SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER AND ITS PRODUCTION METHOD
    211.
    发明申请
    SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER AND ITS PRODUCTION METHOD 审中-公开
    光学会员合成石英玻璃及其制作方法

    公开(公告)号:WO2005059972A2

    公开(公告)日:2005-06-30

    申请号:PCT/JP2004/019443

    申请日:2004-12-17

    Abstract: A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5 ~10¿14? defects/cm¿3? and at least 1 ~10¿13? defects/cm¿3?. The fluorine concentration is preferably at most 100 ppm.

    Abstract translation: 得到不含压实和稀释的用于光学构件的合成石英玻璃。 用于光学构件的合成石英玻璃,其用于使用波长最多为400nm且至少170nm的光作为光源的光学元件,其基本上不含氧过剩缺陷,溶解的氧分子或还原型 缺陷,其氯浓度最多为50ppm,OH基浓度为至多100ppm,并且在氧浓度范围内至多为5〜10×14×缺陷/ cm 3的含氧缺陷。 至少1〜10〜13? 缺陷/cm¿3?. 氟浓度优选为100ppm以下。

    METHOD FOR PRODUCING BULK FUSED SILICA
    213.
    发明申请
    METHOD FOR PRODUCING BULK FUSED SILICA 审中-公开
    生产大理石二氧化硅的方法

    公开(公告)号:WO02022513A1

    公开(公告)日:2002-03-21

    申请号:PCT/US2001/028482

    申请日:2001-09-12

    Abstract: A method for preparing high-purity, bulk fused silica includes supplying silane gas (11), a gaseous fuel (8), and oxygen gas (10B) to a combustion burner (14). A fuel and oxygen mixture (13) is produces when fuel (8) and oxygen gas (10A) in a premixing chamber (12). Nitrogen gas (17A) may also be supplied to the burner (14) which is located in the crown (16) of a furnace (15). Silica particles are formed by passing the silane gas into a flame formed by the combustion reaction of the gaseous fuel with the oxygen gas while maintaining the ratio of the flow rate of the gaseous fuel to the flow rate of the silane gas no less than twelve and the ratio of the flow rate of the gaseous fuel to the flow rate of the oxygen gas no less than three. Silane flow rates are controlled with a mass flow controller (51) and the flow of other gasses is monitored with flow meters (49). The silica particles formed are immediately deposited onto a hot bait (18) inside a containment vessel (21) to form a boule (19).

    Abstract translation: 制备高纯度体积熔融二氧化硅的方法包括向燃烧器(14)供给硅烷气体(11),气态燃料(8)和氧气(10B)。 当预混合室(12)中的燃料(8)和氧气(10A)时,产生燃料和氧气混合物(13)。 也可以将氮气(17A)供应到位于炉(15)的冠部(16)中的燃烧器(14)。 通过使硅烷气体通过气体燃料与氧气的燃烧反应形成的火焰中,同时保持气体燃料的流量与硅烷气体的流量的比率不小于12而形成二氧化硅颗粒, 气体燃料的流量与氧气的流量的比率不小于3。 用质量流量控制器(51)控制硅烷流量,并用流量计(49)监测其他气体的流量。 形成的二氧化硅颗粒立即沉积在容纳容器(21)内部的热诱饵(18)上以形成一个(19)。

    METHOD AND DEVICE FOR FORMING QUARTZ GLASS
    214.
    发明申请
    METHOD AND DEVICE FOR FORMING QUARTZ GLASS 审中-公开
    用于形成石英玻璃的方法和装置

    公开(公告)号:WO00044678A1

    公开(公告)日:2000-08-03

    申请号:PCT/JP2000/000469

    申请日:2000-01-28

    Abstract: A method of forming quartz glass by pressurizing at least one set of opposing planes of synthetic quartz bulk by a pressurizing means, characterized in that an air-permeable elastic member is disposed between the pressurizing means and the above planes of the synthetic quartz bulk pressurized by the pressurizing means and the synthetic quartz bulk is pressurized by the pressurizing means via the elastic member, whereby it is possible to satisfactorily control the amount of bubbles remaining in the quartz glass formed body after formation to thereby provide a method of producing quartz glass having excellent optical characteristics with an excellent yield.

    Abstract translation: 一种通过加压装置对合成石英体的至少一组相对平面进行加压而形成石英玻璃的方法,其特征在于,在所述加压装置和所述合成石英体的上述平面之间设置通气性弹性构件, 加压装置和合成石英体被加压装置通过弹性构件加压,从而可以令人满意地控制形成后的石英玻璃成形体中剩余的气泡量,从而提供了具有优异的石英玻璃的制造方法 光学特性优异。

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