrison ,  SCHWOEBEL, Eric, David ,  VIAN, Trina, Rae

IPC: C12Q1/68 ,  G01N27/26 ,  G01N33/53 ,  G01N33/543 ,  G01N33/552 ,  G01N33/554 ,  H01L21/203 ,  H01L29/00

CPC classification number: G01N33/554 ,  G01N15/0205 ,  G01N21/07 ,  G01N21/64 ,  G01N21/6428 ,  G01N21/75 ,  G01N21/76 ,  G01N33/54373 ,  G01N33/54393 ,  G01N33/56983 ,  G01N33/582 ,  G01N2021/6439 ,  G01N2201/025 ,  G01N2201/061 ,  Y10S435/808 ,  Y10S436/805

Abstract: The invention relates to optoelectronic systems for detecting one or more target particles (Figure 4). The system includes a reaction chamber, a specimen collector, an optical detector, and a reservoir containing cells, each of the cells having receptors which are present on the surface of each cell and are specific for the target particle to be detected, where binding of the target particle to the receptors directly or indirectly activates a reporter molecule, thereby producing a measurable optical signal.

公开(公告)号：TW201602560A

公开(公告)日：2016-01-16

申请号：TW104115658

申请日：2015-05-15

Applicant: 克萊譚克公司 ,  KLA-TENCOR CORPORATION

Inventor： 馬立夫 伊凡 ,  MALEEV, IVAN ,  卡迪 梵卡泰 ,  KODE, VENKATA

IPC: G01N21/88

CPC classification number: G01N21/9503 ,  G01N21/47 ,  G01N21/55 ,  G01N2201/025 ,  G01N2201/061

Abstract: 本發明提供用於判定一晶圓上之(若干)固定位置之晶圓檢查座標之方法及系統。一系統包含經組態以將光引導至一晶圓之一邊緣上之一光點之一照明子系統。該光點延伸超出該晶圓之該邊緣。該系統亦包含一載台，該載台使該晶圓旋轉藉此使該光點掃描遍及該晶圓之該邊緣。該系統亦包含一偵測器，該偵測器經組態以在該光點掃描遍及該邊緣時偵測來自該光點之光且回應於該經偵測光產生輸出。該系統進一步包含一電腦處理器，該電腦處理器經組態以基於該輸出判定該晶圓之該邊緣上之兩個或兩個以上位置之晶圓檢查座標且基於該邊緣上之該兩個或兩個以上位置之該等晶圓檢查座標判定該晶圓上之(若干)固定位置之晶圓檢查座標。

Abstract in simplified Chinese: 本发明提供用于判定一晶圆上之(若干)固定位置之晶圆检查座标之方法及系统。一系统包含经组态以将光引导至一晶圆之一边缘上之一光点之一照明子系统。该光点延伸超出该晶圆之该边缘。该系统亦包含一载台，该载台使该晶圆旋转借此使该光点扫描遍及该晶圆之该边缘。该系统亦包含一侦测器，该侦测器经组态以在该光点扫描遍及该边缘时侦测来自该光点之光且回应于该经侦测光产生输出。该系统进一步包含一电脑处理器，该电脑处理器经组态以基于该输出判定该晶圆之该边缘上之两个或两个以上位置之晶圆检查座标且基于该边缘上之该两个或两个以上位置之该等晶圆检查座标判定该晶圆上之(若干)固定位置之晶圆检查座标。